EP 4347917 A1 20240410 - DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS
Title (en)
DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS
Title (de)
ABSCHEIDUNGSKOPF FÜR ROHRFÖRMIGE/NICHTPLANARE BESCHICHTUNGEN
Title (fr)
TÊTE DE DÉPÔT POUR LES REVÊTEMENTS TUBULAIRES/NON PLANAIRES
Publication
Application
Priority
- FR 2105790 A 20210602
- EP 2022064931 W 20220601
Abstract (en)
[origin: WO2022253904A1] The invention relates to a head for the chemical vapor deposition of a tubular substrate, comprising: - a first opening for receiving a first precursor, - a second opening for receiving a second precursor, - a third opening for receiving an inert gaseous stream, - a first network of distribution ducts connecting the first opening to a first group of orifices extending over an internal section of the head, - a second network of distribution ducts connecting the second opening to a second group of orifices extending over at the internal section of the head, - a third network of distribution ducts connecting the third opening to a third group of orifices extending over the internal section of the head, an orifice of the first or second group of orifices being adjacent on either side to an orifice of the third group of orifices, the first, second and third networks of distribution ducts respectively having at least a first, second and third expansion pre-chamber, the tubular substrate performing a back-and-forth relative movement.
IPC 8 full level
C23C 16/40 (2006.01); B33Y 10/00 (2015.01); B33Y 80/00 (2015.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01)
CPC (source: EP)
B33Y 10/00 (2014.12); B33Y 80/00 (2014.12); C23C 16/40 (2013.01); C23C 16/4412 (2013.01); C23C 16/45508 (2013.01); C23C 16/45517 (2013.01); C23C 16/45519 (2013.01); C23C 16/45551 (2013.01); C23C 16/45595 (2013.01); C23C 16/545 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
FR 3123661 A1 20221209; FR 3123661 B1 20240112; EP 4347917 A1 20240410; WO 2022253904 A1 20221208
DOCDB simple family (application)
FR 2105790 A 20210602; EP 2022064931 W 20220601; EP 22731599 A 20220601