EP 4214463 A1 20230726 - DEVICE AND METHOD FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT
Title (en)
DEVICE AND METHOD FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT
Title (de)
VORRICHTUNG UND VERFAHREN ZUR VERMESSUNG VON SCHNITTSTELLEN EINES OPTISCHEN ELEMENTS
Title (fr)
DISPOSITIF ET PROCÉDÉ DE MESURE D'INTERFACES D'UN ÉLÉMENT OPTIQUE
Publication
Application
Priority
- FR 2009566 A 20200921
- EP 2021074816 W 20210909
Abstract (en)
[origin: WO2022058236A1] The invention relates to a device for measuring the shape of interfaces of an optical element, comprising: - at least one low-coherence light source; - at least one optical sensor; - an interferometer for: forming at least one measurement beam and at least two reference beams, directing the at least one measurement beam towards the optical element so as to pass through the interfaces, directing the light from at least two interfaces towards the at least one sensor, the at least one sensor being configured to selectively detect at least two signals of interferences between the at least one measurement beam reflected by an interface and one of the reference beams; - means for positioning a coherence region at each of the at least two interfaces; - means for producing, from the signals, shape information of each interface.
IPC 8 full level
G01B 9/02 (2022.01); B29D 11/00 (2006.01); G01B 11/24 (2006.01); G01M 11/02 (2006.01)
CPC (source: EP US)
B29D 11/0098 (2013.01 - EP); G01B 9/02007 (2013.01 - EP); G01B 9/02028 (2013.01 - EP); G01B 9/02032 (2013.01 - EP); G01B 9/0209 (2013.01 - EP); G01B 11/2441 (2013.01 - EP US); G01M 11/0271 (2013.01 - EP); G01B 2290/70 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022058236 A1 20220324; EP 4214463 A1 20230726; FR 3114385 A1 20220325; FR 3114385 B1 20240830; TW 202214996 A 20220416; US 2023332885 A1 20231019
DOCDB simple family (application)
EP 2021074816 W 20210909; EP 21777246 A 20210909; FR 2009566 A 20200921; TW 110132857 A 20210903; US 202118245605 A 20210909