(19)
(11)EP 2 869 120 B1

(12)EUROPEAN PATENT SPECIFICATION

(45)Mention of the grant of the patent:
06.05.2020 Bulletin 2020/19

(21)Application number: 12880240.2

(22)Date of filing:  04.12.2012
(51)International Patent Classification (IPC): 
G03F 7/20(2006.01)
G02B 27/09(2006.01)
G03F 1/00(2012.01)
(86)International application number:
PCT/CN2012/085860
(87)International publication number:
WO 2014/000380 (03.01.2014 Gazette  2014/01)

(54)

MASK PLATE

MASKENPLATTE

PLAQUE DE MASQUE


(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30)Priority: 29.06.2012 CN 201210226736

(43)Date of publication of application:
06.05.2015 Bulletin 2015/19

(73)Proprietors:
  • BOE Technology Group Co., Ltd.
    Beijing 100015 (CN)
  • Beijing BOE Optoelectronics Technology Co., Ltd.
    Beijing 100176 (CN)

(72)Inventors:
  • XIE, Zhenyu
    Beijing 100176 (CN)
  • GUO, Jian
    Beijing 100176 (CN)

(74)Representative: Klunker IP Patentanwälte PartG mbB 
Destouchesstraße 68
80796 München
80796 München (DE)


(56)References cited: : 
CN-A- 1 164 673
CN-A- 101 424 882
KR-A- 20110 135 130
US-A- 5 612 565
US-A1- 2009 109 364
US-A1- 2011 024 817
CN-A- 101 105 633
CN-A- 102 749 801
US-A- 5 328 807
US-A1- 2005 024 622
US-A1- 2010 210 053
  
      
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).


    Description

    TECHNICAL FIELD



    [0001] Embodiments of the present invention relate to a mask plate.

    BACKGROUND



    [0002] During semiconductor manufacturing processes, it is a very important stage that a target substrate coated with photoresist is subjected to photolithography which employs a mask plate (reticle) to form a photolithography pattern and an etching process is conducted with the photolithography pattern so as to transfer a pattern on the mask plate onto the target substrate.

    [0003] The photolithography process is such a process that masking exposure is conducted on a target substrate coated with photoresist through an exposure machine and a mask plate with a slit-like light-transparent region. Eventually, a pattern on the mask plate formed by the slit-like light-transparent region is transferred onto the target substrate, and the target substrate is etched, so as to obtain a slit-like pattern structure with a certain width on the target substrate.

    [0004] In the field of microlithography, pattern structures drawn on target substrates are mostly linear, such as electrical circuit lines. As the semiconductor devices advanced to miniaturization gradually, minimization of the line width of patterns becomes a goal that manufactures are pursuing. However, owing to restriction upon the exposure precision of an exposure machine, the width of a pattern with a minimum width on a target substrate that has been produced at present is over 3m (more than 3m), and the line width of a corresponding slit-like light-transparent region on a mask plate is 3 to 5m.

    [0005] For display products with smaller sizes, such as cell phones, reduction of the distance between electrical circuits or decrease of the width of electrical circuit lines is very important for increasing the resolution of products or the aperture ratio of pixels.

    [0006] Implementing patterns with line widths in the order of micrometer is very common in the field of semiconductor. For example, the distance (a gap width) between the source electrode and the drain electrode of a thin film transistor (TFT) needs to be designed at the order of micron, or the line width of certain electrical circuit lines needs to be designed at the order of micron. Accordingly, the distance between the two edges of a slit-like light-transparent region on a mask plate needs to be designed at the order of micron as well. However, owing to restriction upon the exposure precision of an exposure machine, with an existing exposing system and a corresponding mask plate, on the premise that the photolithographic quality can be guaranteed, only patterns with line widths over 3m on a target substrate can be produced, and patterns with line widths of 3m or less cannot be obtained. By taking implementation of a gap between a source electrode and a drain electrode of a TFT as an example, the width of the gap between the source electrode and the drain electrode is as small as possible, so as to facilitate increase of the aperture ratio of pixels, and then, optical characteristics of the TFT is improved.

    [0007] A mask plate for implementing patterns with a line width over 3m available currently is illustrated in FIG. 1, and the mask plate comprises a slit-like light-transparent region and lightproof regions, with the edges of the slit-like light-transparent region being arranged to have a linear structure. The vertical distance between the two edges of the slit-like light-transparent region as illustrated in FIG. 1 is 3m, and the resultant line width of a gap is no less than 3m. If a gap with a narrower line width is desired and the exposure light source of the exposure machine is not changed, what can be done is to decrease the width of the slit-like light-transparent region on the mask plate. However, a linear pattern on a target substrate is a diffraction stripe pattern resulting from diffraction of light emitted by the exposure machine, the diffraction occurs upon the light passing through the slit-like light-transparent region on the mask plate, and the diffraction stripe pattern is a linear pattern. The conditions for light diffraction comprise that the width of a gap (the width of a slit-like light-transparent region) is comparable to or almost the same as the wavelength of incident light (light emitted by an exposure machine). When the gap is too small, a scattering phenomenon of light will happen when the light passes through the gap, and no diffraction pattern can be formed. Even if a diffraction pattern can be formed, the conductive film layer between a source electrode and a drain electrode cannot be etched away completely due to the fact that light intensity received by photoresist on the target substrate is too small and this leads to an incomplete removal of photoresist for the pattern, thereby causing a short circuit between the source electrode and the drain electrode. Therefore, a pattern with a narrower line width cannot be implemented with a conventional mask plate.

    [0008] US 2009/0109364 A1 discloses an exposing device, methods for forming a pattern, a channel, and a hole respectively by using the same, a liquid crystal display (LCD) device therewith and a method for fabricating the same.

    [0009] KR 2011/0135130 A relates to an exposure mask and a chip on glass type LCD of narrow bezel manufactured by using the same.

