EP 4189485 A1 20230607 - APPARATUS AND METHOD FOR MAKING SEAMLESS SOFT STAMPS
Title (en)
APPARATUS AND METHOD FOR MAKING SEAMLESS SOFT STAMPS
Title (de)
VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON NAHTLOSEN WEICHSTEMPELN
Title (fr)
APPAREIL ET PROCÉDÉ POUR FABRIQUER DES TAMPONS SOUPLES SANS JOINT
Publication
Application
Priority
- US 202063060314 P 20200803
- US 2021041246 W 20210712
Abstract (en)
[origin: WO2022031404A1] The present disclosure provides for an imprint lithography apparatus including a backing plate, and one or more masters coupled to the backing plate. Each of the masters includes a base coupled to the backing plate, and at least one mesa structure extending from the base. Each mesa structure includes features disposed thereon. The imprint lithography apparatus is capable of producing stamps used to further pattern devices, or the imprint lithography apparatus is capable of producing devices. The stamps and devices produced from the imprint lithography apparatus is substantially free of defects associated with seams that are disposed between adjacent masters.
IPC 8 full level
G03F 7/00 (2006.01); B29C 59/02 (2006.01)
CPC (source: EP KR)
G03F 7/0002 (2013.01 - EP KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022031404 A1 20220210; CN 116056866 A 20230502; EP 4189485 A1 20230607; JP 2023537471 A 20230901; KR 20230044281 A 20230403; TW 202212966 A 20220401
DOCDB simple family (application)
US 2021041246 W 20210712; CN 202180056876 A 20210712; EP 21853658 A 20210712; JP 2023507223 A 20210712; KR 20237006950 A 20210712; TW 110127277 A 20210726