EP 4222539 A1 20230809 - METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM
Title (en)
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES OPTISCHEN ELEMENTS, OPTISCHES ELEMENT, VORRICHTUNG ZUR HERSTELLUNG EINES OPTISCHEN ELEMENTS, SEKUNDÄRGAS UND PROJEKTIONSBELICHTUNGSANLAGE
Title (fr)
PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT OPTIQUE, ÉLÉMENT OPTIQUE, DISPOSITIF DE FABRICATION D'UN ÉLÉMENT OPTIQUE, GAZ SECONDAIRE ET SYSTÈME D'EXPOSITION PAR PROJECTION
Publication
Application
Priority
- DE 102020212353 A 20200930
- EP 2021076033 W 20210922
Abstract (en)
[origin: WO2022069310A1] The invention relates to a method for producing an optical element (2), in particular for a projection exposure system (400), according to which a protective layer (11) consisting of a protective material is applied to a surface of a main body (7) until a protective layer thickness is obtained, wherein the main body (7) has a substrate (17) comprising a reflective layer (18) applied to the substrate (17). According to the invention, the protective layer (11) is at least substantially defect-free.
IPC 8 full level
G02B 5/08 (2006.01); G02B 1/14 (2015.01); G03F 7/20 (2006.01); G21K 1/06 (2006.01)
CPC (source: EP US)
C23C 14/0036 (2013.01 - EP US); C23C 14/08 (2013.01 - EP); C23C 14/3421 (2013.01 - EP US); C23C 14/3464 (2013.01 - EP); C23C 14/3471 (2013.01 - EP US); C23C 14/3485 (2013.01 - US); C23C 14/352 (2013.01 - US); G02B 1/14 (2015.01 - EP); G02B 5/0833 (2013.01 - EP); G02B 5/0891 (2013.01 - EP); G03F 7/70033 (2013.01 - US); G03F 7/70316 (2013.01 - EP US); G03F 7/70958 (2013.01 - EP US); G21K 1/06 (2013.01 - US); H01J 37/32357 (2013.01 - US); H01J 37/3405 (2013.01 - EP US); H01J 37/3417 (2013.01 - US); H01J 37/3438 (2013.01 - EP); H01J 37/345 (2013.01 - US); H01J 37/3467 (2013.01 - US); H01J 37/3485 (2013.01 - US); G21K 2201/067 (2013.01 - EP US); H01J 2237/332 (2013.01 - US)
Citation (search report)
See references of WO 2022069310A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102020212353 A1 20220331; EP 4222539 A1 20230809; JP 2023543850 A 20231018; US 2023257866 A1 20230817; WO 2022069310 A1 20220407
DOCDB simple family (application)
DE 102020212353 A 20200930; EP 2021076033 W 20210922; EP 21782920 A 20210922; JP 2023519711 A 20210922; US 202318128672 A 20230330