    [0010] US 2010/0210053 A1 relates to a photo mask and a method of manufacturing a LCD device of an in-plane-switching mode using the same.

    [0011] US 2011/0024817 A1 relates to a flash memory device and a mask for fabricating the same.

    [0012] US 5 612 565 A relates to a semiconductor device having channel boundary with an uneven shape.

    SUMMARY



    [0013] It is an object of the present invention to provide a mask plate, for implementing a pattern structure with a narrower line width on a target substrate.

    [0014] The object is achieved by a mask plate in accordance with claim 1. Further embodiments are defined in the respective dependent claims.

    [0015] According to the invention, there is provided a mask plate, comprising a slit-like light-transparent region and lightproof regions, with an edge of the slit-like light-transparent region being in a curve shape.

    [0016] According to the invention, the curve shape is in a zigzap shape or a wave-like shape. For example, a distance between any adjacent protruding sections at each of edges of the slit-like light-transparent region is equal, and a distance between any adjacent concaved sections at each of edges of the slit-like light-transparent region is equal.

    [0017] For example, two edges of the slit-like light-transparent region are in a zigzag shape, a shape of a protruding section is an isosceles triangle with a raised angle as its vertex angle, and a shape of a concaved section is an isosceles triangle with a recessed angle as its vertex angle; or two edges of the slit-like light-transparent region are in a zigzag shape, a shape of a protruding section is an isosceles triangle with a raised angle as its vertex angle, and a shape of a concaved section is an isosceles trapezoid having a common waist with the isosceles triangle.

    [0018] For example, the vertex angle of the isosceles triangle ranges between 15° and 75°.

    [0019] For example, two edges of the slit-like light-transparent region are mirror-symmetric to each other.

    [0020] For example, a distance between any opposed protruding sections at the two edges of the slit-like light-transparent region is equal; and/or a distance between any opposed concaved sections at the two edges of the slit-like light-transparent region is equal.

    [0021] For example, a distance between any opposed concaved sections at the two edges is in the range of 1 µm to 3 µm, and a distance between any opposed protruding sections at the two edges is 3 µm.

    [0022] According to the invention, two ends of each of edges of the slit-like light-transparent region are convex or concave.

    [0023] For example, when two ends of each of edges of the slit-like light-transparent region are concave, a shape of a concaved section is a right-angled triangle or a right-angled trapezoid.

    [0024] According to the invention, when two ends of each of edges of the slit-like light-transparent region are convex, a distance between opposed concaved sections at either end of the two edges of the slit-like light-transparent region is smaller than a distance between opposed concaved sections in a middle portion of the two edges of the slit-like light-transparent region; or a distance between opposed concaved sections of the slit-like light-transparent region is equal, and the distance between opposed protruding sections at either end of two edges of the slit-like light-transparent region is smaller than the distance between opposed protruding sections in a middle portion of the edges of the slit-like light-transparent region.

    [0025] With the mask plate provided by embodiments of the invention, in the case that exposure parameters are constant, a pattern structure with a line width of 3 µm or less can be achieved.

    BRIEF DESCRIPTION OF THE DRAWINGS



    [0026] In order to illustrate the technical solution of the embodiments of the invention more clearly, the following drawings will be briefly described below; the drawings as described below are only related to some embodiments of the invention, but not limitative of the invention. Embodiments are considered to fall under the scope of the claims, whilst "examples for better understanding of the invention" are considered to not fall under the scope of the claims.

    FIG. 1 is a structurally schematic view illustrating an existing mask plate for implementing a gap structure with a line width over 3µm provided by a first example for better understanding of the invention;

    FIG. 2 is a structurally schematic view illustrating a mask plate with a zigzag-like gap structure provided by a second example for better understanding of the invention ;

    FIG. 3 is a structurally schematic view illustrating a mask plate with a wavy gap structure provided by a third example for better understanding of the invention;

    FIG. 4 is a structurally schematic view illustrating a mask plate in which a gap edge is concave at both ends thereof provided by an embodiment of the invention;

    FIG. 5 is a schematic view illustrating formation of a linear pattern with a homogeneous width provided by a fourth example for better understanding of the invention ;

    FIG. 6 is a schematic view illustrating formation of a linear pattern with a inhomogeneous width provided by a fifth example for better understanding of the invention ;

    FIG. 7 is a view illustrating a mask plate, in which bumps are provided on two ends of an edge, provided by an embodiment of the invention;

    FIG. 8 is a schematic view illustrating formation of a TFT structure with a width of less than 3µm provided by a sixth example for better understanding of the invention ;

    FIG. 9 is a systematically, structurally schematic view illustrating a mask plate, of which an edge is convex at both ends of it, and a TFT provided by a seventh example for better understanding of the invention ;

    FIG. 10 is a systematically, structurally schematic view illustrating another mask plate, of which an edge is convex at both ends of it, and a TFT provided by an embodiment of the invention;

    FIG. 11 is a systematically, structurally schematic view illustrating another mask plate, of which an edge is convex at both ends of it, and a TFT provided by an embodiment of the invention;

    FIG. 12 is a systematically, structurally schematic view illustrating a mask plate, of which an edge is concave at both ends of it, and a TFT provided by an embodiment of the invention;

    FIG. 13 is a systematically, structurally schematic view illustrating another mask plate, of which an edge is concave at both ends of it, and a TFT provided by an embodiment of the invention; and

    FIG. 14 is a structurally schematic view illustrating another mask plate provided by an embodiment of the invention.


    DETAILED DESCRIPTION



    [0027] In order to make objects, technical details and advantages of the embodiments of the invention apparent, hereinafter, the technical solutions of the embodiments of the invention will be described in a clearly and fully understandable way in connection with the drawings related to the embodiments of the invention. The described embodiments are just a part but not all of the embodiments of the invention. In the following description, embodiments are considered to fall under the scope of the claims, whilst "examples for better understanding of the invention" are considered to not fall under the scope of the claims.

