(19)
(11)EP 2 450 942 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
26.07.2017 Bulletin 2017/30

(43)Date of publication A2:
09.05.2012 Bulletin 2012/19

(21)Application number: 11188188.4

(22)Date of filing:  08.11.2011
(51)Int. Cl.: 
H01J 49/24  (2006.01)
H01J 49/10  (2006.01)
H01J 49/04  (2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30)Priority: 08.11.2010 JP 2010249260

(71)Applicant: Hitachi High-Technologies Corporation
Tokyo 105-8717 (JP)

(72)Inventors:
  • Morokuma, Hidetoshi
    Ibaraki (JP)
  • Hashimoto, Yuichiro
    Tokyo, 100-8220 (JP)
  • Sugiama, Masuyuki
    Tokyo, 100-8220 (JP)
  • Yamada, Masuyoshi
    Ibaraki (JP)
  • Hasegawa, Hideki
    Tokyo, 100-8220 (JP)

(74)Representative: Strehl Schübel-Hopf & Partner 
Maximilianstrasse 54
80538 München
80538 München (DE)

  


(54)Mass spectrometer


(57) A mass spectrometer (100) of reduced size and weight is provided which is capable to conduct highly accurate mass spectroscopy. The mass spectrometer (100) includes an ion source (101) adapted to ionize gas (23) flowing in from outside in order to ionize a measurement sample (4) and a mass spectroscopy section (102) for separating the ionized measurement sample (4). The ion source (101) has its interior reduced in pressure by differential pumping from the mass spectroscopy section (102) and ionizes the gas (23) when the interior pressure rises as it inhales the gas (23), and the mass spectroscopy section (102) separates the ionized measurement sample (4) when its interior pressure falls after inhale of the gas (23). The mass spectrometer (100) may further include a restriction device (9) for suppressing a flow rate of the gas (23) the ion source (101) inhales and an open/close device (8), e.g. a pulse valve, for opening and closing a flow of the gas (23) the ion source (101) inhales.