EP 4315406 A1 20240207 - METHOD FOR SEPARATING STRUCTURES FROM A SUBSTRATE
Title (en)
METHOD FOR SEPARATING STRUCTURES FROM A SUBSTRATE
Title (de)
VERFAHREN ZUM TRENNEN VON STRUKTUREN VON EINEM SUBSTRAT
Title (fr)
PROCÉDÉ DE SÉPARATION DE STRUCTURES D'UN SUBSTRAT
Publication
Application
Priority
EP 2021058318 W 20210330
Abstract (en)
[origin: WO2022207083A1] The invention relates to a method and a device for separating structures from a substrate. The invention also relates to a method and a device for transferring structures from a first substrate to a second substrate.
IPC 8 full level
H01L 21/78 (2006.01); H01L 33/00 (2010.01)
CPC (source: EP KR US)
H01L 21/02002 (2013.01 - EP KR US); H01L 21/67115 (2013.01 - KR); H01L 21/6835 (2013.01 - US); H01L 21/7806 (2013.01 - EP KR US); H01L 33/0095 (2013.01 - US); H01L 33/0095 (2013.01 - EP KR); H01L 2221/68363 (2013.01 - US); H01L 2221/68368 (2013.01 - US); H01L 2221/68381 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022207083 A1 20221006; CN 116391264 A 20230704; EP 4315406 A1 20240207; JP 2024513280 A 20240325; KR 20230161413 A 20231127; TW 202243061 A 20221101; US 2023395418 A1 20231207
DOCDB simple family (application)
EP 2021058318 W 20210330; CN 202180072134 A 20210330; EP 21716342 A 20210330; JP 2023525623 A 20210330; KR 20237013965 A 20210330; TW 111108289 A 20220308; US 202118033896 A 20210330