EP 4371149 A1 20240522 - APPARATUS FOR REMOVING COATINGS FROM ANGULAR SUBSTRATES
Title (en)
APPARATUS FOR REMOVING COATINGS FROM ANGULAR SUBSTRATES
Title (de)
VORRICHTUNG ZUM ENTSCHICHTEN VON ECKIGEN SUBSTRATEN
Title (fr)
APPAREIL POUR RETIRER DES REVÊTEMENTS DE SUBSTRATS ANGULAIRES
Publication
Application
Priority
- DE 102021118379 A 20210715
- DE 102022117344 A 20220712
- EP 2022069938 W 20220715
Abstract (en)
[origin: WO2023285689A1] In an apparatus for removing coatings from angular substrates (2), comprising a coating removal head (3.1, 3.2) and a mobilization device (5), the coating removal head (3.1, 3.2) is to be guidable in a working trajectory along a longitudinal substrate edge (4.1, 4.2, 4.3, 4.4) of the substrate (2).
IPC 8 full level
H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP)
H01L 21/02087 (2013.01); H01L 21/6708 (2013.01); H01J 37/32385 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2023285689 A1 20230119; EP 4371149 A1 20240522; JP 2024526780 A 20240719; TW 202314909 A 20230401
DOCDB simple family (application)
EP 2022069938 W 20220715; EP 22754022 A 20220715; JP 2024502110 A 20220715; TW 111126649 A 20220715