(84) | Designated Contracting States: | | DE FR GB |
(30) | Priority: | 24.05.1991 US 19910705523
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(71) | Applicant: LAM RESEARCH CORPORATION | | Fremont, CA 94538-6401 (US) |
| (72) | Inventors: | | - CHEN, Ching-Hwa
Milpitas, CA 95035 (US) - PIRKLE, David
Soquel, CA 95075 (US) - INOUE, Takashi
Nishinomiya City, Hyogo 663 (JP) - MIYAHARA, Shunji
Gogazuka, Itami 664 (JP) - TANAKA, Masahiko
Amagasaki City 661 (JP)
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(74) | Representative: Diehl, Hermann, Dr. Dipl.-Phys. | | DIEHL, GLÄSER, HILTL & PARTNER Patentanwälte Flüggenstrasse 13 D-80639 München D-80639 München (DE) |
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