EP 4177465 A1 20230510 - VACUUM PUMP APPARATUS
Title (en)
VACUUM PUMP APPARATUS
Title (de)
VAKUUMPUMPENVORRICHTUNG
Title (fr)
APPAREIL DE POMPE À VIDE
Publication
Application
Priority
JP 2021182249 A 20211109
Abstract (en)
A vacuum pump apparatus capable of maintaining an inside of a rotor chamber (1) of a pump casing (2) at a high temperature and capable of being easily attached and removed a heater (70A,70B) is disclosed. The vacuum pump apparatus includes: a pump casing (2); a pump rotor (5) arranged in the rotor chamber; a rotation shaft (7) to which the pump rotor is fixed; an electric motor (8) coupled to the rotation shaft; a side cover (10a, 10B) forming an end surface of the rotor chamber; a housing structure located outwardly of the side cover in an axial direction of the rotation shaft; and a cartridge heater (70A, 70B) disposed in the side cover and removably attached to the side cover or the pump casing. The cartridge heater has a heater and a heater casing (71) covering at least a part of the heater, and the heater casing has a slit ( 72A) extending from one end to other end thereof.
IPC 8 full level
F04B 37/14 (2006.01); F04B 53/08 (2006.01); F04C 25/02 (2006.01); F04C 29/04 (2006.01)
CPC (source: CN EP KR)
F04B 37/14 (2013.01 - EP); F04B 53/08 (2013.01 - EP); F04C 23/02 (2013.01 - CN KR); F04C 25/02 (2013.01 - CN EP KR); F04C 29/0085 (2013.01 - KR); F04C 29/04 (2013.01 - CN EP KR); F04C 2220/10 (2013.01 - KR); F04C 2240/20 (2013.01 - KR); F04C 2240/30 (2013.01 - KR); F04C 2240/40 (2013.01 - KR); F04C 2240/60 (2013.01 - KR); F05B 2240/20 (2013.01 - KR); F05B 2240/60 (2013.01 - KR); F05B 2260/30 (2013.01 - KR)
Citation (applicant)
- JP 2003035290 A 20030207 - EBARA CORP
- JP 2021063503 A 20210422 - EBARA CORP
Citation (search report)
- [XAI] WO 2020255300 A1 20201224 - KASHIYAMA IND LTD [JP]
- [AD] JP 2021063503 A 20210422 - EBARA CORP
- [AD] JP 2003035290 A 20030207 - EBARA CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
EP 4177465 A1 20230510; CN 116104762 A 20230512; JP 2023070219 A 20230519; KR 20230068302 A 20230517; TW 202331101 A 20230801
DOCDB simple family (application)
EP 22205764 A 20221107; CN 202211386301 A 20221107; JP 2021182249 A 20211109; KR 20220139940 A 20221027; TW 111142439 A 20221107