(19)
(11)EP 2 302 701 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
20.08.2014 Bulletin 2014/34

(43)Date of publication A2:
30.03.2011 Bulletin 2011/13

(21)Application number: 10178654.9

(22)Date of filing:  23.09.2010
(51)International Patent Classification (IPC): 
H01L 31/18(2006.01)
H01L 31/0236(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated Extension States:
BA ME RS

(30)Priority: 24.09.2009 US 277409 P

(71)Applicant: Rohm and Haas Electronic Materials, LLC
Marlborough, Massachusetts 01752 (US)

(72)Inventors:
  • Barr, Robert K
    Shrewsbury, MA 01545 (US)
  • O'Connor, Corey
    Worcester, MA 01605 (US)

(74)Representative: Buckley, Guy Julian 
Patent Outsourcing Limited 1 King Street
Bakewell Derbyshire DE45 1DZ
Bakewell Derbyshire DE45 1DZ (GB)

  


(54)Texturing semiconductor substrates


(57) Semiconductors are textured with aqueous solutions containing non-volatile alkoxylated glycols, their ethers and ether acetate derivatives having molecular weights of 170 or greater and flash points of 75° C or greater. The textured semiconductors can be used in the manufacture of photovoltaic devices.







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