    [0028] Examples for better understanding of the invention and embodiments of the invention provide a mask plate, for implementing a pattern structure with a narrower line width on a target substrate.

    [0029] The mask plate provided by an embodiment of the invention acts to implement a pattern structure with a line width that can be 3µ mor less on a target substrate. A mask plate provided by an embodiment of the invention is mainly used to implement a slit-like pattern structure. Accordingly, a light-transparent region on the mask plate is a slit-like light-transparent region. This is different from a slit-like light-transparent region in a conventional technology. An edge of the slit-like light-transparent region of the mask plate provided by an embodiment of the invention is in a curve shape, and the curve shape has a zigzag shape or a wavey shape.

    [0030] The edge recited in the embodiments of the invention refers in particular to a gap edge of a slit, namely a long side of a light-transparent region as illustrated in FIG. 1. This is because, the width of the slit of the mask plate stated in embodiments of the invention is in the order of micrometer, about a few micrometers, but the length of the slit, i.e., the length or width of the mask plate is in the order of meter, and a larger mask plate is several meters long. Therefore, the ratio of length to width of the slit is relatively large, and it is unnecessary to form a short side of the slit having a length of several micrometers to be rugged (irregular).

    [0031] The principle to implement a pattern structure with a narrower line width through the above mask provided by embodiments of the invention will be simply explained below.

    [0032] As illustrated in FIG. 2, two edges of a slit-like light-transparent region on a mask plate according to an example for better understanding of the invention are in a zigzag shape, or as illustrated in FIG. 3, two edges of a slit-like light-transparent region on a mask plate according to an example for better understanding of the invention are in a wavy shape. Exposure intensity for illuminating a target substrate can be decreased by the concave sections of the two edges of the slit-like light-transparent region, so that the width of a gap to be formed on the target substrate through the mask plate can be decreased. Light transmittance is relatively strong at protruding sections of the two edges, thereby compensating the effect of the reduced exposure intensity incurred by the concave sections. Thus, this makes the width of the gap formed on the target substrate by the protruding sections of the edges of the slit-like light-transparent region be smaller than the width between opposed, protruding sections of the two edges of the slit-like light-transparent region. A single-slit diffraction can be incurred by the gap between the concave edges, and the gap formed on the target substrate through the single-slit diffraction is a gap with a width that is uniform and less than 3µm. It is verified through experiments that, within the mask plate provided by embodiments of the invention, the minimum gap width can be decreased up to 1µm, thereby greatly reducing line width of a pattern structure formed on a target substrate. Thus, a pattern structure with a narrower line width can be realized.

    [0033] The line width of the formed pattern structure or gap depends on the concave degree of the concave sections of the edges of the slit-like light-transparent region. In embodiments of the invention, when the minimum distance between any opposed, concave sections at two edges of the slit-like light-transparent region is 1µm and the maximum distance between any opposed, protruding sections at the two edges is 3µm, it is guaranteed that a normal diffraction stripe (a slit structure) can be obtained by exposure. Namely, diffraction conditions can be met, and a diffraction stripe that is normal and subjected to complete exposure is attained. The complete exposure as stated above means that the exposed pattern can be etched away or retained entirely.

    [0034] If positive photoresist is coated on a target substrate, then the film portion corresponding to the slit-like pattern that is transferred onto the target substrate through the mask plate is removed through a developing process with a developer, and the region may be an insulating region for isolating conductive layers in a semiconductor circuit. If a negative photoresist is coated on a target substrate, then the film portion corresponding to the slit-like pattern that is transferred onto the target substrate through the mask plate will not be removed through a developing process with a developer, and the rest regions will be removed by developing. Therefore, the remained film layer corresponding to the pattern may be a wire having a certain width.

    [0035] Technical solutions provided by examples for better understanding of the invention and embodiments of the invention will be concretely described through accompanied drawings below.

    [0036] Referring to FIG. 2, a mask plate provided by an example for better understanding of the invention comprises: a slit-like light-transparent region and lightproof regions that are formed on a substrate, the light-transparent region is formed in a certain pattern; two edges of the slit-like light-transparent region are in a curve shape. The curve shape may be a zigzag shape or a wave-like shape, or other shape.

    [0037] For example, in order to make a slit-like structure or gap formed on a target substrate more regular (e.g., the width of the gap is uniform), the two edges of the slit-like light-transparent region are mirror-symmetric to each other.

    [0038] For example, in order to further make the slit-like structure or gap formed on the target substrate more regular, the distance between any adjacent concave sections on each of the edges of the slit-like light-transparent region is equal, and the distance between any adjacent protruding sections on each of the edges of the slit-like light-transparent region is equal.

    [0039] For example, in order to still further make the slit-like structure or gap formed on the target substrate more regular, the distance between any opposed, concave sections for the two edges of the slit-like light-transparent region is equal, and/or the distance between any opposed, protruding sections for the two edges of the slit-like light-transparent region is equal.

    [0040] In order to achieve a gap with a homogeneous line width of less than 3µm, the distance between any opposed, concave sections at the two edges ranges is between 1µm and 3µm, and the distance between any opposed, protruding sections at the two edges is 3µm. (The distance between any opposed, concave sections at the two edges as illustrated in FIG. 2 is 1µm, and the distance between any opposed, protruding sections at the two edges as illustrated in FIG. 3 is 2µm.)

    [0041] Where the distant between any opposed, protruding sections at the two edges is at a preset value, the larger the distance between any opposed, concave sections at the two edges is, the wider the width of a formed gap is (the gap width is still within 3µm), and the smaller the distance between the opposed, concave sections at the two edges is, the narrower the width of the formed gap is. It is verified through experiments that, when any opposed, protruding sections at the two edges are away from each other at a distance of "a" and any opposed, concave sections at the two edges are away from each other at a distance of "b," the width of the pattern formed on a target substrate is about (a + b)/2. Therefore, when a = 3µm and b = 1µm, the width of the pattern formed on the target substrate is about 2µm.

