EP 4330996 A2 20240306 - RF MICROSWITCH WITH TRENCH CAPACITOR
Title (en)
RF MICROSWITCH WITH TRENCH CAPACITOR
Title (de)
RF MIKROSCHALTER MIT GRABENKONDENSATOR
Title (fr)
MICRO-COMMUTATEUR RF A CAPACITE EN TRANCHÉE
Publication
Application
Priority
- FR 2104463 A 20210429
- EP 2022061034 W 20220426
Abstract (en)
[origin: WO2022229173A2] The invention relates to a capacitive radiofrequency electromechanical microsystem comprising a metal membrane (10) suspended above an RF transmission line (30) covered with a stack that includes at least a first dielectric layer (31) and a metal layer (32), wherein said membrane is supported by means of two arms (20a, 20b) on ground planes above a substrate (40) and can be controlled so as to move: from a so-called high position, separating the membrane by a gap above the RF line covered with the stack and defining a first capacitor (CUP), to a so-called low position, in which the membrane is in contact with the RF line (30) via the metal layer (32) of the stack covering the RF line so as to define a second capacitor (CDOWN), characterised in that the RF line (30), the first dielectric layer (31) and the metal layer (32) have a three-dimensional structure, that is to say in relief, such as to define a three-dimensional capacitor.
IPC 8 full level
CPC (source: EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022229173 A2 20221103; WO 2022229173 A3 20230105; EP 4330996 A2 20240306; FR 3122415 A1 20221104; FR 3122415 B1 20240531
DOCDB simple family (application)
EP 2022061034 W 20220426; EP 22725493 A 20220426; FR 2104463 A 20210429