(19)
(11)EP 2 789 988 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
21.10.2015 Bulletin 2015/43

(43)Date of publication A2:
15.10.2014 Bulletin 2014/42

(21)Application number: 14001164.4

(22)Date of filing:  28.03.2014
(51)International Patent Classification (IPC): 
G01D 5/244(2006.01)
G01D 5/347(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30)Priority: 12.04.2013 JP 2013083505

(71)Applicant: Canon Kabushiki Kaisha
Tokyo (JP)

(72)Inventor:
  • Shigeta, Junji
    Tokyo (JP)

(74)Representative: WESER & Kollegen 
Radeckestraße 43
81245 München
81245 München (DE)

  


(54)Position detection apparatus


(57) A position detector which detects the position of a movable member relative to a fixed member includes a signal detector configured to detect periodic signals which respectively indicate predetermined values concerning the position of the movable member relative to the fixed member and change at different periods in accordance with a position change, a signal processor configured to generate displacement signals based on the periodic signals detected by the signal detector and sequentially output the generated displacement signals while switching the signals at a predetermined period, a position calculator configured to calculate a position of the movable member relative to the fixed member based on the displacement signals, and a reliability determining unit configured to determine that the reliability of the position calculated by the position calculator is low, if the displacement amount of the movable member in the predetermined period is larger than a predetermined threshold.







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