(84) | Designated Contracting States: | | AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR | | Designated Extension States: | | BA ME |
(30) | Priority: | 22.02.2013 JP 2013033584
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(71) | Applicant: Ebara Corporation | | Ohta-ku, Tokyo 144-8510 (JP) |
| (72) | Inventors: | | - Ojima, Yoshinori
Tokyo, 144-8510 (JP) - Inada, Takanori
Tokyo, 144-8510 (JP) - Yoshida, Naoya
Tokyo, 144-8510 (JP) - Nakazawa, Toshiharu
Tokyo, 144-8510 (JP) - Matake, Kozo
Tokyo, 144-8510 (JP)
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(74) | Representative: Wimmer, Hubert | | WAGNER & GEYER
Gewürzmühlstrasse 5 80538 München 80538 München (DE) |
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