(19)
(11)EP 2 959 329 B1

(12)EUROPEAN PATENT SPECIFICATION

(45)Mention of the grant of the patent:
25.11.2020 Bulletin 2020/48

(21)Application number: 14707911.5

(22)Date of filing:  19.02.2014
(51)International Patent Classification (IPC): 
G02B 5/08(2006.01)
(86)International application number:
PCT/US2014/017043
(87)International publication number:
WO 2014/130506 (28.08.2014 Gazette  2014/35)

(54)

MIRROR HAVING REFLECTIVE LAYER OF OR INCLUDING SILICON ALUMINIUM

SPIEGEL MIT EINER REFLEKTIERENDEN SCHICHT ODER MIT SILICIUMALUMINIUM

MIROIR AYANT UNE COUCHE RÉFLÉCHISSANTE DE OU COMPRENANT DU SILICIUM-ALUMINIUM


(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30)Priority: 19.02.2013 US 201313770262

(43)Date of publication of application:
30.12.2015 Bulletin 2015/53

(73)Proprietors:
  • Guardian do Brasil Vidros Planos Ltda.
    27570-000 Rio De Janeiro (BR)
  • Guardian Glass, LLC
    Auburn Hills MI 48326 (US)

(72)Inventors:
  • KRELING, Afonso
    27255-080 Rio De Janeiro (BR)
  • RAMOS TORRES, Fabiola
    27514-230 Rio De Janeiro (BR)
  • BAILLO ABREU, Juan
    12311-230 Sao Paulo (BR)
  • DEN BOER, Willem
    Brighton, MI 48116 (US)
  • KRASNOV, Alexey
    Canton, MI 48187 (US)

(74)Representative: Hoyng Rokh Monegier LLP 
Rembrandt Tower, 31st Floor Amstelplein 1
1096 HA Amsterdam
1096 HA Amsterdam (NL)


(56)References cited: : 
DE-A1-102009 040 785
GB-A- 2 281 411
US-A1- 2008 055 704
US-A1- 2010 259 940
US-B2- 7 678 459
DE-A1-102010 039 927
JP-A- H11 238 574
US-A1- 2008 212 189
US-A1- 2011 176 212
  
      
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).


    Description

    FIELD OF THE INVENTION



    [0001] Certain example embodiments of this invention relate to mirrors and/or methods of making the same. More particularly, certain example embodiments relate to mirrors having a reflective layer of or including silicon aluminum. The mirrors may be first surface mirrors, or second surface mirrors. The mirrors may be flat or bent in different instances, and may or may not be heat treated (e.g., thermally tempered and/or thermally bent). In certain example instances, such mirrors may be used in interior residential, commercial, furniture, appliance, and/or other applications.

    BACKGROUND AND SUMMARY OF EXAMPLE EMBODIMENTS OF THE INVENTION



    [0002] Mirrors have been in existence for years and have been used in interior building applications such as, for example, in bathrooms, as decorations, for furniture, etc., and for exterior applications. Mirrors generally are either (a) first surface mirrors, where the mirror coating is provided between the viewer and the supporting glass substrate, or (b) second surface mirrors, where the supporting glass substrate is interposed between the viewer and the mirror coating. See, for example, U.S. Patent Nos. 7,276,289 and 7,678,459; U.S. Publication Nos. 2006/0077580; 2007/0178316; 2008/0073203; 2008/0164173; 2010/0229853; 2011/0176212; and 2011/0176236.

    [0003] Interior mirrors, including home/residential mirrors, are traditionally produced via wet processing, also known as silvering, which allows a highly reflective silver layer and pleasant appearance of the reflected image. However, wet silvering is expensive, and is not environmentally friendly. Silver also is not particularly durable and, for example, is subject to corrosion when exposed to even building interior environments. Durability problems can be overcome with silver-inclusive mirrors, however, by applying one or more layers of protective paint. Yet these paints are sometimes expensive and, at a minimum, inject time delays in the process because they need to be coated and dried and sometimes re-coated and re-dried. Wet coating techniques also are "messy" and potentially hazardous to humans.

