EP 4182587 A1 20230524 - APPARATUS FOR PROTECTING FLUID LINES IN AN EUV SOURCE
Title (en)
APPARATUS FOR PROTECTING FLUID LINES IN AN EUV SOURCE
Title (de)
VORRICHTUNG ZUM SCHUTZ VON FLÜSSIGKEITSLEITUNGEN IN EINER EUV-QUELLE
Title (fr)
APPAREIL DE PROTECTION DE LIGNES DE FLUIDE DANS UNE SOURCE EUV
Publication
Application
Priority
- US 202063052184 P 20200715
- EP 2021066794 W 20210621
Abstract (en)
[origin: WO2022012869A1] A source material valve placed in a fluid feed line for a source material chamber such as a source material refill reservoir to prevent molten source material in the chamber from reaching and so contaminating and blocking the fluid feed lines upstream of the source material valve in the event of a pressure malfunction.
IPC 8 full level
F16K 31/22 (2006.01); H05G 2/00 (2006.01)
CPC (source: EP)
F16K 15/06 (2013.01); F16K 31/22 (2013.01); H05G 2/005 (2013.01); H05G 2/006 (2013.01); H05G 2/008 (2013.01)
Citation (search report)
See references of WO 2022012869A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022012869 A1 20220120; CN 115803551 A 20230314; EP 4182587 A1 20230524; TW 202218486 A 20220501
DOCDB simple family (application)
EP 2021066794 W 20210621; CN 202180049142 A 20210621; EP 21736273 A 20210621; TW 110121613 A 20210615