| (11) | EP 2 784 797 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Sample introduction device and charged particle beam instrument |
(57) A sample introduction device is offered which permits one to introduce a sample into a sample chamber easily. The sample introduction device (100) is adapted to introduce a sample (S) into the sample chamber (1) of a charged particle beam instrument. The device includes: a pre-evacuation chamber (2) for performing a pre-evacuation; a sample holder (10) having a sample holding portion (12) capable of holding the sample (S); a support portion (20) for supporting the sample holder (10); and mechanical drives (30) for moving the support portion (20) such that the sample holding portion (12) moves from inside the pre-evacuation chamber (2) into the sample chamber (1).
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