EP 4219799 A1 20230802 - SYSTEM FOR A CHEMICAL AND/OR ELECTROLYTIC SURFACE TREATMENT OF A SUBSTRATE
Title (en)
SYSTEM FOR A CHEMICAL AND/OR ELECTROLYTIC SURFACE TREATMENT OF A SUBSTRATE
Title (de)
SYSTEM FÜR EINE CHEMISCHE UND/ODER ELEKTROLYTISCHE OBERFLÄCHENBEHANDLUNG EINES SUBSTRATS
Title (fr)
SYSTÈME DE TRAITEMENT DE SURFACE CHIMIQUE ET/OU ÉLECTROLYTIQUE D'UN SUBSTRAT
Publication
Application
Priority
EP 22153761 A 20220127
Abstract (en)
The disclosure relates to a system for a chemical and/or electrolytic surface treatment of a substrate comprises a catholyte chamber, an anolyte chamber, a distribution body, and a catholyte outlet. The distribution body is arranged in the catholyte chamber and the catholyte chamber is separated from the anolyte chamber by means of a membrane, wherein the membrane is tilted relative to the distribution body. The distribution body comprises jet openings for distributing a catholyte onto the substrate to be treated and drain openings for draining the catholyte out of a reaction space between the distribution body and the substrate. The catholyte outlet is arranged at the catholyte chamber in an eccentric position.
IPC 8 full level
C25D 17/00 (2006.01); C25D 21/10 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP)
C25D 17/001 (2013.01); C25D 21/10 (2013.01)
Citation (search report)
- [XAI] EP 3868923 A1 20210825 - SEMSYSCO GMBH [AT]
- [A] US 11001934 B2 20210511 - BANIK II STEPHEN J [US], et al
- [A] SG 195480 A1 20131230 - NOVELLUS SYSTEMS INC [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
EP 4219799 A1 20230802; TW 202334512 A 20230901; WO 2023143797 A1 20230803
DOCDB simple family (application)
EP 22153761 A 20220127; EP 2022085151 W 20221209; TW 112100152 A 20230104