    [0004] Thus, it will be appreciated that there is a need in the art for improved mirrors and/or methods of making the same. Certain embodiments of this invention solve one or more of the problems discussed above.

    [0005] This invention is defined by the features of claim 1 and relates to a mirror having a reflecting layer of or including an alloy of silicon (Si) and aluminum (Al). Such a reflective layer may be used in first surface mirrors and/or second surface mirrors. The SiAl inclusive reflective layer may be sandwiched between at least first and second dielectric layers in certain example embodiments. Certain example embodiments relate to the use of a sputtering target of or including SiAl, in order to sputter-deposit the reflective layer of or including silicon aluminum on (directly or indirectly) a glass substrate, in making a mirror. Heat formable mirrors may also benefit from the use of sputter-deposited SiAl inclusive reflective layers, which material has been found to sustain little or no mechanical damage or optical change during thermal glass bending, even at some small curvature radii. Thus, example advantages of SiAl mirrors include high mechanical durability, thermal temperability (possibly without the need for additional protective overcoat(s)), thermal bendability without cracking, low cost, and environmental stability.

    [0006] In certain example embodiments of this invention, there is provided a mirror comprising: a glass substrate; a metallic or substantially metallic reflective layer comprising silicon aluminum provided on the glass substrate; the metallic or substantially metallic reflective layer comprising silicon aluminum being located between at least first second dielectric layers, and wherein the first dielectric layer is located between at least the glass substrate and the metallic or substantially metallic reflective layer comprising silicon aluminum; and wherein the layer comprising silicon aluminum comprises, on a weight basis, more silicon than aluminum.

    [0007] In certain example embodiments, the layer of or including silicon aluminum may comprise, on a weight basis, from 70-99.98% silicon and from 0.02-30% aluminum, more preferably from 75-99% silicon and from 1-25% aluminum, and still more preferably from 85-98% silicon and from 2-15% aluminum.

    BRIEF DESCRIPTION OF THE DRAWINGS



    [0008] 

    FIGURE 1 is a cross sectional view of a mirror in accordance with certain example embodiments of this invention;

    FIGURE 2 is a cross sectional view of an example mirror according to an example embodiment of this invention; and

    FIGURE 3 is a chart identifying optical characteristics of a mirror made in accordance with an example as shown in Fig. 2.


    DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS OF THE INVENTION



    [0009] Referring now more particularly to the drawings in which reference numerals indicate like parts/materials throughout the several views. Mirrors according to example embodiments of this invention may be flat or bent in different instances, and may or may not be heat treated (e.g., thermally tempered and/or thermally bent). In certain example instances, such mirrors may be used in interior residential, commercial, appliance, furniture, and/or other applications.

    [0010] Referring to Figs. 1-2, certain example embodiments of this invention relate to a mirror having a reflecting layer 102 of or including an alloy of silicon (Si) and aluminum (Al) which provides mirrorish reflectance. Such mirrors may be used as first surface mirrors and/or second surface mirrors. For second surface mirrors, an optional protective tape or paint layer 108 may be provided as shown in Fig. 2. Certain example embodiments relate to the use of a sputtering target of or including SiAl, in order to sputter-deposit a reflective layer 102 of or including silicon aluminum on (directly or indirectly) a glass substrate 100, in making first or second surface mirrors. While the visible reflectance levels of SiAl are not as high as those of Ag and Al reflective layers in mirrors, SiAl reflective layers 102 can achieve sufficient reflectance levels for applications such as interior/residential mirrors, and may be durable and comparatively inexpensive. Moreover, SiAl mirrors may be used for a number of applications where it is desired for the reflective layer to be semitransparent in the visible spectral range and highly reflective in the mid-IR spectral region, such as mirrors for commercial appliances such as refrigerators with partially transparent flat or curved doors/panels, funhouse mirrors, basis for astronomical mirrors in a first-surface configuration (with additional reflective layers provided, in addition to the SiAl layer(s)), and so forth. Heat formable mirrors may also benefit from the use of sputter-deposited SiAl inclusive reflective layers, which material has been found to sustain little or no mechanical damage or optical change during thermal glass bending, even at some small curvature radii. Accordingly, the mirrors shown in Figs. 1-2 may be either flat mirrors, or may be heat-bent mirrors where the glass substrate 100 is thermally bent after the SiAl layer 102 has been sputter-deposited thereon. Thus, advantages of example SiAl mirrors include high mechanical durability, thermal temperability (possibly without the need for additional protective overcoat(s)), thermal bendability without cracking, low cost, and environmental stability. The SiAl inclusive reflective layer 102 may be provided between at least first and second dielectric layers 101 and 104 (e.g., of or including silicon nitride and/or silicon oxynitride, and/or other suitable material) in example embodiments. Optionally, transparent dielectric protective layer 105 and/or a permanent protective film (PPF) or paint 108 may be applied on the substrate 100 over the reflective layer 102 in any of the Fig. 1-2 embodiments, for added overall durability. For example, PPF 108 (e.g., in the form of a tape) may be applied in solid form in certain example embodiments. And while paint may be provided on mirrors according to example embodiments of this invention, such protective paint is not needed in many applications. Reflected images from mirrors according to example embodiments of this inventions may have a brown tint.

