EP 4214519 A1 20230726 - METHOD, SYSTEM AND PARTS FOR ENABLING NAVIGATION IN A SCANNING PROBE MICROSCOPY SYSTEM
Title (en)
METHOD, SYSTEM AND PARTS FOR ENABLING NAVIGATION IN A SCANNING PROBE MICROSCOPY SYSTEM
Title (de)
VERFAHREN, SYSTEM UND TEILE ZUR ERMÖGLICHUNG DER NAVIGATION IN EINEM RASTERSONDENMIKROSKOPIESYSTEM
Title (fr)
PROCÉDÉ, SYSTÈME ET PIÈCES POUR PERMETTRE UNE NAVIGATION DANS UN SYSTÈME DE MICROSCOPIE À SONDE DE BALAYAGE
Publication
Application
Priority
- NL 2026497 A 20200917
- NL 2021050560 W 20210916
Abstract (en)
[origin: WO2022060224A1] The present document relates to a method of calibrating a scanning probe microscopy system for enabling navigation. The system comprises one of more scan heads, a coordinate reference grid and a substrate carrier. The substrate carrier includes a carrier surface arranged opposite the coordinate reference grid and remotely therefrom such as to define a working space for the one or more scan heads. For enabling navigation between the scan heads and the substrate carrier, a relation is determined, using a sensor encoder cooperating with the coordinate reference grid, between a relative position of an optical sensor and the coordinate reference grid. This provides coordinate system data indicative of a coordinate system for the optical sensor relative to the grid, the optical sensor being fixed relative to the sensor encoder. Furthermore, a relative offset location of the probe tip and the head encoder of the scan head is determined, in order to allow positioning of the probe tip using the coordinate system obtained. The document also relates to a method of wafer alignment, an optical sensor, a support therefore, an assembly, a scanning probe microscopy system and a computer program product.
IPC 8 full level
G01Q 30/02 (2010.01); G01Q 40/00 (2010.01)
CPC (source: EP)
G01Q 30/02 (2013.01); G01Q 40/00 (2013.01); G01Q 70/06 (2013.01)
Citation (search report)
See references of WO 2022060224A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022060224 A1 20220324; EP 4214519 A1 20230726; NL 2026497 B1 20220523
DOCDB simple family (application)
NL 2021050560 W 20210916; EP 21794211 A 20210916; NL 2026497 A 20200917