(19)
(11)EP 2 784 797 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
30.12.2015 Bulletin 2015/53

(43)Date of publication A2:
01.10.2014 Bulletin 2014/40

(21)Application number: 14162275.3

(22)Date of filing:  28.03.2014
(51)International Patent Classification (IPC): 
H01J 37/18(2006.01)
H01J 37/20(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30)Priority: 28.03.2013 JP 2013068617

(71)Applicant: JEOL Ltd.
Akishima, Tokyo 196 (JP)

(72)Inventor:
  • Yuasa, Shuichi
    Akishima, Tokyo 196-8558 (JP)

(74)Representative: Boult Wade Tennant 
Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

  


(54)Sample introduction device and charged particle beam instrument


(57) A sample introduction device is offered which permits one to introduce a sample into a sample chamber easily. The sample introduction device (100) is adapted to introduce a sample (S) into the sample chamber (1) of a charged particle beam instrument. The device includes: a pre-evacuation chamber (2) for performing a pre-evacuation; a sample holder (10) having a sample holding portion (12) capable of holding the sample (S); a support portion (20) for supporting the sample holder (10); and mechanical drives (30) for moving the support portion (20) such that the sample holding portion (12) moves from inside the pre-evacuation chamber (2) into the sample chamber (1).







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