    [0011] Fig. 1 is a cross-sectional view of a mirror (first surface mirror or second surface mirror) in accordance with example embodiments of this invention. As shown in Fig. 1, a glass substrate 100 supports a mirror coating including dielectric layer 101, reflective/mirror layer 102 of or including silicon aluminum (e.g., SiAl), and dielectric layer 104. Dielectric layer 101 may be of or include any of silicon nitride (e.g., Si3N4), silicon oxide (e.g., SiO2), silicon oxynitride, aluminum nitride, aluminum oxynitride, aluminum oxide, and/or titanium nitride. And dielectric layer 104 may be of or include any of silicon nitride (e.g., Si3N4), silicon oxide (e.g., SiO2), silicon oxynitride, aluminum nitride, aluminum oxynitride, aluminum oxide, and/or titanium nitride. Silicon-inclusive dielectric materials, such as silicon oxide, silicon nitride, and/or silicon oxynitride, for layers 101 and 104 may or may not be doped with aluminum such as from about 1-8% aluminum in certain example embodiments. The mirror coating may optionally include transparent dielectric layer 105 (e.g., of or including zirconium oxide or other suitable material) and/or a PPF layer 108 of tape or the like. Layers 101, 102, 104 and 105 may be sputter-deposited on the substrate 100. Metallic or substantially metallic SiAl based reflective layer 102 may be sputter-deposited on glass substrate 100, via one or more SiAl sputtering target(s) in an atmosphere of or including inert gas such as argon gas. In certain example embodiments, the SiAl layer 102 is sputter-deposited, via at least one SiAl target, in an argon gas atmosphere that includes little or no oxygen or nitrogen gas. One SiAl layer 102 is provided in the mirror in the illustrated embodiments herein, although it is possible that multiple SiAl layers may be provided. Optionally, a paint or PPF film 108 may also be provided on the substrate 100 as shown in Fig. 1, over at least the reflective layer 102.

    [0012] SiAl layer 102 may contain, on a weight % basis, from 70-99.98% Si (more preferably from 75-99.5%, even more preferably from 75-99%, and most preferably from 85-98% Si), and from 0.02-30% Al (more preferably from 0.2-25%, even more preferably from 1-25%, and most preferably from 2-15% Al). It has been found that too much Al harms the stability of the Si in the layer 102, so the above ranges of Si and Al are preferred for layer 102 in example embodiments. Adding the Al to the Si is advantageous in that it increases the reflectance of the layer 102 compared to if the layer 102 was only Si. It will be appreciated that amounts (e.g., small amounts) of other material(s), such as nitrogen and/or oxygen, may also be present in SiAl layer 102 in certain example embodiments of this invention.

