EP 4355048 A1 20240417 - SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREFOR
Title (en)
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREFOR
Title (de)
HALBLEITERSTRUKTUR UND HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
STRUCTURE SEMI-CONDUCTRICE ET PROCÉDÉ DE FABRICATION CORRESPONDANT
Publication
Application
Priority
- CN 202210664897 A 20220613
- CN 2022100923 W 20220623
Abstract (en)
The embodiments of the present application relate to the field of semiconductors, and provide a semiconductor structure and a method for manufacturing a semiconductor structure. The semiconductor structure includes: a substrate; a plurality of active layers arranged on the substrate and spaced apart from each other; and a plurality of bit lines, spaced apart from each other in a first direction and extending in a second direction. A first portion of each bit line covers side surfaces of respective active layers of the plurality of active layers, and a second portion of each bit line is located in the respective active layers. The first direction and the second direction are parallel to a surface of the substrate, and the first direction intersects with the second direction. Therefore, the reliability of the semiconductor structure may be improved.
IPC 8 full level
H10B 12/00 (2023.01)
CPC (source: EP KR US)
H01L 21/76811 (2013.01 - US); H10B 12/038 (2023.02 - US); H10B 12/05 (2023.02 - EP); H10B 12/31 (2023.02 - KR); H10B 12/482 (2023.02 - EP KR US); H10B 12/485 (2023.02 - KR); H10B 12/488 (2023.02 - EP KR); H10B 12/315 (2023.02 - EP); H10B 12/485 (2023.02 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
US 2023012447 A1 20230112; EP 4355048 A1 20240417; EP 4355048 A4 20240417; KR 20220132648 A 20220930
DOCDB simple family (application)
US 202217932276 A 20220914; EP 22782656 A 20220623; KR 20227031584 A 20220623