EP 4356415 A1 20240424 - SIGNAL-PROCESSING SYSTEM, AND POWER SUPPLY DEVICE COMPRISING A SIGNAL-PROCESSING SYSTEM
Title (en)
SIGNAL-PROCESSING SYSTEM, AND POWER SUPPLY DEVICE COMPRISING A SIGNAL-PROCESSING SYSTEM
Title (de)
SIGNALVERARBEITUNGSSYSTEM UND LEISTUNGSVERSORGUNGSEINRICHTUNG MIT EINEM SIGNALVERARBEITUNGSSYSTEM
Title (fr)
SYSTÈME DE TRAITEMENT DE SIGNAL ET DISPOSITIF D'ALIMENTATION ÉLECTRIQUE COMPRENANT UN SYSTÈME DE TRAITEMENT DE SIGNAL
Publication
Application
Priority
- DE 202021103238 U 20210616
- EP 2022065203 W 20220603
Abstract (en)
[origin: WO2022263209A1] The invention relates to a signal-processing system for determining and providing a data stream describing a plasma process, said signal-processing system comprising: a) a detection device (10) which is designed to detect a signal curve (100, 101) which repeats in a predefined time interval (n=T1....T8) and which changes depending on the plasma process state; b) a determination device (12, 14) which is designed to generate the data stream based on at least two signal curves (100, 101) which are each detected in a time interval, the data stream having a continuously determined stability indicator for the plasma process. The invention also relates to: a power supply device (1) for generating a pulsed electric high-frequency power signal for a plasma, said power supply device comprising a power generator (2), an impedance adjusting assembly (6) which is connected to the power generator, and such a signal-processing system; and a process control assembly for a plasma process designed to use the stability indicator from such a signal-processing system.
IPC 8 full level
H01J 37/32 (2006.01)
CPC (source: EP KR US)
H01J 37/32926 (2013.01 - EP KR US); H01J 37/32935 (2013.01 - EP KR); H01J 37/3299 (2013.01 - US); H01J 2237/327 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 202021103238 U1 20210622; CN 117501403 A 20240202; EP 4356415 A1 20240424; KR 20240017403 A 20240207; US 2024105431 A1 20240328; WO 2022263209 A1 20221222
DOCDB simple family (application)
DE 202021103238 U 20210616; CN 202280042869 A 20220603; EP 2022065203 W 20220603; EP 22734524 A 20220603; KR 20247001237 A 20220603; US 202318533220 A 20231208