EP 4292128 A1 20231220 - SUBSTRATE CARRIER
Title (en)
SUBSTRATE CARRIER
Title (de)
SUBSTRATTRÄGER
Title (fr)
SUPPORT DE SUBSTRATS
Publication
Application
Priority
- DE 102021003326 A 20210628
- EP 2022059333 W 20220407
Abstract (en)
[origin: WO2023274598A1] The present invention relates to a substrate carrier for receiving and for transporting a plurality of substrates.
IPC 8 full level
H01L 21/687 (2006.01); C23C 14/50 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP US)
B23Q 1/032 (2013.01 - US); C23C 14/50 (2013.01 - EP); H01L 21/68735 (2013.01 - EP); H01L 21/68771 (2013.01 - EP); H01L 21/6734 (2013.01 - EP); H01L 21/67754 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102021003326 B3 20220908; CN 117581350 A 20240220; EP 4292128 A1 20231220; US 2024286235 A1 20240829; WO 2023274598 A1 20230105
DOCDB simple family (application)
DE 102021003326 A 20210628; CN 202280046064 A 20220407; EP 2022059333 W 20220407; EP 22722140 A 20220407; US 202218573324 A 20220407