    [0013] Glass substrate 100 may be soda-lime-silica based glass, and may be from about 1-10 mm thick, more preferably from about 2-6 mm thick, in example embodiments of this invention. SiAl layer 102 may be from about 50-1,000 Å (angstroms) thick, more preferably from about 100-500 Å thick, more preferably from about 125-350 Å thick, even more preferably from about 130-300 Å thick, and most preferably from about 140-250 Å thick. It has been found that reflective properties of layer 102 deteriorate if the SiAl layer 102 is thicker than 300 Å or is thinner than 130 Å. Thus, it has surprisingly been found that the best reflectance is achieved from SiAl layer 102 when the SiAl layer 102 is from about 130-300 Å thick, and most preferably from about 140-250 Å thick.

    [0014] Transparent dielectric layer 101 and 104 may be of or include any of silicon nitride (e.g., Si3N4), silicon oxide (e.g., SiO2), silicon oxynitride, aluminum nitride, aluminum oxynitride, aluminum oxide, titanium nitride, or other suitable material. In example embodiments, dielectric layer 101 may be thicker (e.g., at least 20 angstroms thicker, more preferably at least about 30 angstroms thicker) than dielectric layer 104. In example embodiments, dielectric layer 101 may also be thicker (e.g., at least 20 angstroms thicker, more preferably at least about 30 angstroms thicker, and most preferably at least 50 angstroms thicker) than optional protective dielectric layer 105. Inner dielectric layer 101 may be from about 50-500 Å (angstroms) thick, more preferably from about 75-300 Å thick, and most preferably from about 100-200 Å thick, with an example thickness being about 150 Å. Outer dielectric layer 104 may be from about 40-500 Å (angstroms) thick, more preferably from about 50-200 Å thick, and most preferably from about 70-140 Å thick, with an example thickness being about 100 Å.

    [0015] Sputter-deposited transparent protective dielectric layer 105 (e.g., of or including one or more of zirconium oxide, zirconium oxynitride, and/or zirconium silicon oxynitride), if provided, may be from about 30-500 Å thick, more preferably from about 40-120 Å thick in certain example embodiments, with an example thickness being about 60 Å.

    [0016] In example embodiments, SiAl layer 102 has a visible transmission of from about 10-36% (more preferably from about 12-32%), and a visible reflectance of from about 40-75% (more preferably from about 43-65%). Thus, the mirrors shown in Figs. 1-2, before and/or after any optional heat treatment, may have a visible transmission (Tvis, Y, or TrY) of from about 5-36%, more preferably from about 10-34%, more preferably from about 12-32%. And the mirrors shown in Figs. 1-2, before and/or after any optional heat treatment, may have a visible film side reflectance (Rf or RfY) of from about 45-75%, more preferably from about 48-65%; and a visible glass side reflectance (Rg or RgY) of from about 40-70%, more preferably from about 42-55%, and most preferably from about 44-53%.

    [0017] Fig. 2 is a cross sectional view of an example first or second surface mirror according to an example embodiment of this invention. Note that PPF or paint 108 is typically not included in second surface mirrors. It will be appreciated that the mirror coating in Fig. 2 may be the same as shown and described with respect to Fig. 1, with respect to thicknesses, optics, materials and so forth. Layers 105 and 108 are optional. In the example shown in Fig. 2, the inner and outer transparent dielectric layers 101 and 104 are of or include silicon nitride, which may or may not be doped with aluminum or the like. Layer 101 and/or layer 104 may also optionally include oxygen in certain example embodiments. Also, in the Fig. 2 example, protective dielectric layer 105 is of or includes zirconium oxide. Optionally, when provided, protective layer/film 108 may be of PPF (e.g., polymer based tape) or paint.

    EXAMPLE



    [0018] An example mirror, similar to Fig. 2, was made as follows and included the following layers moving away from the glass substrate 100:

    Glass substrate 100 (4 mm thick clear glass)

    Silicon nitride 101 (150 Å thick)

    SiAl 102 (132 Å thick)

    Silicon nitride 104 (100 Å thick)

    Zirconium oxide 105 (60 Å thick)



