EP 4222540 A1 20230809 - DIGITAL MICROMIRROR DEVICE FOR AN ILLUMINATION OPTICAL COMPONENT OF A PROJECTION EXPOSURE SYSTEM
Title (en)
DIGITAL MICROMIRROR DEVICE FOR AN ILLUMINATION OPTICAL COMPONENT OF A PROJECTION EXPOSURE SYSTEM
Title (de)
MIKROSPIEGEL-ARRAY FÜR EINE BELEUCHTUNGSOPTISCHE KOMPONENTE EINER PROJEKTIONSBELICHTUNGSANLAGE
Title (fr)
RÉSEAU DE MICROMIROIRS DESTINÉ À UN COMPOSANT OPTIQUE D'ÉCLAIRAGE D'UNE INSTALLATION D'INSOLATION PAR PROJECTION
Publication
Application
Priority
- DE 102020212351 A 20200930
- EP 2021076561 W 20210928
Abstract (en)
[origin: WO2022069426A1] The invention relates to a digital micromirror device (23d) which is part of an illumination optical component (22) of a projection exposure system for projection lithography. A multiplicity of micromirrors (23a) are arranged in groups in a plurality of mirror modules (23b) which each have a rectangular module boundary (23c). The mirror modules (23b) are arranged in module columns (26). At least some of the module columns (26) are shifted in relation to one another along a column borderline (27) in such a way that at least some of the mirror modules (26i, 26i+1) which are mutually adjacent via the borderline (27) are shifted in relation to one another. This causes the module boundary sides (28) thereof extending transversely to the borderline (27) to not be aligned with one another. This results in a digital micromirror device which can be produced with maximum standardisation and, in the event that the digital micromirror device is the last illumination optical component before a reflective object to be illuminated, a smallest possible reflection fold angle can be implemented on the object.
IPC 8 full level
G02B 5/08 (2006.01); G02B 5/09 (2006.01); G02B 26/08 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP KR US)
G02B 5/0891 (2013.01 - EP KR); G02B 5/09 (2013.01 - EP KR); G02B 26/0833 (2013.01 - KR US); G03F 7/70075 (2013.01 - EP KR); G03F 7/70116 (2013.01 - EP KR US); G03F 7/70275 (2013.01 - US); G02B 26/0833 (2013.01 - EP)
Citation (search report)
See references of WO 2022069426A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102020212351 A1 20220331; CN 116249919 A 20230609; EP 4222540 A1 20230809; KR 20230074272 A 20230526; US 2023221649 A1 20230713; WO 2022069426 A1 20220407
DOCDB simple family (application)
DE 102020212351 A 20200930; CN 202180067379 A 20210928; EP 2021076561 W 20210928; EP 21785834 A 20210928; KR 20237014638 A 20210928; US 202318175195 A 20230227