EP 4241302 A1 20230913 - APPARATUS FOR CLEANING POT-SHAPED HOLLOW BODIES, IN PARTICULAR TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR FOR EUV LITHOGRAPHY MASKS
Title (en)
APPARATUS FOR CLEANING POT-SHAPED HOLLOW BODIES, IN PARTICULAR TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR FOR EUV LITHOGRAPHY MASKS
Title (de)
VORRICHTUNG ZUM REINIGEN VON TOPFFÖRMIGEN HOHLKÖRPERN, INSBESONDERE VON TRANSPORTBEHÄLTERN FÜR HALBLEITERWAFER ODER FÜR EUV-LITHOGRAFIE-MASKEN
Title (fr)
APPAREIL DE NETTOYAGE DE CORPS CREUX EN FORME DE POT, EN PARTICULIER DES RÉCIPIENTS DE TRANSPORT POUR TRANCHES SEMI-CONDUCTRICES OU POUR MASQUES DE LITHOGRAPHIE EUV
Publication
Application
Priority
- DE 102020129469 A 20201109
- EP 2021080793 W 20211105
Abstract (en)
[origin: WO2022096657A1] The present invention relates to an apparatus (10) for cleaning pot-shaped hollow bodies (12), in particular transport containers (30) for semiconductor wafers or for EUV lithography masks, wherein the apparatus (10) comprises: a support wall (20) onto which the hollow body (12) can be placed by way of its edge surface (38); a locking device (26) by means of which the hollow body (12) can be sealingly and releasably connected to the support wall (20); at least one passage opening (24) which is formed by the support wall (20) and is arranged radially within the locking device (26); a cleaning device (40) by means of which a first cleaning fluid can be dispensed for cleaning the hollow body inner surface (33) when the hollow body (12) is connected to the support wall (20); and a first discharge channel (70) with a first end (72), wherein the first discharge channel (70) with the first end (72) is in fluidic communication only with the passage opening (24) and with which the first cleaning fluid dispensed by the cleaning device (40) can be discharged.
IPC 8 full level
H01L 21/67 (2006.01); B08B 3/02 (2006.01); B08B 7/02 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP IL KR US)
B08B 3/12 (2013.01 - KR); B08B 9/0861 (2013.01 - EP IL KR); B08B 9/093 (2013.01 - EP IL KR); G03F 1/24 (2013.01 - US); G03F 1/82 (2013.01 - US); H01L 21/0337 (2013.01 - US); H01L 21/31144 (2013.01 - US); H01L 21/67028 (2013.01 - EP IL KR); H01L 21/67051 (2013.01 - EP IL US); H01L 21/67242 (2013.01 - KR); B08B 2203/007 (2013.01 - EP IL KR); B08B 2203/0288 (2013.01 - EP IL KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022096657 A1 20220512; CN 116569108 A 20230808; DE 102020129469 A1 20220512; DE 102020129469 B4 20240529; EP 4241302 A1 20230913; IL 302760 A 20230701; JP 2023551600 A 20231208; KR 20230118073 A 20230810; US 2023402298 A1 20231214
DOCDB simple family (application)
EP 2021080793 W 20211105; CN 202180075417 A 20211105; DE 102020129469 A 20201109; EP 21807048 A 20211105; IL 30276023 A 20230508; JP 2023550708 A 20211105; KR 20237014778 A 20211105; US 202118035217 A 20211105