    [0019] Fig. 3 is a table setting forth the optics, before and after heat treatment(HT), for the above-identified example mirror. The left-hand column of values were measured as-coated (AC) before HT, and the right-hand column of values were measured after HT. The HT was sufficient for thermal bending and/or tempering, and was at temperature(s) of at least 580 degrees C. For example, Fig. 3 illustrates that the example mirror had: glass side visible reflectance (RgY) of 44.2% before HT, and 49.2% after HT; glass side reflective a* color of -2.2 before HT and - 2.9 after HT; and glass side reflective b* color of +2.1 before HT and +1.7 after HT. And Fig. 3 illustrates that the example mirror had: visible transmission (TrY) of 24.9% before HT, and 30.7% after HT; transmissive a* color of +2.5 before HT and +3.5 after HT; and transmissive b* color of + 12.3 before HT and + 17.1 after HT. Film side visible reflective values are also set forth in Fig. 3 for the example coating. Thus, it will be appreciated that while the mirror had some transmission it also had significant reflectance for mirror applications.

    [0020] In the Fig. 1-2 embodiments, layers 101, 102, 104 and 105 are preferably deposited via sputtering, although they could be deposited in other suitable manners. For example, the SiAl layer 102 may be deposited on glass substrate 100 in any suitable manner, such as via magnetron DC or RF sputtering. For example, the sputtering of SiAl inclusive layer 102 may be done at room or elevated temperature, in a pure or substantially pure argon gas atmosphere, for example at about 2-20 mTorr (e.g., at pressure of about 3 mTorr).

    [0021] Certain example embodiments may optionally incorporate a permanent protective film (PPF) 108, e.g., polymer inclusive film, with high adhesion levels, good chemical resistance, and/or excellent environmental durability. The protective film may be resistant to delamination from moisture penetration and/or the use of asphalitic based adhesives applied to the exterior surface of the protective film. Adhesive strengths of the protective films may be greater than or equal to 150 cN/20 mm wide strip, more preferably 275 cN/20 mm wide strip, as measured in a tape removal test. For instance, certain example embodiments may have an adhesive strength of 200-500 cN/20 mm wide strip, more preferably 200-300 cN/20 mm wide strip. In certain example embodiments, the PPF may be thin, e.g., having a thickness of < 200 microns, and sometimes about 40-100 microns in thickness. Peel strength may be increased through the incorporation of additional cross-linking polymers in certain example embodiments. Example protective films 108 from Nitto-Denko include: SPV-9310, SPV-9320, SPV-30800, SPV 5057 A5, and SPV 5057 A7. Other manufacturers of similar preferred protective films include Permacel, Tessa Tapes, B&K Films, and Novacell. These plastic films come in a wide variety of opacities and colors.

    [0022] While a layer, layer system, coating, or the like, may be said to be "on" or "supported by" a substrate, layer, layer system, coating, or the like, other layer(s) may be provided therebetween. Thus, for example, the coatings or layers described above may be considered "on" and "supported by" the substrate and/or other coatings or layers even if other layer(s) are provided therebetween.

    [0023] In example embodiments of this invention, there is provided a mirror comprising: a glass substrate; a metallic or substantially metallic reflective layer comprising silicon aluminum provided on the glass substrate; the metallic or substantially metallic reflective layer comprising silicon aluminum being located between at least first second dielectric layers, and wherein the first dielectric layer is located between at least the glass substrate and the metallic or substantially metallic reflective layer comprising silicon aluminum; and wherein the layer comprising silicon aluminum comprises, on a weight basis, more silicon than aluminum.

    [0024] In the mirror of the immediately preceding paragraph, the layer comprising silicon aluminum may consist essentially of silicon aluminum.

    [0025] In the mirror of any of the preceding two paragraphs, the layer comprising silicon aluminum may comprise, on a weight basis, from 70-99.98% silicon and from 0.02-30% aluminum, more preferably from 75-99% silicon and from 1-25% aluminum, and still more preferably from 85-98% silicon and from 2-15% aluminum.

    [0026] In the mirror of any of the preceding three paragraphs, the metallic or substantially metallic reflective layer comprising silicon aluminum may directly contact the first and/or second dielectric layer(s).

    [0027] In the mirror of any of the preceding four paragraphs, the layer comprising silicon aluminum may be from 100-500 Å thick, more preferably from 130-300 Å thick.

