EP 4308512 A1 20240124 - EUVL PRECISION COMPONENT WITH SPECIFIC THERMAL EXPANSION BEHAVIOR
Title (en)
EUVL PRECISION COMPONENT WITH SPECIFIC THERMAL EXPANSION BEHAVIOR
Title (de)
EUVL-PRÄZISIONSKOMPONENTE MIT SPEZIFISCHEM THERMISCHEN AUSDEHNUNGSVERHALTEN
Title (fr)
COMPOSANT DE PRÉCISION EUVL AYANT UN COMPORTEMENT DE DILATATION THERMIQUE SPÉCIFIQUE
Publication
Application
Priority
- DE 102021106417 A 20210316
- DE 102021106419 A 20210316
- DE 102021134308 A 20211222
- EP 2022056660 W 20220315
Abstract (en)
[origin: WO2022194846A1] The present invention relates to an EUVL precision component having improved thermal expansion behavior.
IPC 8 full level
C03C 3/097 (2006.01); C03C 3/11 (2006.01); C03C 10/00 (2006.01)
CPC (source: EP KR US)
C03C 3/06 (2013.01 - KR); C03C 3/097 (2013.01 - EP KR); C03C 3/11 (2013.01 - EP); C03C 10/0027 (2013.01 - EP KR US); G03F 1/24 (2013.01 - US); C03C 2203/52 (2013.01 - EP KR); C03C 2204/00 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022194846 A1 20220922; EP 4308511 A1 20240124; EP 4308512 A1 20240124; JP 2024511361 A 20240313; JP 2024511363 A 20240313; KR 20230158021 A 20231117; KR 20230158022 A 20231117; TW 202300471 A 20230101; TW 202306923 A 20230216; US 2024002281 A1 20240104; US 2024077798 A1 20240307; WO 2022194840 A1 20220922
DOCDB simple family (application)
EP 2022056660 W 20220315; EP 2022056650 W 20220315; EP 22715027 A 20220315; EP 22715032 A 20220315; JP 2023557044 A 20220315; JP 2023557046 A 20220315; KR 20237034774 A 20220315; KR 20237034775 A 20220315; TW 111109393 A 20220315; TW 111109410 A 20220315; US 202318468084 A 20230915; US 202318468183 A 20230915