    [0042] For example, the two edges of the slit-like light-transparent region are in a zigzag shape, the shape of a concave section is an isosceles triangle with a recessed angle as its vertex angle, and the shape of a protruding section is an isosceles triangle with a protruded angle as its vertex angle.

    [0043] Or, the two edges of the slit-like light-transparent region are in a zigzag shape, the shape of a concave section is an isosceles triangle with a recessed angle as its vertex angle, and the shape of a protruding section is an isosceles trapezoid having a common waist with the isosceles triangle.

    [0044] When the edges of the slit-like light-transparent region are in a zigzag shape, the shape of a concave section and of a protruding section is a triangle, and the distance between opposed, protruding sections at the two edges of the slit-like light-transparent region is at a preset value, the range of a vertex angle (an angle corresponding to the concave section) may be changed, namely, the distance between opposed, concave sections at the two edges may be changed so as to change the line width of a pattern formed on a target substrate.

    [0045] For example, the vertex angle (an angle corresponding to the concave section) of the triangle may be of any value between 15 degrees and 75 degrees. If a narrower gap is desired, the vertex angle should be larger to some extent, and if a wider gap is desired, the vertex angle should be smaller to some extent.

    [0046] Likewise, it is also possible that the concave degree of the concave sections of slit-like edges is changed so as to change the distance between opposed, concave sections at the two edges.

    [0047] According to the invention, two ends of each of the edges of a slit-like light-transparent region on a mask plate are concave or convex, and as illustrated within dotted lines in FIG. 4, two ends of each of the edges of the slit-like light-transparent region are constructed to be concave. Or, two ends of each of the edges are constructed to be convex, such as the configuration of two ends of each edge of a slit-like light-transparent region as illustrated within region defined by the dotted line in FIG. 2 or FIG. 3.

    [0048] In view of the phenomenon that two ends of each of the edges of a slit-like light-transparent region on a mask plate have stronger transmittance of light compared with the middle region of the light-transparent region of the mask plate, a protrusion section may be provided outside each of the two ends of each edge of the slit-like light-transparent region so as to reduce the exposure intensity at the two ends of the slit-like light-transparent region of the mask plate. Thus, this enables the line width of a gap formed on a target substrate to be uniform. There is no limitation on the shape of the bump, which may be a rectangle, as illustrated in FIG. 7, and may also be a circular arc, and the concrete shape and the size can be designed according to requirements.

    [0049] When two ends of each edge of a slit-like light-transparent region are concave, the shape of a concave section is a right-angled triangle or a right-angled trapezoid.

    [0050] When two ends of each edge of a slit-like light-transparent region are concave, the line width of a gap formed on a target substrate is uniform, as illustrated in FIG. 5. When two ends of each edge of a slit-like light-transparent region are convex, the line width of a gap formed on a target substrate is non-uniform (the line width is inhomogeneous), as illustrated in FIG. 6, and the middle portion of the formed gap is narrower, and the portions at two ends thereof are wider. This is because, when two ends of each edge of a slit-like light-transparent region are formed to be convex, the exposure intensity at the middle region of the light-transparent region of the mask plate is lower than the exposure intensity at an exposed region at either end, and a slit formed on a target substrate has a smaller width in its middle region than at its end.

    [0051] When two ends of each edge of a slit-like light-transparent region are formed to be convex, in order to avoid the formation of a gap with an inhomogeneous width as illustrated in FIG. 6, the concave sections adjacent to the two ends of each edge of the slit-like light-transparent region may be formed to be steeper. Namely, when the two ends of each edge of a slit-like light-transparent region are convex, the distance between opposed concave sections at either end of the two edges of the slit-like light-transparent region is smaller than the distance between opposed concave sections in a middle portion of the two edges of the slit-like light-transparent region; or the distance between all concave sections that are opposed in a slit-like light-transparent region is equal, and the distance between opposed protruding sections at either end of edges of slit-like light-transparent region is smaller than the distance between opposed protruding sections in the middle portion of the edges of slit-like light-transparent region.

    [0052] In this way, the concave section near either end of an edge of the slit-like light-transparent region functions to shield light to a greater degree, so that a gap formed on a target substrate is narrower, and the width of the entire gap that is formed eventually is uniform. Namely, the pattern as illustrated in FIG. 5 is formed.

    [0053] The distance between any opposed concave sections at two edges of a slit-like light-transparent region may be set to 1.5µm, and the distance between any opposed protruding sections at the two edges may be set to 2.5µm. The gap with a width of 2µm can be formed on a target substrate likewise.

    [0054] Hereinafter, the technical solutions provided by examples for better understanding of the invention and embodiments of the invention will be described in connection with the accompanied drawings with reference to an example of the gap between a source electrode and a drain electrode for a TFT (i.e., a channel region).

    [0055] As illustrated in FIG. 8, which is a schematically, partially structural view illustrating a TFT provided by an example for better understanding of the invention, specifically, an active layer is formed over a gate electrode, and a source and drain film layer is formed on the active layer. A part of the active layer is exposed through the gap between a source electrode and a drain electrode. The narrower the gap between the source electrode and the drain electrode is, the smaller the formed TFT is, the larger the aperture ratio of the pixel in which the TFT is located is, and the better the light transmission of the product is. However, how to achieve the minimization of the gap between the source electrode and the drain electrode is a technical difficulty point in the industry. Currently, the gap between the source electrode and the drain electrode is affected by exposure precision, and the formed gap is generally in the range of 3µm to 5µm. If the width of the gap is decreased by 1µm, the aperture ratio of the pixel for a product can be raised greatly, thereby promoting the competitive power of the product.

    [0056] A gap with a line width of less than 3µm between a source electrode and a drain electrode in FIG. 8 can be implemented with a mask plate in which an edge of a slit-like light-transparent region is in a zigzag shape as illustrated in FIG. 2.

