(19)
(11)EP 2 572 804 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
27.12.2017 Bulletin 2017/52

(43)Date of publication A2:
27.03.2013 Bulletin 2013/13

(21)Application number: 12006480.3

(22)Date of filing:  14.09.2012
(51)International Patent Classification (IPC): 
B06B 1/02(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30)Priority: 20.09.2011 JP 2011204970

(71)Applicant: Canon Kabushiki Kaisha
Ohta-ku Tokyo (JP)

(72)Inventors:
  • Kato, Ayako
    Tokyo (JP)
  • Torashima, Kazutoshi
    Tokyo (JP)

(74)Representative: WESER & Kollegen 
Radeckestraße 43
81245 München
81245 München (DE)

  


(54)Method of manufacturing an electromechanical transducer


(57) Provided is a method of manufacturing an electromechanical transducer having a reduced variation in a breakdown strength caused by a variation in flatness of an insulating layer. In the method of manufacturing the electromechanical transducer, a first insulating layer (2) is formed on a first substrate (1), a barrier wall (3) is formed by removing a part of the first insulating layer, and a second insulating layer (10) is formed on a region of the first substrate after the part of the first insulating layer has been removed. Next, a gap is formed by bonding a second substrate (18) on the barrier wall, and a vibration film (23) that is opposed to the second insulating layer via the gap is formed from the second substrate. In the forming of the barrier wall, a height on a gap side in a direction vertical to the first substrate becomes lower than a height of a center portion.







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