(19)
(11)EP 2 795 684 A1

(12)

(43)Date of publication:
29.10.2014 Bulletin 2014/44

(21)Application number: 12818701.0

(22)Date of filing:  14.12.2012
(51)Int. Cl.: 
H01L 31/18  (2006.01)
H01L 21/477  (2006.01)
(86)International application number:
PCT/US2012/069660
(87)International publication number:
WO 2013/096105 (27.06.2013 Gazette  2013/26)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30)Priority: 19.12.2011 US 201113329418

(71)Applicant: General Electric Company
Schenectady, NY 12345 (US)

(72)Inventors:
  • CAO, Jinbo
    Niskayuna, NY 12309 (US)
  • ROJO, Juan, Carlos
    Niskayuna, NY 12309 (US)
  • DALAKOS, George, Theodore
    Niskayuna, NY 12309 (US)
  • YAKIMOV, Aharon
    Niskayuna, NY 12309 (US)
  • ZHONG, Dalong
    Niskayuna, NY 12309 (US)
  • KOREVAAR, Bastiaan, Arie
    Niskayuna, NY 12309 (US)
  • FELDMAN-PEABODY, Scott, D.
    Niskayuna, NY 12309 (US)

(74)Representative: Thurston, Joanna et al
Withers & Rogers LLP 4 More London Riverside
London SE1 2AU
London SE1 2AU (GB)

  


(54)METHODS FOR ANNEALING SEMICONDCUTOR WINDOW LAYERS