(19)
(11)EP 0 302 885 A1

(12)

(43)Date of publication:
15.02.1989 Bulletin 1989/07

(21)Application number: 87903083.0

(22)Date of filing:  13.04.1987
(51)International Patent Classification (IPC): 
B65G 49/ 06( . )
H01L 21/ 677( . )
H01L 21/ 673( . )
(86)International application number:
PCT/US1987/000808
(87)International publication number:
WO 1987/006566 (05.11.1987 Gazette  1987/24)
(84)Designated Contracting States:
CH DE FR GB IT LI NL

(30)Priority: 22.04.1986 US 19860855088

(71)Applicant: MOTION MANUFACTURING, INC.
Santa Clara, CA 95051 (US)

(72)Inventors:
  • CAY, Norman, S.
    Los Gatos, CA 95030 (US)
  • BOWERS, Gerald, M.
    Boonville, CA 95415 (US)

(74)Representative: Burford, Anthony Frederick 
W.H. Beck, Greener & Co. 7 Stone Buildings Lincoln's Inn
London WC2A 3SZ
London WC2A 3SZ (GB)

  


(54)AUTOMATIC WAFER LOADING METHOD AND APPARATUS