    [0028] In the mirror of any of the preceding five paragraphs, the mirror may have a visible transmission of from about 5-36%, more preferably from about 10-34%.

    [0029] In the mirror of any of the preceding six paragraphs, the mirror may have a glass side visible reflectance of from about 42-55%.

    [0030] In the mirror of any of the preceding seven paragraphs, the mirror may have a film side visible reflectance of from about 48-65%.

    [0031] In the mirror of any of the preceding eight paragraphs, the layer comprising silicon aluminum may be a sputter-deposited layer.

    [0032] In the mirror of any of the preceding nine paragraphs, the first dielectric layer may be of or include one or more of silicon nitride, silicon oxide, and/or silicon oxynitride.

    [0033] In the mirror of any of the preceding ten paragraphs, the second dielectric layer may be of or include one or more of silicon nitride, silicon oxide, and/or silicon oxynitride.

    [0034] The mirror of any of the preceding eleven paragraphs may further comprise a layer comprising zirconium oxide, wherein the second dielectric layer is located between and directly contacting the layer comprising zirconium oxide and the layer comprising silicon aluminum.

    [0035] The mirror of any of the preceding twelve paragraphs may further comprise a polymer inclusive film, the second dielectric layer being located between at least the layer comprising silicon aluminum and the polymer inclusive film.

    [0036] The mirror of any of the preceding thirteen paragraphs may be a first surface mirror, or a second surface mirror.

    [0037] While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the scope of the appended claims.


    Claims

    1. A mirror, comprising:

    - a glass substrate (100);

    - a metallic or substantially metallic reflective layer (102) comprising silicon aluminum provided on the glass substrate (100);

    - the metallic or substantially metallic reflective layer (102) comprising silicon aluminum being located between at least first (101) and second (104) dielectric layers, and wherein the first dielectric layer (101) is located between at least the glass substrate (100) and the metallic or substantially metallic reflective layer (102) comprising silicon aluminum;
    wherein the layer (102) comprising silicon aluminum comprises, on a weight basis, more silicon than aluminum; and

    - a protective layer (105) comprising zirconium oxide on the glass substrate (100) over the reflective layer (102) and over the first (101) and second (104) Z dielectric layers.


     
    2. The mirror of claim 1, wherein the layer (102) comprising silicon aluminum consists essentially of silicon aluminum.
     
    3. The mirror of any preceding claim, wherein the layer (102) comprising silicon aluminum comprises, on a weight basis, from 75-99% silicon and from 1-25% aluminum, and preferably from 85-98% silicon and from 2-15% aluminum.
     
    4. The mirror of any preceding claim, wherein the metallic or substantially metallic reflective layer (102) comprising silicon aluminum directly contacts each of the first (101) and second (104) dielectric layers.
     
    5. The mirror of any preceding claim, wherein the layer comprising silicon aluminum is from 100-500 A thick, and preferably from 130-300 Å thick.
     
    6. The mirror of any preceding claim, wherein the mirror has a visible transmission of from about 5-36%, and preferably of from about 10-34%.
     
    7. The mirror of any preceding claim, wherein the layer (102) comprising silicon aluminum is a sputter-deposited layer.
     
    8. The mirror of any preceding claim, wherein the first dielectric layer (101) comprises silicon nitride.
     
    9. The mirror of any preceding claim, wherein the second dielectric layer (104) comprises silicon nitride.
     
    10. The mirror of any preceding claim, wherein the second dielectric layer (104) is located between and directly contacting the layer (105) comprising zirconium oxide and the layer (102) comprising silicon aluminum.
     
    11. The mirror of any preceding claim, further comprising a polymer inclusive film (108), the second dielectric layer (104) being located between at least the layer (102) comprising silicon aluminum and the polymer inclusive film (108).
     
    12. The mirror of any preceding claim, wherein the mirror is a first surface mirror.
     
    13. The mirror of any of claims 1-11, wherein the mirror is a second surface mirror.
     
    14. The mirror of any preceding claim, wherein the first dielectric layer (101) and/or the second dielectric layer (104) comprises silicon oxynitride.
     
