EP 4329982 A1 20240306 - DOUBLE SIDE GRINDING APPARATUS HAVING CONVEX POLYGON-SHAPED ABRASIVE MEMBERS
Title (en)
DOUBLE SIDE GRINDING APPARATUS HAVING CONVEX POLYGON-SHAPED ABRASIVE MEMBERS
Title (de)
DOPPELSEITIGE SCHLEIFVORRICHTUNG MIT KONVEXEN POLYGONALEN SCHLEIFELEMENTEN
Title (fr)
APPAREIL DE MEULAGE DOUBLE FACE AYANT DES ÉLÉMENTS ABRASIFS EN FORME DE POLYGONE CONVEXE
Publication
Application
Priority
- US 202163180481 P 20210427
- KR 2022006034 W 20220427
Abstract (en)
[origin: WO2022231308A1] Methods and apparatus for simultaneous double-side grinding semiconductor structures are disclosed. The double-side grinding apparatus may include first and second grinding wheels each having abrasive members that are shaped as a convex polygon (e.g., convex pentagon).
IPC 8 full level
B24B 37/08 (2012.01); B24B 37/24 (2012.01); B24D 3/10 (2006.01); B24D 18/00 (2006.01); H01L 21/67 (2006.01)
CPC (source: EP KR US)
B24B 7/228 (2013.01 - US); B24B 37/08 (2013.01 - EP KR US); B24B 37/24 (2013.01 - KR US); B24B 37/24 (2013.01 - EP)
Citation (search report)
See references of WO 2022231308A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022231308 A1 20221103; CN 117460597 A 20240126; EP 4329982 A1 20240306; JP 2024518332 A 20240501; KR 20230175281 A 20231229; TW 202245033 A 20221116; US 2024217053 A1 20240704
DOCDB simple family (application)
KR 2022006034 W 20220427; CN 202280037766 A 20220427; EP 22796140 A 20220427; JP 2023566021 A 20220427; KR 20237040301 A 20220427; TW 111116079 A 20220427; US 202218556026 A 20220427