EP 4198315 A1 20230621 - VACUUM PUMP APPARATUS AND METHOD OF OPERATING THE SAME
Title (en)
VACUUM PUMP APPARATUS AND METHOD OF OPERATING THE SAME
Title (de)
VAKUUMPUMPENVORRICHTUNG UND VERFAHREN ZUM BETRIEB DAVON
Title (fr)
APPAREIL DE POMPE À VIDE ET SON PROCÉDÉ DE FONCTIONNEMENT
Publication
Application
Priority
- JP 2021203889 A 20211216
- JP 2022178142 A 20221107
Abstract (en)
A vacuum pump that can reduce deposition of by-product in a pump chamber caused by a process gas, can prevent an unintended stop of a vacuum pump apparatus, and can ensure restarting of the vacuum pump apparatus is disclosed. The vacuum pump apparatus includes: a pump casing (2) having a pump chamber (1) therein; a pump rotor (5A-E) arranged in the pump chamber; a rotation shaft (7) to which the pump rotor is secured; a bearing (17, 18) that rotatably supports the rotation shaft; a side cover (10A, 10B) coupled to the pump casing; a heater (35) attached to the side cover (10A); and a heater controller (40) configured to instruct the heater to generate heat intermittently when the pump rotor is rotating. The bearing (18) is coupled to the side cover (10A).
IPC 8 full level
F04C 25/02 (2006.01); F01C 21/10 (2006.01); F04C 18/12 (2006.01); F04C 23/00 (2006.01); F04C 29/04 (2006.01)
CPC (source: CN EP KR)
F01C 21/10 (2013.01 - EP); F04B 35/04 (2013.01 - KR); F04B 37/16 (2013.01 - KR); F04B 49/06 (2013.01 - KR); F04B 53/08 (2013.01 - KR); F04B 53/16 (2013.01 - KR); F04C 18/123 (2013.01 - EP); F04C 18/126 (2013.01 - EP); F04C 23/001 (2013.01 - EP); F04C 23/02 (2013.01 - KR); F04C 25/02 (2013.01 - EP KR); F04C 28/00 (2013.01 - KR); F04C 29/0085 (2013.01 - KR); F04C 29/04 (2013.01 - EP KR); F04D 17/10 (2013.01 - CN); F04D 27/001 (2013.01 - CN); F04D 29/4226 (2013.01 - CN); F04D 29/441 (2013.01 - CN); F04D 29/584 (2013.01 - CN); F04D 29/703 (2013.01 - CN); F04C 2220/10 (2013.01 - KR); F04C 2220/12 (2013.01 - EP); F04C 2220/30 (2013.01 - EP); F04C 2240/30 (2013.01 - KR); F04C 2240/40 (2013.01 - KR); F04C 2240/50 (2013.01 - EP KR); F04C 2240/81 (2013.01 - EP); F04C 2270/195 (2013.01 - EP); F05B 2240/50 (2013.01 - KR); F05C 2251/046 (2013.01 - EP)
Citation (applicant)
JP 2009097349 A 20090507 - EBARA CORP
Citation (search report)
- [XAYI] EP 3808983 A1 20210421 - EBARA CORP [JP]
- [XA] FR 2964163 A1 20120302 - ALCATEL LUCENT [FR]
- [X] KR 20210134772 A 20211110
- [YA] GB 2570349 A 20190724 - EDWARDS LTD [GB]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 4198315 A1 20230621; CN 116265753 A 20230620; KR 20230092765 A 20230626; TW 202336347 A 20230916
DOCDB simple family (application)
EP 22213282 A 20221213; CN 202211611161 A 20221214; KR 20220172350 A 20221212; TW 111147629 A 20221212