EP 4332679 A2 20240306 - INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, STORAGE MEDIUM, EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD
Title (en)
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, STORAGE MEDIUM, EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD
Title (de)
INFORMATIONSVERARBEITUNGSVORRICHTUNG, INFORMATIONSVERARBEITUNGSVERFAHREN, SPEICHERMEDIUM, BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND ARTIKELHERSTELLUNGSVERFAHREN
Title (fr)
APPAREIL DE TRAITEMENT D'INFORMATIONS, PROCÉDÉ DE TRAITEMENT D'INFORMATIONS, SUPPORT D'INFORMATIONS, APPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE FABRICATION D'ARTICLE
Publication
Application
Priority
- JP 2022136234 A 20220829
- JP 2023017009 A 20230207
Abstract (en)
The present invention provides an information processing apparatus (200) comprising a generator (15) configured to generate image information for causing a display unit (17) to display, as display information, any one of: difference information corresponding to a difference between first information and second information; information indicating at least one of a height and an attitude of the substrate during the exposure process of each of the plurality of shot regions; and information indicating a measurement result obtained by measuring a surface position of the substrate for each of the plurality of shot regions.
IPC 8 full level
G03F 9/00 (2006.01)
CPC (source: EP KR US)
G03F 7/70358 (2013.01 - US); G03F 7/70508 (2013.01 - US); G03F 7/70525 (2013.01 - US); G03F 7/70608 (2013.01 - KR); G03F 7/706835 (2023.05 - EP); G03F 7/706845 (2023.05 - KR); G03F 9/7026 (2013.01 - EP); G03F 9/7034 (2013.01 - EP)
Citation (applicant)
JP 2006165122 A 20060622 - NIKON CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
EP 4332679 A2 20240306; EP 4332679 A3 20240320; KR 20240031051 A 20240307; US 2024069444 A1 20240229
DOCDB simple family (application)
EP 23192097 A 20230818; KR 20230107001 A 20230816; US 202318454957 A 20230824