    [0057] Cross-sections of the concave sections and the protruding sections of the zigzag shape taken by the edge of the slit-like light-transparent region appears to be triangles, such as isosceles triangles, and the protruding sections in correspondence with isosceles triangles can cause the width of the gap between the source electrode and the drain electrode formed on an array substrate to be more homogeneous.

    [0058] All the concave sections at each of edges of the slit-like light-transparent region have corresponding triangles with an identical vertex angle, all the protruding sections have corresponding triangles with an identical vertex angle, and the vertex angle of a triangle corresponding to a concave section is the same as the vertex angle of a triangle corresponding to a protruding section. Further, the distance between any two protruding sections that are opposed at the two edges is equal, and the distance between any two concave sections that are opposed at the two edges is equal. Such a design arrangement facilitates the formation of a gap with a uniform width.

    [0059] Given that the distance between any two concave sections that are opposed at the two edges is equal, if some opposed concave sections at the two edges have larger vertex angles, and some opposed concave sections have smaller vertex angles, then the area of a recessed region corresponding to a concave section with a larger vertex angle is larger as well, the light passing through a gap corresponding to such recessed region is weaker, and a pattern formed on a target substrate is narrower. Accordingly, the area of the recessed region corresponding to a concave section with a smaller vertex angle is smaller, the light passing through a gap corresponding to the recessed region is stronger, and a pattern formed on a target substrate is wider. If the pattern formed on the target substrate is an insulating gap in a metal film layer, then when the insulating gap in the metal film layer is narrower, the metal film layers on the two sides of the gap may be conductively connected. Thus, the structure of the device is changed, and this leads to an undesired short circuit.

    [0060] Given that the distance between any two protruding sections that are opposed at the two edges is equal, if some opposed concave sections at the two edges have larger vertex angles, and some opposed concave sections have smaller vertex angles, then the area of the recessed region corresponding to a concave section with a larger vertex angle is smaller, the light passing through a gap corresponding to the recessed region is stronger, and a pattern formed on a target substrate is wider. Accordingly, the area of the recessed region corresponding to a concave section with a smaller vertex angle is larger, the light passing through a gap corresponding to the recessed region is weaker, and a pattern formed on a target substrate is narrower. If the pattern formed on the target substrate is an insulating gap in a metal film layer, then when the insulating gap for the metal film layers is narrower, the metal film layers on two sides of the gap may be conductively connected. Thus, the structure of the device is changed, and this leads to an undesired short circuit.

    [0061] The light-transparent regions between opposed protruding sections at the two edges of the slit-like light-transparent region allow light with a sufficient light intensity to pass therethrough; and the light-transparent regions between concave sections on the mirror-symmetric edges of the slit-like light-transparent region act to allow transmission of light on one hand, and on the other hand, can serve to reduce the exposure intensity from an exposure machine. The protruding sections and the concave sections that are mirror-symmetric to each other at the edges of the slit-like light-transparent region act collectively, so that the exposure intensity transmitted by the light-transparent region is degraded, and an effective gap to be formed is relatively narrow. The effective gap corresponds to a region that can be etched away fully, and no short circuit between the source electrode and the drain electrode will be produced.

    [0062] When the distance between opposed protruding sections at the two edges is decided, the size of the vertex angle of a concave section of a zigzag-shaped edge of the slit-like light-transparent region determines the distance between concave sections that are mirror-symmetric to each other. The vertex angle of a triangle corresponding to the concave section ranges from 15 degrees to 75 degrees.

    [0063] FIG. 9 is a systematically structural schematic view illustrating a mask plate, in which an edge is convex at either end of it, and a TFT provided by an example for better understanding of the invention. After an exposure machine and the above mask plate have been amounted, an array substrate prepared in advance is placed in an exposure chamber and subjected to a masking exposure process. The array substrate is a substrate on which a gate electrode 11 and an active layer (not illustrated in FIG. 9) are formed; on the active layer, a conductive film layer 12 is provided for forming a source electrode and a drain electrode, and the conductive film layer is coated with positive photoresist thereon. A mask plate 22 is placed directly above the substrate with the conductive layer 12 formed thereon. With the exposure via the mask plate 22, a gap having a line width of 2µm is formed in the positive photoresist, and through an etching process, a region on the array substrate in correspondence with the slit-like light-transparent region on the mask plate 22 is etched away so as to form a gap between the source electrode and the drain electrode as illustrated in FIG. 8. The gap is 2µm in width, and a gap between the source electrode and the drain electrode for each TFT is decreased by 1µm at least. For a display product with a small screen and a high resolution, the aperture ratio of a pixel will be raised greatly.

    [0064] It is to be noted that, where it is desired to produce conductive strips with a gap of about 2µm therebetween by etching, it is necessary to coat negative photoresist on a conductive film layer.

    [0065] The distance between opposed concave sections at the two edges of the light-transparent region is not limited to 1µm, and the distance between opposed protruding sections at the two edges is not limited to 3µm. For example, the following arrangement is available: the distance between opposed concave sections at the two edges is 1.5µm while the distance between opposed protruding sections at the two edges is 2.5µm.

    [0066] Both ends of each edge of a slit-like light-transparent region are designed to be convex. That is, there is no concave section for shielding light at the two ends of each edge of the slit-like light-transparent region. This can cause a stronger exposure intensity of the transmitted light at the two ends of the edges of the slit-like light-transparent region, and the formed gap is narrow in the middle while wide at both ends. This results in the fact that the shape of a source electrode and a drain electrode will be irregular as well.

