EP 4222779 A1 20230809 - ASSEMBLED GRID TRAY
Title (en)
ASSEMBLED GRID TRAY
Title (de)
ZUSAMMENGESETZTE GITTERABLAGE
Title (fr)
PLATEAU DE GRILLE ASSEMBLÉ
Publication
Application
Priority
- US 202063086968 P 20201002
- US 2021046482 W 20210818
Abstract (en)
[origin: WO2022072075A1] An assembled grid tray is disclosed, comprising a frame for holding multiple substrate trays to form a larger tray for use in a semiconductor processing tool. The frame may be comprised of two outer frame members that hold one or more of the trays, each with a magnet rail use with a maglev system. The frame may be further comprised of an inner frame member positioned between the outer frame members, which may also include a magnet rail, with the frame members being held in position by one or more outer beam members. The frame members may be fabricated of a material having a similar thermal expansion to trays to be placed in the frame.
IPC 8 full level
H01L 21/687 (2006.01); H01L 21/677 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP KR US)
H01L 21/673 (2013.01 - EP KR); H01L 21/6734 (2013.01 - US); H01L 21/67754 (2013.01 - EP KR); H01L 21/68771 (2013.01 - EP KR); H01L 31/1876 (2013.01 - EP KR US); Y02P 70/50 (2015.11 - EP KR)
Citation (search report)
See references of WO 2022072075A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022072075 A1 20220407; CN 116195045 A 20230530; EP 4222779 A1 20230809; JP 2023544596 A 20231024; KR 20230078782 A 20230602; US 2023260811 A1 20230817
DOCDB simple family (application)
US 2021046482 W 20210818; CN 202180064405 A 20210818; EP 21876182 A 20210818; JP 2023520193 A 20210818; KR 20237014717 A 20210818; US 202118024318 A 20210818