EP 4359778 A1 20240501 - THERMAL FLUID SENSOR
Title (en)
THERMAL FLUID SENSOR
Title (de)
THERMISCHER FLUIDSENSOR
Title (fr)
CAPTEUR DE FLUIDE THERMIQUE
Publication
Application
Priority
- US 202117354692 A 20210622
- EP 2022067049 W 20220622
Abstract (en)
[origin: WO2022268896A1] A fluid sensor for sensing a concentration or composition of a fluid, the sensorcomprising: a semiconductor substrate comprising a first etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate; a first heating element located within the first dielectric membrane; and a second heating element; wherein the first heating element is arranged to thermally shield the second heating element from ambient temperature changes; wherein the first heating element or the second heating element is configured to operate as a temperature sensing element; wherein the first heating element is configured to operate in a constant temperature or constant resistance mode; wherein the second heating element is configured to operate in a constant current or constant voltage mode or constant power mode; and wherein the sensor is configured to determine a thermal conductivity of the fluid using the temperature sensing element to determine said concentration or composition of the fluid.
IPC 8 full level
G01N 25/18 (2006.01)
CPC (source: EP)
G01F 1/6845 (2013.01); G01F 1/6888 (2013.01); G01F 1/696 (2013.01); G01N 25/18 (2013.01); G01N 25/005 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022268896 A1 20221229; CN 117546013 A 20240209; EP 4359778 A1 20240501
DOCDB simple family (application)
EP 2022067049 W 20220622; CN 202280044317 A 20220622; EP 22753608 A 20220622