    [0067] In order to solve such a problem that, where both ends of each edge of the slit-like light-transparent region are convex, the width of a formed gap between a source electrode and a drain electrode varies, another mask design manner is provided by an embodiment of the invention. In detail, the design differs from the edge arrangement mode of the slit-like light-transparent region for the mask plate as illustrated in FIG. 9 in that, the distance between opposed concave sections at either end of the two edges of a slit-like light-transparent region is smaller than the distance between opposed concave sections in the middle portion of the two edges of the slit-like light-transparent region, and the formed pattern is illustrated in FIG. 10. The distance between all the opposed concave sections of a slit-like light-transparent region is equal, and the distance between opposed protruding sections at either end of the edges of the slit-like light-transparent region is smaller than the distance between opposed protruding sections in the middle portion of the edges of the slit-like light-transparent region, and the formed pattern is illustrated in FIG. 11.

    [0068] When the design mode of the light-transparent region of the mask plate as illustrated in FIG. 10 or FIG. 11 is compared to the mask design mode as illustrated in FIG. 9, a gap formed by the mask plate has a relatively smaller width at either end, so that the whole gap is kept at a uniform width.

    [0069] In order to solve such a problem that, where both ends of each edge of the slit-like light-transparent region are convex, the width of a formed gap between a source electrode and a drain electrode varies, another mask design manner is provided by an embodiment of the invention. In detail, the mask design differs from the arrangement mode of the light-transparent region of the mask plate illustrated in FIG. 9 in that, the two ends of an edge of a slit-like light-transparent region are concave. A concave portion may be of one right-angled triangle as illustrated in FIG. 12 (e.g., the portion denoted by a broken-line box A in FIG. 12), or of a right-angled trapezoid (e.g., the portion denoted by a broken-line box B in FIG. 13), with a side corresponding to the right angle being disposed on the outmost side. Further, the inclination angle of a sloping side of the right-angled triangle or the right-angled trapezoid is the same as the inclination angle for a triangle in the middle of the light-transparent region (the inclination angle is not the above vertex angle).

    [0070] When the design mode of the light-transparent region of the mask plate as mentioned as above is compared with the mask design mode as illustrated in FIG. 9, a gap formed in this design mode has a relatively smaller width at both ends, so that the whole gap is kept at a uniform width. Furthermore, when the mask design mode in FIG. 12 or FIG. 13 is compared with that as illustrated in FIG. 10 or FIG. 11, this design mode is simple. Furthermore, the design mode of every mask plate is not limited to one kind, and the mask design mode as illustrated in FIG. 7 can be used in combination with the design modes in any of FIGs. 10 to 13.

    [0071] It is to be noted that, in a design mode of a mask plate provided by an embodiment of the invention, protruding sections may be of an isosceles trapezoid, and concave sections may be of an isosceles triangle, as illustrated in FIG. 14. Likewise a pattern structure with a line width of 3µm or less can be formed through the structure. The principle to implement a pattern structure of 3µm or less with the mask plate as illustrated in FIG. 14 is similar to that with the mask plate as illustrated in FIG. 12 and FIG. 13, and details are omitted here.

    [0072] Regarding the mask plates provided by embodiments of the invention, the manufacturing process for them may be the same as an existing process for manufacturing a plate mask.

    [0073] For example, the manufacturing process may be implemented by the following manner in steps.

    [0074] Step 1, a metal chromium film layer is evaporated on a surface of a glass substrate.

    [0075] Step 2, imaging is conducted on the metal chromium film layer so as to form a pattern corresponding to the slit-like light-transparent region as stated above.

    [0076] Edges of the slit-like light-transparent region that has a zigzag-shaped structure as stated above are formed in the metal chromium film layer of the mask plate. Specifically, it is possible that an image of the pattern corresponding to the slit-like light-transparent region is formed on the metal chromium film layer by using electron beams.

    [0077] Step 3, a pattern is formed. It is possible that the chromium film layer corresponding to the light-transparent region is etched away through an etching process, so that the region becomes the slit-like light-transparent region.

    [0078] It is to be noted that, with design modes of the mask plate provided by embodiments of the invention, any pattern structure with a width of 3µm or less can be implemented, and especially in the technical field of semiconductor manufacturing process, it is possible that any wire having a width of 3µm or less can be implemented, or any gap between wires having a width of 3µm or less can be implemented. Furthermore, an edge of the slit-like light-transparent region provided by embodiments of the invention is in a concave-convex shape, which may be a concave-convex shape with a regular pattern, as long as it is ensured that the line width is lower than 3µm and the line width of a formed graph is also lower than 3µm.

    [0079] In summary, regarding the mask plate provided by embodiments of the invention, which comprises a slit-like light-transparent region and lightproof regions, an edge of the slit-like light-transparent region is convex, protruding sections of the edge can serve to shelter against the light intensity of an exposure machine so that a gap formed on a target substrate has a narrower width, and the protruding sections can serve to guarantee smooth passing of light at a certain optical intensity. The pattern formed by such an arrangement mode of alternate concave sections and protruding sections at an edge of the slit-like light-transparent region has a narrower gap, and as compared with the conventional technology, a pattern structure with a line width of 3µm or less can be implemented through a process using an exposure mask.

    [0080] The foregoing are merely exemplary embodiments of the invention, but are not used to limit the protection scope of the invention. The protection scope of the invention is determined by attached claims.


    Claims

    1. A mask plate, comprising a slit-like light-transparent region and lightproof regions, edges of the slit-like light-transparent region being in a curve shape and having each two ends, the curve shape being a zigzag shape or a wave-like shape, such that each edge defines concave and protruding sections, wherein the concave sections of each edge are opposed to the concave sections of the other edge and the protruding sections of each edge are opposed to the protruding sections of the other edge, and
    wherein the two ends of each of the edges of the slit-like light-transparent region are convex or concave, wherein
    when the two ends of each of the edges of the slit-like light-transparent region are convex,
    a distance between the opposed concave sections nearest to either end of two edges of the slit-like light-transparent region is smaller than a distance between opposed concave sections in a middle portion of the two edges of the slit-like light-transparent region; or
    a distance between any opposed concave sections of the slit-like light-transparent region is equal, and a distance between the opposed protruding sections nearest to either end of two edges of the slit-like light-transparent region is smaller than a distance between opposed protruding sections in a middle portion of the edges of the slit-like light-transparent region.
     
