(19)
(11)EP 3 037 569 B1

(12)EUROPEAN PATENT SPECIFICATION

(45)Mention of the grant of the patent:
18.04.2018 Bulletin 2018/16

(21)Application number: 13890707.6

(22)Date of filing:  13.08.2013
(51)International Patent Classification (IPC): 
C23C 16/448(2006.01)
C23C 16/30(2006.01)
C23C 16/44(2006.01)
C23C 16/06(2006.01)
C01G 39/06(2006.01)
C23C 16/455(2006.01)
(86)International application number:
PCT/KR2013/007299
(87)International publication number:
WO 2015/016412 (05.02.2015 Gazette  2015/05)

(54)

MOS2 THIN FILM AND METHOD FOR MANUFACTURING SAME

MOS2-DÜNNSCHICHT UND VERFAHREN ZUR HERSTELLUNG DAVON

COUCHE MINCE DE MOS2 ET PROCÉDÉ DE FABRICATION DE CELLE-CI


(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30)Priority: 31.07.2013 KR 20130090880

(43)Date of publication of application:
29.06.2016 Bulletin 2016/26

(73)Proprietor: Konkuk University Industrial Cooperation Corp.
Seoul 143-701 (KR)

(72)Inventor:
  • MIN, Yo-Sep
    Gwangju-si Gyeonggi-do 464-804 (KR)

(74)Representative: V.O. 
P.O. Box 87930
2508 DH Den Haag
2508 DH Den Haag (NL)


(56)References cited: : 
EP-B1- 1 825 021
WO-A2-2011/056519
KR-B1- 100 809 000
WO-A2-2008/140578
KR-A- 20120 058 723
US-A1- 2004 033 699
  
  • YONGJIE ZHAN ET AL: "Large-Area Vapor-Phase Growth and Characterization of MoS 2 Atomic Layers on a SiO 2 Substrate", SMALL, vol. 8, no. 7, 15 February 2012 (2012-02-15), pages 966-971, XP055325441, DE ISSN: 1613-6810, DOI: 10.1002/smll.201102654
  • SCHARF T W ET AL: "Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS", ACTA MATERIALIA, ELSEVIER, OXFORD, GB, vol. 54, no. 18, 7 September 2006 (2006-09-07), pages 4731-4743, XP027889496, ISSN: 1359-6454 [retrieved on 2006-10-01]
  
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).


Description

[Technical Field]



[0001] The present disclosure relates to a MoS2 thin film and method for manufacturing the same.

[Background Art]



[0002] Transition metal chalcogenides have layered structures similar to that of graphite. In particular, MoS2 is drawing attentions as a semiconductor active layer for a transistor that can replace graphene and as a hydrogen evolution reaction catalyst that can replace platinum. Also, MoS2 is being studied as an electrode material of a lithium-ion battery because it has a layered structure allowing easy intercalation and extraction of lithium ions [Chhowalla, M. et al., Nature Chemistry 2013, 5, 263-275].

[0003] YONGJIE ZHAN ET AL: "Large-Area Vapor-Phase Growth and Characterization of MoS 2 Atomic Layers on a SiO 2 Substrate", SMALL, vol. 8, no. 7, 15 February 2012 (2012-02-15), pages 966-971, XP055325441, DE ISSN: 1613-6810, DOI: 10.1002/ smll.201102654 discloses a method for sequential deposition of MoS2 films. A bulk MoS2 single crystal has an indirect band gap of 1.3 eV unlike graphene and has a superior mobility of 50-200 cm2/Vs at room temperature. Since it has a direct band gap of 1.8 eV when the thickness decreases to the scale of a single atomic layer, researches are actively carried out to make it into a thin film for use as an active layer of a transistor [Wang, Q. H. et al., Nature Nanotechnology 2012, 7, 699-712]. Most recently, it has been known that a thin film prepared from monolayer, bilayer or multilayer MoS2 has a mobility close to that of bulk MoS2.

