(19)
(11)EP 1 399 955 A1

(12)

(43)Date of publication:
24.03.2004 Bulletin 2004/13

(21)Application number: 02743932.2

(22)Date of filing:  28.06.2002
(51)International Patent Classification (IPC)7H01L 21/22
(86)International application number:
PCT/KR2002/001238
(87)International publication number:
WO 2003/005429 (16.01.2003 Gazette  2003/03)
(84)Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30)Priority: 29.06.2001 KR 2001038050

(71)Applicant: Postech Foundation
Pohang-shi,Kyungsangbuk-do 790-784 (KR)

(72)Inventors:
  • RHEE, Shi-Woo,Department of Chemical Engineering
    Pohang,Kyungsangbuk-do790-784 (KR)
  • KWAK, Sang-Ki
    Pohang,Kyungsangbuk-do 790-784 (KR)

(74)Representative: Goddar, Heinz J., Dr. 
FORRESTER & BOEHMERTPettenkoferstrasse 20-22
80336 München
80336 München (DE)

  


(54)METHOD FOR PREPARING LOW DIELECTRIC FILMS