EP 4315405 A1 20240207 - CONTACTLESS CONVEYING DEVICE
Title (en)
CONTACTLESS CONVEYING DEVICE
Title (de)
BERÜHRUNGSLOSE BEFÖRDERUNGSVORRICHTUNG
Title (fr)
DISPOSITIF DE TRANSPORT SANS CONTACT
Publication
Application
Priority
- DE 102021202915 A 20210325
- EP 2022056464 W 20220314
Abstract (en)
[origin: WO2022200094A1] The invention relates to a conveying device designed to convey one or more payloads, more particularly wafers, by means of transport bodies. The transport bodies can be floatingly moved and positioned over a transport surface of a stator. The moving and positioning are preferably carried out with respect to all six degrees of freedom. The transport body has a movable boom or a movable manipulator or a movable robotic arm. At the end effector thereof, the payload can be deposited or fastened. In developments, the payload can also be processed and/or checked. The processing and/or checking can also be carried out by an end effector of an additional transport body of the same conveying device.
IPC 8 full level
H01L 21/677 (2006.01)
CPC (source: EP US)
B65G 47/90 (2013.01 - US); B65G 54/02 (2013.01 - US); H01L 21/67709 (2013.01 - EP); H01L 21/67742 (2013.01 - EP US); H01L 21/67748 (2013.01 - US); H01L 21/67766 (2013.01 - EP); H01L 21/67778 (2013.01 - EP); H01L 21/68707 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102021202915 A1 20220929; CN 117083702 A 20231117; EP 4315405 A1 20240207; JP 2024511791 A 20240315; US 2024174459 A1 20240530; WO 2022200094 A1 20220929
DOCDB simple family (application)
DE 102021202915 A 20210325; CN 202280023991 A 20220314; EP 2022056464 W 20220314; EP 22713946 A 20220314; JP 2023558682 A 20220314; US 202218552076 A 20220314