(19)
(11)EP 2 346 270 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
19.03.2014 Bulletin 2014/12

(43)Date of publication A2:
20.07.2011 Bulletin 2011/29

(21)Application number: 10192059.3

(22)Date of filing:  22.11.2010
(51)International Patent Classification (IPC): 
H04R 19/00(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30)Priority: 24.11.2009 US 625157

(71)Applicant: NXP B.V.
5656 AG Eindhoven (NL)

(72)Inventors:
  • Felberer, Franz
    Redhill, Surrey RH1 1DL (GB)
  • Langereis, Geert
    Redhill, Surrey RH1 1DL (GB)
  • Van Lippen, Twan
    Redhill, Surrey RH11DL (GB)
  • Bominaar-Silkens, Iris
    Redhill, Surrey RH1 1DL (GB)
  • Pijnenburg, Remco, Henricus Wilhelmus
    Redhill, Surrey RH1 1DL (GB)

(74)Representative: Crawford, Andrew et al
NXP SEMICONDUCTORS UK LTD Intellectual Property & Licensing Red Central 60 High Street
Redhill, Surrey RH1 1SH
Redhill, Surrey RH1 1SH (GB)

  


(54)Micro-electromechanical system microphone


(57) A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.







Search report









Search report