EP 4301895 A1 20240110 - TUNGSTEN SUBOXIDE CERAMIC TARGET
Title (en)
TUNGSTEN SUBOXIDE CERAMIC TARGET
Title (de)
WOLFRAMSUBOXIDKERAMIK-TARGET
Title (fr)
CIBLE CÉRAMIQUE EN SOUS-OXYDE DE TUNGSTÈNE
Publication
Application
Priority
- BE 202105168 A 20210304
- EP 2022055501 W 20220304
Abstract (en)
[origin: WO2022184879A1] A target for sputtering, use of said target and method of manufacture of said target is provided.The target has a single piece target material for sputter deposition, with at least 1 mm, for example at least 2 mm, such as 4 mm or more of thickness of material for sputtering, having a lamellar structure and comprising a metal oxide with at least 50 wt.%, such as 60 wt. % or 80 wt.% or at least 90 wt.% or even 95% wt.% or more of tungsten oxide. The atomic ratio of oxygen over tungsten results in a compound with oxygen deficiency with respect to the stoichiometric tungsten oxide. The method includes spraying metallic tungsten and/or tungsten oxide powder in amounts so as to provide a layer of material for sputtering being at least 1 mm thick and comprising non-stoichiometric tungsten oxide.
IPC 8 full level
C23C 14/34 (2006.01); C04B 35/495 (2006.01); C23C 14/00 (2006.01); C23C 14/08 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01)
CPC (source: EP US)
C04B 35/495 (2013.01 - EP US); C23C 14/0036 (2013.01 - EP); C23C 14/083 (2013.01 - EP US); C23C 14/3414 (2013.01 - EP US); H01J 37/3426 (2013.01 - EP US); H01J 37/3429 (2013.01 - EP); C04B 2235/3201 (2013.01 - EP US); C04B 2235/3203 (2013.01 - EP); C04B 2235/3232 (2013.01 - EP); C04B 2235/3241 (2013.01 - EP); C04B 2235/3244 (2013.01 - EP); C04B 2235/3251 (2013.01 - EP); C04B 2235/3256 (2013.01 - EP); C04B 2235/3258 (2013.01 - EP US); C04B 2235/326 (2013.01 - US); C04B 2235/3279 (2013.01 - EP US); C04B 2235/3291 (2013.01 - EP); C04B 2235/404 (2013.01 - EP US); C04B 2235/405 (2013.01 - EP); C04B 2235/79 (2013.01 - EP); C04B 2235/80 (2013.01 - EP); C04B 2235/95 (2013.01 - EP); H01J 2237/332 (2013.01 - US)
Citation (search report)
See references of WO 2022184879A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022184879 A1 20220909; BE 1029172 A1 20220927; BE 1029172 B1 20221003; CN 116829760 A 20230929; EP 4301895 A1 20240110; JP 2024508168 A 20240222; TW 202246551 A 20221201; US 2024133024 A1 20240425; US 2024229226 A9 20240711
DOCDB simple family (application)
EP 2022055501 W 20220304; BE 202105168 A 20210304; CN 202280010705 A 20220304; EP 22710093 A 20220304; JP 2023553632 A 20220304; TW 111107936 A 20220304; US 202218548404 A 20220304