EP 4356428 A1 20240424 - METHOD FOR PRODUCING A NATIVE EMISSION MATRIX
Title (en)
METHOD FOR PRODUCING A NATIVE EMISSION MATRIX
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER NATIVEN EMISSIONSMATRIX
Title (fr)
PROCEDE POUR FABRIQUER UNE MATRICE A EMISSION NATIVE
Publication
Application
Priority
- FR 2106386 A 20210616
- FR 2022051119 W 20220613
Abstract (en)
[origin: WO2022263756A1] The invention relates to a method for producing a native emission matrix, which comprises the following steps: a) providing a base structure (10) comprising, successively, a substrate (11), a GaN layer (12), a doped In(x)GaN layer (13) where x is from 0 to 8%, and an unintentionally doped In(x)GaN epitaxial regrowth layer (14); b) structuring mesas in the base structure, the mesas comprising a portion of the doped In(x)GaN layer (13) and the unintentionally doped In(x)GaN epitaxial regrowth layer (14), whereby the mesas are electrically interconnected; c) electrochemically forming pores in the doped In(x)GaN layer (13); and d) creating a first LED structure (100) and a second LED structure (200) on the mesas, whereby a first LED and a second LED having first and second emission wavelengths, respectively, are obtained, and a native emission matrix is formed.
IPC 8 full level
H01L 27/15 (2006.01); H01L 33/16 (2010.01)
CPC (source: EP)
H01L 27/156 (2013.01); H01L 33/16 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022263756 A1 20221222; CN 117678074 A 20240308; EP 4356428 A1 20240424; FR 3124312 A1 20221223
DOCDB simple family (application)
FR 2022051119 W 20220613; CN 202280048089 A 20220613; EP 22735216 A 20220613; FR 2106386 A 20210616