EP 4285402 A1 20231206 - SUBSTRATE HOLDER AND METHOD FOR PRODUCING A SUBSTRATE HOLDER FOR BONDING
Title (en)
SUBSTRATE HOLDER AND METHOD FOR PRODUCING A SUBSTRATE HOLDER FOR BONDING
Title (de)
SUBSTRATHALTER UND VERFAHREN ZUR HERSTELLUNG EINES SUBSTRATHALTERS ZUM BONDEN
Title (fr)
SUPPORT DE SUBSTRAT ET PROCÉDÉ DE FABRICATION D'UN SUPPORT DE SUBSTRAT POUR LA LIAISON
Publication
Application
Priority
EP 2021052267 W 20210201
Abstract (en)
[origin: WO2022161636A1] The invention relates to a substrate holder, a bonding device, a method for producing a substrate, and a bonding method.
IPC 8 full level
H01L 21/67 (2006.01); H01L 21/18 (2006.01); H01L 21/20 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
H01L 21/185 (2013.01 - KR US); H01L 21/67092 (2013.01 - EP KR US); H01L 21/6875 (2013.01 - EP KR US); H01L 21/185 (2013.01 - EP); H01L 21/2007 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022161636 A1 20220804; CN 116457916 A 20230718; EP 4285402 A1 20231206; JP 2024510060 A 20240306; KR 20230134463 A 20230921; TW 202236494 A 20220916; TW I821880 B 20231111; US 2023369095 A1 20231116
DOCDB simple family (application)
EP 2021052267 W 20210201; CN 202180073042 A 20210201; EP 21703193 A 20210201; JP 2023526353 A 20210201; KR 20237014896 A 20210201; TW 111102845 A 20220124; US 202118031084 A 20210201