EP 4274917 A1 20231115 - COATING ARRANGEMENT
Title (en)
COATING ARRANGEMENT
Title (de)
BESCHICHTUNGSANORDNUNG
Title (fr)
AGENCEMENT DE REVÊTEMENT
Publication
Application
Priority
- DE 102021100060 A 20210105
- EP 2021076978 W 20210930
Abstract (en)
[origin: WO2022148560A1] The invention relates to a coating arrangement (2) for depositing a coating material on a substrate (3). The coating arrangement has a coating chamber (4') with a coating channel (4), and a coating apparatus having: an evaporation portion (11, 23, 7, 12, 13) with a crucible (13) for bringing the coating material into a gaseous phase; a nozzle portion (14) which is located on the outside of the evaporation portion, is preferably coupled thereto, and comprises a nozzle output (15); and a particle supply device (20) with a supply opening (21) for supplying particles into the evaporation portion (11, 23, 7, 12, 13). Suction lines (17, 18) and a filter device (19) can also be provided.
IPC 8 full level
C23C 14/22 (2006.01); C23C 4/131 (2016.01); C23C 14/24 (2006.01); C23C 14/26 (2006.01); C23C 14/32 (2006.01); C23C 14/56 (2006.01)
CPC (source: EP)
B05B 13/0207 (2013.01); B05B 14/30 (2018.01); C23C 4/131 (2016.01); C23C 14/228 (2013.01); C23C 14/243 (2013.01); C23C 14/246 (2013.01); C23C 14/26 (2013.01); C23C 14/325 (2013.01); C23C 14/562 (2013.01); B05B 7/224 (2013.01)
Citation (search report)
See references of WO 2022148560A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102021100060 A1 20220707; EP 4274917 A1 20231115; WO 2022148560 A1 20220714
DOCDB simple family (application)
DE 102021100060 A 20210105; EP 2021076978 W 20210930; EP 21786209 A 20210930