    2. The mask plate claimed as claim1, wherein a distance between any adjacent protruding sections at each of the edges of the slit-like light-transparent region is equal, and a distance between any adjacent concave sections at each of the edges of the slit-like light-transparent region is equal.
     
    3. The mask plate claimed as claim 2, wherein
    two edges of the slit-like light-transparent region are in a zigzag shape, a shape of a protruding section is an isosceles triangle with a raised angle as its vertex angle, and a shape of a concave section is an isosceles triangle with a recessed angle as its vertex angle; or
    two edges of the slit-like light-transparent region are in a zigzag shape, a shape of a protruding section is an isosceles trapezoid with a raised angle as its vertex angle, and a shape of a concave section is an isosceles triangle having two equal sides, one of which is shared by the isosceles trapezoid.
     
    4. The mask plate claimed as claim 3, wherein the vertex angle corresponding to the concave section of the isosceles triangle ranges between 15° and 75°.
     
    5. The mask plate claimed as any of claims 1 to 4, wherein two edges of the slit-like light-transparent region are mirror-symmetric to each other.
     
    6. The mask plate claimed as any of claims 1 to 5, wherein when two ends of each of the edges of the slit-like light-transparent region are concave,
    a distance between any opposed protruding sections at two edges of the slit-like light-transparent region is equal; and/or
    a distance between any opposed concave sections at two edges of the slit-like light-transparent region is equal.
     
    7. The mask plate claimed as any of claims 1 to 6, wherein a distance between any opposed concave sections at the two edges is in the range of 1µm to 3µm, and a distance between any opposed protruding sections at the two edges is 3µm.
     
    8. The mask plate claimed as any of claims 1 to 7, wherein one bump is disposed outside either end of each of the edges of the slit-like light-transparent region, respectively.
     
    9. The mask plate claimed as claim 1, wherein when the two ends of each of edges of the slit-like light-transparent region are concave, a shape of concave sections is a right-angled triangle or a right-angled trapezoid.
     


    Ansprüche

    1. Maskenplatte mit einer schlitzförmige lichttransparenten Region und lichtdichten Regionen, wobei Kanten der schlitzartigen lichttransparenten Region einen Kurvenform und jeweils zwei Enden aufweisen, wobei die Kurvenform eine Zickzack-Form oder eine wellenartige Form derart ist, dass jede Kante konkave und vorstehende Abschnitte definiert,
    wobei die konkaven Abschnitte jeder Kante den konkaven Abschnitten der anderen Kante gegenüberliegen und die vorstehenden Abschnitte jeder Kante den vorstehenden Abschnitten der anderen Kante gegenüberliegen, und
    wobei die zwei Enden jeder der Kanten der schlitzartigen lichttransparenten Region konvex oder konkav sind, wobei
    sobald die zwei Enden jeder der Kanten der schlitzförmigen lichttransparenten Region konvex sind,
    ein Abstand zwischen den gegenüberliegenden konkaven Abschnitten, die den beiden Enden der beiden Kanten der schlitzartigen, lichtdurchlässigen Region am nächsten liegen, kleiner ist als ein Abstand zwischen den gegenüberliegenden konkaven Abschnitten in einem mittleren Teil der beiden Kanten der schlitzartigen, lichtdurchlässigen Region; oder
    ein Abstand zwischen allen gegenüberliegenden konkaven Abschnitten der schlitzartigen lichtdurchlässigen Region gleich ist und ein Abstand zwischen den gegenüberliegenden vorstehenden Abschnitten, die den beiden Enden der beiden Kanten der schlitzartigen lichtdurchlässigen Region am nächsten liegen, kleiner ist als ein Abstand zwischen gegenüberliegenden vorstehenden Abschnitten in einem mittleren Teil der Kanten der schlitzartigen lichtdurchlässigen Region.
     
    2. Maskenplatte nach Anspruch 1, wobei der Abstand zwischen allen benachbarten vorstehenden Abschnitten an jeder der Kanten der schlitzartigen lichtdurchlässigen Region gleich ist und der Abstand zwischen allen benachbarten konkaven Abschnitten an jeder der Kanten der schlitzartigen lichtdurchlässigen Region gleich ist.
     
    3. Maskenplatte nach Anspruch 2, wobei
    ein Abstand zwischen den gegenüberliegenden konkaven Abschnitten ein gleichschenkliges Dreieck mit einem erhöhten Winkel als seinen Scheitelwinkel ist und eine Form eines konkaven Abschnitts ein gleichschenkliges Dreieck mit einem vertieften Winkel als seinem Scheitel ist; oder
    zwei Kanten der schlitzartigen lichttransparenten Region in einer Zickzack-Form sind, wobei eine Form eines vorstehenden Abschnitts ein gleichschenkliges Trapez mit einem erhöhten Winkel als seinem Scheitelwinkel ist, und eine Form eines konkaven Abschnitts ein gleichschenkliges Dreieck mit zwei gleichen Seiten ist, von denen eine mit dem gleichschenkligen Trapez geteilt ist.
     
    4. Maskenplatte gemäß Anspruch 3, wobei der Scheitelwinkel entsprechend des konkaven Abschnitts des gleichschenkligen Dreiecks zwischen 15° und 75° liegt.
     
    5. Maskenplatte gemäß einem der Ansprüche 1 bis 4, wobei zwei Kanten der schlitzartigen lichttransparenten Region spiegelsymmetrisch zueinander sind.
     
    6. Maskenplatte gemäß einem der Ansprüche 1 bis 5, wobei sobald zwei Enden von jeder der Kanten der schlitzartigen lichttransparenten Region konkav sind,
    ein Abstand zwischen zwei gegenüberliegenden vorstehenden Abschnitten an zwei Kanten der schlitzartigen lichttransparenten Region gleich ist; und/oder
    ein Abstand zwischen beliebigen gegenüberliegenden konkaven Abschnitten der zwei Kanten der schlitzartigen lichttransparenten Region gleich ist.
     
