EP 4197022 A1 20230621 - SLIT DIAPHRAGM
Title (en)
SLIT DIAPHRAGM
Title (de)
SPALTBLENDE
Title (fr)
DIAPHRAGME À FENTE
Publication
Application
Priority
- DE 102020004935 A 20200813
- EP 2021067511 W 20210625
Abstract (en)
[origin: WO2022033757A1] The present invention relates to a slit diaphragm, to a slit diaphragm system comprising at least two slit diaphragms positioned adjacent to one another, and to a coating module or a coating unit having a slit diaphragm.
IPC 8 full level
H01J 37/34 (2006.01); C23C 14/22 (2006.01); C23C 14/34 (2006.01)
CPC (source: EP US)
C23C 14/22 (2013.01 - EP); C23C 14/3407 (2013.01 - EP US); H01J 37/3417 (2013.01 - EP); H01J 37/3447 (2013.01 - EP US); H01J 2237/0455 (2013.01 - US); H01J 2237/0458 (2013.01 - US)
Citation (search report)
See references of WO 2022033757A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022033757 A1 20220217; CN 116195028 A 20230530; DE 102020004935 A1 20220217; DE 102020004935 B4 20220825; EP 4197022 A1 20230621; US 2023274922 A1 20230831
DOCDB simple family (application)
EP 2021067511 W 20210625; CN 202180055647 A 20210625; DE 102020004935 A 20200813; EP 21739296 A 20210625; US 202118020017 A 20210625