Global Patent Index - EP 4202447 A1

EP 4202447 A1 20230628 - LIQUID METAL SUPPLY ASSEMBLY

Title (en)

LIQUID METAL SUPPLY ASSEMBLY

Title (de)

FLÜSSIGMETALLZUFÜHRANORDNUNG

Title (fr)

ENSEMBLE D'ALIMENTATION EN MÉTAL LIQUIDE

Publication

EP 4202447 A1 20230628 (EN)

Application

EP 21217592 A 20211223

Priority

EP 21217592 A 20211223

Abstract (en)

There is described a liquid metal supply assembly for use in an EUV light source, the assembly comprising: a) a first reservoir configured to hold liquid metal at a first temperature; b) a liquid metal transportation conduit in fluid communication with the first reservoir wherein the liquid metal transportation conduit is configured to be at a second temperature different to the first temperature; c) a temperature sensor configured to measure the temperature of the liquid metal transportation conduit to detect a flow of liquid from the first reservoir through the liquid metal transportation conduit via a change in temperature of the liquid metal transportation conduit. Also described is an EUV light source, a method of detecting flow of a liquid metal, as well as the use thereof.

IPC 8 full level

G01P 13/00 (2006.01); G01F 1/68 (2006.01); G03F 7/20 (2006.01); H05G 2/00 (2006.01)

CPC (source: EP KR)

G01P 13/006 (2013.01 - EP KR); H05G 2/0023 (2024.08 - KR); H05G 2/0027 (2024.08 - KR); H05G 2/006 (2024.08 - EP)

Citation (applicant)

WO 2020187617 A1 20200924 - ASML NETHERLANDS BV [NL]

Citation (search report)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

Designated validation state (EPC)

KH MA MD TN

DOCDB simple family (publication)

EP 4202447 A1 20230628; CN 118435062 A 20240802; KR 20240127356 A 20240822; TW 202414100 A 20240401; WO 2023117202 A1 20230629

DOCDB simple family (application)

EP 21217592 A 20211223; CN 202280085399 A 20221110; EP 2022081424 W 20221110; KR 20247020701 A 20221110; TW 111146291 A 20221202