EP 4367282 A1 20240515 - METHOD AND DEVICE FOR PRODUCING LAYERED NANOCARBON STRUCTURES
Title (en)
METHOD AND DEVICE FOR PRODUCING LAYERED NANOCARBON STRUCTURES
Title (de)
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON SCHICHTFÖRMIGEN NANOKOHLENSTOFFSTRUKTUREN
Title (fr)
PROCÉDÉ ET DISPOSITIF DE PRODUCTION DE STRUCTURES DE NANOCARBONE EN COUCHES
Publication
Application
Priority
- US 202163219131 P 20210707
- US 202217854612 A 20220630
- EP 2022068804 W 20220706
Abstract (en)
[origin: WO2023280951A1] Methods for producing layered nanocarbon structures placing a workpiece in a working chamber, applying a vacuum to the chamber, processing the workpiece surface with gas ions, applying a material sublayer to the workpiece surface, depositing carbon ions from a carbon plasma on the workpiece surface to apply an amorphous diamond-like sp3 carbon coating layer on the workpiece surface. The methods include irradiating the growing carbon coating with accelerated ions of an inert gas at a first energy range to apply a graphite sp2 carbon coating layer on the sp3 carbon coating layer and irradiating the growing carbon coating with accelerated ions of the inert gas at a second energy range, different from the first energy range, to apply a linear chain and polymer sp1 carbon coating layer on the sp2 carbon coating layer.
IPC 8 full level
C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/22 (2006.01); C23C 14/32 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP)
C23C 14/025 (2013.01); C23C 14/0605 (2013.01); C23C 14/221 (2013.01); C23C 14/325 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DOCDB simple family (application)
EP 2022068804 W 20220706; EP 22747643 A 20220706