(19)
(11)EP 1 936 761 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
20.08.2014 Bulletin 2014/34

(43)Date of publication A2:
25.06.2008 Bulletin 2008/26

(21)Application number: 08001621.5

(22)Date of filing:  04.08.1999
(51)International Patent Classification (IPC): 
H01S 3/22(2006.01)
H01S 3/036(2006.01)
(84)Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30)Priority: 28.08.1998 US 143633
12.05.1999 US 310786

(62)Application number of the earlier application in accordance with Art. 76 EPC:
99937789.8 / 1108275

(71)Applicant: Cymer, Inc.
San Diego, CA 92127 (US)

(72)Inventors:
  • Hoffmann, Thomas
    San Diego, CA 92116 (US)
  • Howey, James K.
    Vista, CA 92083 (US)
  • Shannon, Robert A.
    El Cajon, CA 92021 (US)

(74)Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser 
Leopoldstrasse 4
80802 München
80802 München (DE)

  


(54)Tangential fan with cutoff assembly and vibration control for electric discharge laser


(57) An electric discharge laser apparatus including a tangential fan comprising a laser chamber comprising a laser gas, at least two longitudinal electrodes configured to produce electric discharges defining a discharge region in said gas, a tangential fan for circulating said laser gas said fan defining a rotation axis and a circumference substantially concentric with said rotation axis and fan structure comprising a plurality of blade members disposed proximate to said circumference, a plurality of hub members supporting said blade members and defining fan blade segments, characterized by said blade members and said hub members being machined as a monolithic unit from a single blank of a selected material.







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