    15. The mirror of any of claims 1-13, wherein the first dielectric layer (101) and/or the second dielectric layer (104) comprises silicon oxide.
     


    Ansprüche

    1. Spiegel, umfassend:

    - ein Glassubstrat (100);

    - eine auf dem Glassubstrat (100) aufgebrachte metallische oder im Wesentlichen metallische reflektierende Schicht (102), die Silicium-Aluminium umfasst;

    - wobei die metallische oder im Wesentlichen metallische reflektierende Schicht (102), die Silicium-Aluminium umfasst, zwischen mindestens einer ersten (101) und einer zweiten (104) dielektrischen Schicht angeordnet ist und wobei die erste dielektrische Schicht (101) zwischen mindestens dem Glassubstrat (100) und der metallischen oder im Wesentlichen metallischen reflektierenden Schicht (102), die Silicium-Aluminium umfasst, angeordnet ist;
    wobei die Schicht (102), die Silicium-Aluminium umfasst, auf Gewichtsbasis mehr Silicium als Aluminium enthält; und

    - eine Schutzschicht (105), die Zirconiumdioxid umfasst, auf dem Glassubstrat (100) über der reflektierenden Schicht (102) und über der ersten (101) und zweiten (104) dielektrischen Schicht.


     
    2. Spiegel nach Anspruch 1, wobei die Schicht (102), die Silicium-Aluminium umfasst, im Wesentlichen aus Silicium-Aluminium besteht.
     
    3. Spiegel nach einem der vorhergehenden Ansprüche, wobei die Schicht (102), die Silicium-Aluminium umfasst, auf Gewichtsbasis 75-99% Silicium und 1-25% Aluminium und vorzugsweise 85-98% Silicium und 2-15% Aluminium umfasst.
     
    4. Spiegel nach einem der vorhergehenden Ansprüche, wobei die metallische oder im Wesentlichen metallische reflektierende Schicht (102), die Silicium-Aluminium umfasst, jeweils mit der ersten (101) und zweiten (104) dielektrischen Schicht direkt in Kontakt steht.
     
    5. Spiegel nach einem der vorhergehenden Ansprüche, wobei Schicht, die Silicium-Aluminium umfasst, eine Dicke von 100-500 A und vorzugsweise von 130-300 Å aufweist.
     
    6. Spiegel nach einem der vorhergehenden Ansprüche, wobei der Spiegel eine sichtbare Transmission von etwa 5-36% und vorzugsweise von etwa 10-34%, aufweist.
     
    7. Spiegel nach einem der vorhergehenden Ansprüche, wobei die Schicht (102), die Silicium-Aluminium umfasst, eine durch Kathodenzerstäubung abgeschiedene Schicht ist.
     
    8. Spiegel nach einem der vorhergehenden Ansprüche, wobei die erste dielektrische Schicht (101) Siliciumnitrid umfasst.
     
    9. Spiegel nach einem der vorhergehenden Ansprüche, wobei die zweite dielektrische Schicht (104) Siliciumnitrid umfasst.
     
    10. Spiegel nach einem der vorhergehenden Ansprüche, wobei die zweite dielektrische Schicht (104) zwischen der Schicht (105), die Zirconiumdioxid umfasst, und der Schicht (102), die Silicium-Aluminium umfasst, angeordnet ist und mit diesen in direktem Kontakt steht.
     
    11. Spiegel nach einem der vorhergehenden Ansprüche, ferner umfassend einen polymerhaltigen Film (108), wobei die zweite dielektrische Schicht (104) zwischen mindestens der Schicht (102), die Silicium-Aluminium umfasst, und dem polymerhaltigen Film (108) angeordnet ist.
     
    12. Spiegel nach einem der vorhergehenden Ansprüche, wobei der Spiegel ein erster Oberflächenspiegel ist.
     
    13. Spiegel nach einem der Ansprüche 1 bis 11, wobei der Spiegel ein zweiter Oberflächenspiegel ist.
     
    14. Spiegel nach einem der vorhergehenden Ansprüche, wobei die erste dielektrische Schicht (101) und/oder die zweite dielektrische Schicht (104) Siliciumoxynitrid umfasst.
     
