EP 4294967 A1 20231227 - ELECTROLYTE AND METHOD FOR COBALT ELECTRODEPOSITION
Title (en)
ELECTROLYTE AND METHOD FOR COBALT ELECTRODEPOSITION
Title (de)
ELEKTROLYT UND VERFAHREN ZUR KOBALTELEKTROABSCHEIDUNG
Title (fr)
ÉLECTROLYTE ET PROCÉDÉ D'ÉLECTRODÉPOSITION DE COBALT
Publication
Application
Priority
- FR 2101582 A 20210218
- EP 2022053023 W 20220208
Abstract (en)
[origin: WO2022175137A1] The present invention relates to a method for fabricating cobalt interconnects and an electrolyte enabling it to be implemented. The electrolyte of pH less than 4.0 comprises cobalt ions, chloride ions and organic additives, including an alpha-hydroxy carboxylic acid and an amine chosen from polyethyleneimine or benzotriazole.
IPC 8 full level
C25D 3/12 (2006.01); C25D 3/18 (2006.01); C25D 7/12 (2006.01)
CPC (source: EP KR US)
C23C 16/045 (2013.01 - US); C23C 16/14 (2013.01 - US); C23C 16/4414 (2013.01 - US); C25D 3/18 (2013.01 - EP KR); C25D 5/02 (2013.01 - KR); C25D 7/12 (2013.01 - EP); C25D 7/123 (2013.01 - EP KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
FR 3119848 A1 20220819; CN 117355639 A 20240105; EP 4294967 A1 20231227; JP 2024511276 A 20240313; KR 20230146586 A 20231019; TW 202235687 A 20220916; TW I813172 B 20230821; US 2024133028 A1 20240425; US 2024229235 A9 20240711; WO 2022175137 A1 20220825
DOCDB simple family (application)
FR 2101582 A 20210218; CN 202280020173 A 20220208; EP 2022053023 W 20220208; EP 22704904 A 20220208; JP 2023550053 A 20220208; KR 20237031261 A 20220208; TW 111105935 A 20220218; US 202218277695 A 20220208