EP 4288839 A1 20231213 - METHOD FOR MANUFACTURING AN OPTICAL ELEMENT, APPARATUS FOR MANUFACTURING AN OPTICAL ELEMENT, OPTICAL ELEMENT, AND LITHOGRAPHY SYSTEM
Title (en)
METHOD FOR MANUFACTURING AN OPTICAL ELEMENT, APPARATUS FOR MANUFACTURING AN OPTICAL ELEMENT, OPTICAL ELEMENT, AND LITHOGRAPHY SYSTEM
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES OPTISCHEN ELEMENTS, VORRICHTUNG ZUR HERSTELLUNG EINES OPTISCHEN ELEMENTS, OPTISCHES ELEMENT UND LITHOGRAFIESYSTEM
Title (fr)
PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT OPTIQUE, APPAREIL DE FABRICATION D'UN ÉLÉMENT OPTIQUE, ÉLÉMENT OPTIQUE ET SYSTÈME DE LITHOGRAPHIE
Publication
Application
Priority
- DE 102021201001 A 20210203
- EP 2022052437 W 20220202
Abstract (en)
[origin: WO2022167466A1] The invention relates to a method for manufacturing an optical element (2) for a lithography system, the method being carried out outside the lithography system in which the optical element (2) is used, in which method an original surface (4) of a main body (3), more particularly the presence of foreign bodies (7) on said original surface (4), is inspected and/or characterised and/or cleaned prior to a machining process (15), and on this basis it is determined whether the original surface (4) qualifies for the following machining process (15). Furthermore, the original surface (4) is kept under a continuous vacuum environment (19) starting from a point in time at the latest immediately after it is determined whether the original surface (4) qualifies and continuing at least until the start of the machining process (15).
IPC 8 full level
G03F 7/20 (2006.01); C23C 14/04 (2006.01); G01N 21/94 (2006.01); G02B 5/08 (2006.01)
CPC (source: EP)
C23C 14/021 (2013.01); C23C 14/52 (2013.01); C23C 14/564 (2013.01); G03F 7/70958 (2013.01); G01N 21/94 (2013.01)
Citation (search report)
See references of WO 2022167466A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102021201001 A1 20220804; CN 116848471 A 20231003; EP 4288839 A1 20231213; WO 2022167466 A1 20220811
DOCDB simple family (application)
DE 102021201001 A 20210203; CN 202280013370 A 20220202; EP 2022052437 W 20220202; EP 22703354 A 20220202