    7. Maskenplatte gemäß einem der Ansprüche 1 bis 6, wobei ein Abstand zwischen beliebigen gegenüberliegenden konkaven Abschnitten an den zwei Kanten im Bereich von 1 µm bis 3 µm liegt, und ein Abstand zwischen beliebigen gegenüberliegenden hervorstehenden Abschnitten an den zwei Kanten 3 µm ist.
     
    8. Maskenplatte gemäß einem der Ansprüche 1 bis 7, wobei jeweils ein Buckel außerhalb jedes Endes jeder der Kanten der schlitzartigen lichttransparenten Region angeordnet ist.
     
    9. Maskenplatte gemäß Anspruch 1, wobei, sobald die zwei Enden jeder der Kanten der schlitzartigen lichttransparenten Region konkav sind, eine Form eines konkaven Abschnitts ein rechtwinkliges Dreieck oder ein rechtwinkliges Trapez ist.
     


    Revendications

    1. Plaque de masque, comprenant une région transparente vis-à-vis de la lumière du type à fente(s) et des régions étanches vis-à-vis de la lumière, des bords de la région transparente vis-à-vis de la lumière du type à fente(s) étant selon une forme incurvée et comportant chacun deux extrémités, la forme incurvée étant une forme en zigzag ou une forme du type onde, de telle sorte que chaque bord définisse des sections concaves et en protubérance,
    dans laquelle les sections concaves de chaque bord sont opposées aux sections concaves de l'autre bord et les sections en protubérance de chaque bord sont opposées aux sections en protubérance de l'autre bord ; et
    dans laquelle les deux extrémités de chacun des bords de la région transparente vis-à-vis de la lumière du type à fente(s) sont convexes ou concaves ; dans laquelle
    lorsque les deux extrémités de chacun des bords de la région transparente vis-à-vis de la lumière du type à fente(s) sont convexes,
    une distance entre les sections concaves opposées au plus près de l'une ou l'autre extrémité de deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) est inférieure à une distance entre des sections concaves opposées dans une partie intermédiaire des deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) ; ou
    une distance entre de quelconques sections concaves opposées de la région transparente vis-à-vis de la lumière du type à fente(s) est égale, et une distance entre les sections en protubérance opposées au plus près de l'une ou l'autre extrémité de deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) est inférieure à une distance entre des sections en protubérance opposées dans une partie intermédiaire des bords de la région transparente vis-à-vis de la lumière du type à fente(s) .
     
    2. Plaque de masque telle que revendiquée selon la revendication 1, dans laquelle une distance entre de quelconques sections en protubérance adjacentes au niveau de chacun des bords de la région transparente vis-à-vis de la lumière du type à fente(s) est égale, et une distance entre de quelconques sections concaves adjacentes au niveau de chacun des bords de la région transparente vis-à-vis de la lumière du type à fente(s) est égale.
     
    3. Plaque de masque telle que revendiquée selon la revendication 2, dans laquelle :

    deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) sont selon une forme en zigzag, une forme d'une section en protubérance est un triangle isocèle qui comporte un angle augmenté en tant que son angle au sommet, et une forme d'une section concave est un triangle isocèle qui comporte un angle diminué en tant que son angle au sommet ; ou

    deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) sont selon une forme en zigzag, une forme d'une section en protubérance est un trapézoïde isocèle qui comporte un angle augmenté en tant que son angle au sommet, et une forme d'une section concave est un triangle isocèle qui comporte deux côtés égaux dont l'un est partagé par le trapézoïde isocèle.


     
    4. Plaque de masque telle que revendiquée selon la revendication 3, dans laquelle l'angle au sommet qui correspond à la section concave du triangle isocèle s'inscrit dans la plage qui va de 15° à 75°.
     
    5. Plaque de masque telle que revendiquée selon l'une quelconque des revendications 1 à 4, dans laquelle deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) sont en symétrie miroir l'un par rapport à l'autre.
     
    6. Plaque de masque telle que revendiquée selon l'une quelconque des revendications 1 à 5, dans laquelle, lorsque deux extrémités de chacun des bords de la région transparente vis-à-vis de la lumière du type à fente(s) sont concaves,
    une distance entre de quelconques sections en protubérance opposées au niveau de deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) est égale ; et/ou
    une distance entre de quelconques sections concaves opposées au niveau de deux bords de la région transparente vis-à-vis de la lumière du type à fente(s) est égale.
     
    7. Plaque de masque telle que revendiquée selon l'une quelconque des revendications 1 à 6, dans laquelle une distance entre de quelconques sections concaves opposées au niveau des deux bords s'inscrit dans la plage qui va de 1 µm à 3 µm, et une distance entre de quelconques sections en protubérance opposées au niveau des deux bords est égale à 3 µm.
     
    8. Plaque de masque telle que revendiquée selon l'une quelconque des revendications 1 à 7, dans laquelle un bossage est respectivement disposé à l'extérieur de l'une ou l'autre extrémité de chacun des bords de la région transparente vis-à-vis de la lumière du type à fente(s).
     
    9. Plaque de masque telle que revendiquée selon la revendication 1, dans laquelle, lorsque les deux extrémités de chacun de bords de la région transparente vis-à-vis de la lumière du type à fente(s) sont concaves, une forme de sections concaves est un triangle rectangle ou un trapézoïde rectangle.
     




    Drawing


























    Cited references

    REFERENCES CITED IN THE DESCRIPTION



    This list of references cited by the applicant is for the reader's convenience only. It does not form part of the European patent document. Even though great care has been taken in compiling the references, errors or omissions cannot be excluded and the EPO disclaims all liability in this regard.

    Patent documents cited in the description