    15. Spiegel nach einem der Ansprüche 1 bis 13, wobei die erste dielektrische Schicht (101) und/oder die zweite dielektrische Schicht (104) Siliciumoxid umfasst.
     


    Revendications

    1. Miroir comprenant:

    - un substrat en verre (100);

    - une couche réfléchissante métallique ou sensiblement métallique (102) comprenant du silicium-aluminium disposé sur le substrat en verre (100);

    - la couche réfléchissante métallique ou sensiblement métallique (102) comprenant du silicium-aluminium se trouvant entre au moins des première (101) et seconde (104) couches diélectriques, la première couche diélectrique (101) se trouvant entre au moins le substrat en verre (100) et la couche réfléchissante métallique ou sensiblement métallique (102) comprenant du silicium-aluminium;
    dans lequel la couche (102) comprenant du silicium-aluminium comprend, sur une base pondérale, plus de silicium que d'aluminium; et

    - une couche protectrice (105) comprenant de l'oxyde de zirconium sur le substrat en verre (100) sur la couche réfléchissante (102) et sur les première (101) et seconde (104) couches diélectriques.


     
    2. Miroir selon la revendication 1, dans lequel la couche (102) comprenant du silicium-aluminium se compose essentiellement de silicium-aluminium.
     
    3. Miroir selon l'une quelconque des revendications précédentes, dans lequel la couche (102) comprenant du silicium-aluminium comprend, sur une base pondérale, de 75 à 99% de silicium et de 1 à 25% d'aluminium et de préférence de 85 à 98% de silicium et de 2 à 15% d'aluminium.
     
    4. Miroir selon l'une quelconque des revendications précédentes, dans lequel la couche réfléchissante métallique ou sensiblement métallique (102) comprenant du silicium-aluminium est directement en contact avec chacune des première (101) et seconde (104) couches diélectriques.
     
    5. Miroir selon l'une quelconque des revendications précédentes, dans lequel la couche comprenant du silicium-aluminium présente une épaisseur allant de 100 à 500Å et de préférence allant de 130 à 300Å.
     
    6. Miroir selon l'une quelconque des revendications précédentes, dans lequel le miroir présente une transmission visible allant d'environ 5 à 36% et de préférence allant d'environ 10 à 34%.
     
    7. Miroir selon l'une quelconque des revendications précédentes, dans lequel la couche (102) comprenant du silicium-aluminium est une couche déposée par pulvérisation.
     
    8. Miroir selon l'une quelconque des revendications précédentes, dans lequel la première couche diélectrique (101) comprend du nitrure de silicium.
     
    9. Miroir selon l'une quelconque des revendications précédentes, dans lequel la seconde couche diélectrique (104) comprend du nitrure de silicium.
     
    10. Miroir selon l'une quelconque des revendications précédentes, dans lequel la seconde couche diélectrique (104) se trouve entre et en contact direct avec la couche (105) comprenant de l'oxyde de zirconium et la couche (102) comprenant du silicium-aluminium.
     
    11. Miroir selon l'une quelconque des revendications précédentes, comprenant en outre un film comprenant un polymère (108), la seconde couche diélectrique (104) se trouvant entre au moins la couche (102) comprenant du silicium-aluminium et le film comportant du polymère (108).
     
    12. Miroir selon l'une quelconque des revendications précédentes, dans lequel le miroir est un premier miroir de surface.
     
    13. Miroir selon l'une quelconque des revendications 1 à 11, dans lequel le miroir est un second miroir de surface.
     
    14. Miroir selon l'une quelconque des revendications précédentes, dans lequel la première couche diélectrique (101) et/ou la seconde couche diélectrique (104) comprend/comprennent de l'oxynitrure de silicium.
     
    15. Miroir selon l'une quelconque des revendications 1 à 13, dans lequel la première couche diélectrique (101) et/ou la seconde couche diélectrique (104) comprend de l'oxyde de silicium.
     




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    Cited references

    REFERENCES CITED IN THE DESCRIPTION



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    Patent documents cited in the description