[0004] As methods for manufacturing MoS2 thin films, exfoliation of detaching an atomic layer from a MoS2 single crystal and chemical vapor deposition of depositing MoS2 on, e.g., a substrate at high temperature using Mo (or MoO3) and sulfur as precursors are being studied. However, these methods are inapplicable to large-scale production processes (particularly, semiconductor processes). In addition, the chemical vapor deposition method is limited in that it is difficult to control the number of atomic layers.

[0005] MIT's Wang, H. et al. reported in IEEE Tech. Dig. IEDM, 88-91 (2012) (non-patent document 1) that a MoS2 atomic layer for a transistor prepared at 650 ºC using MoO3 and S (elemental sulfur) as precursors has a mobility of approximately 190 cm2/Vs. However, because the precursors used are solids and have very low vapor pressures, the chemical vapor deposition method is not applicable to large-scale production due to contamination of equipment such as a vacuum chamber.

[0006] Although the atomic layer deposition method (ALD) of growing a thin film trough chemical adsorption of precursors is the best suited method for growing atomic layers, it is not utilized for the growth of thin film or monolayer of layered transition metal sulfides such as MoS2. In the atomic layer deposition method, atomic layers are formed from chemical adsorption between the precursors and surface functional groups. A thin film is formed by chemically adsorbing two different precursors alternatingly. In general, the atomic layer deposition method using two precursors consists of cycles each consisting of adsorption of a first precursor and purging and adsorption of a second precursor and purging. The thickness of the thin film can be controlled in the scale of atomic layers by controlling the number of cycle.

[0007] Although it is expected that a thin film of MoS2 can be formed by the atomic layer deposition method because it consists of only two elements of Mo (molybdenum) and S (sulfur), the growth of MoS2 thin film by the atomic layer deposition method has not been reported yet due to the absence of a suitable precursor. In particular, although MoF6, MoCl6, Mo(CO)6, etc. are known as Mo precursors, no suitable sulfur precursor has been designed. Although use of H2S as the sulfur precursor may be considered as H2O is used as an oxygen precursor, the H2S gas is not applicable to a large-scale production process due to its toxicity, corrosiveness and explosiveness.

[Disclosure]


[Technical Problem]



[0008] The present disclosure is directed to providing a method for manufacturing a MoS2 film according to claim 1. In particular, it is directed to providing a sulfur precursor for forming the MoS2 thin film by an atomic layer deposition method, which is neither a solid nor a toxic gas. Therefore, the present disclosure is directed to providing a method for manufacturing a MoS2 thin film, which can be applied for an industrial process with high efficiency and can form the MoS2 thin film without contaminating the manufacturing equipment. The present disclosure is also directed to providing a method for manufacturing a MoS2 thin film whose thickness is controllable.

[Technical Solution]



[0009] In an aspect, the present disclosure provides a MoS2 thin film which is formed from a molybdenum precursor and a sulfur precursor and grown by an atomic layer deposition method.

[0010] In another aspect, the present disclosure provides a method for manufacturing a MoS2 thin film, including:
  1. 1) a step of forming a chemical functional group layer containing Mo on a substrate by supplying a molybdenum precursor into a reactor in vacuum state;
  2. 2) a step of removing an excess molybdenum precursor that has not formed the chemical functional group layer containing Mo and a byproduct by supplying an inert gas into the reactor after the step 1);
  3. 3) a step of forming a MoS2 atomic layer by chemically adsorbing a sulfur precursor on the chemical functional group layer containing Mo by supplying the sulfur precursor into the reactor; and
  4. 4) a step of removing a sulfur precursor that has not been adsorbed in the step 3) and a byproduct by supplying an inert gas into the reactor after the step 3).

[Advantageous Effects]



[0011] The present disclosure provides a MoS2 thin film and a method for manufacturing the same using an atomic layer deposition method. In particular, the present disclosure is eco-friendly because the MoS2 thin film is manufactured by an atomic layer deposition method without using a toxic gas such as H2S as a sulfur precursor. Furthermore, it is possible to prevent the damage and contamination of manufacturing equipment during the manufacturing process. In addition, it is possible to manufacture the MoS2 thin film by precisely controlling the thickness of the MoS2 thin film to the level of an atomic layer.

[Brief Description of Drawings]



[0012] 

Fig. 1 schematically shows a process of manufacturing a MoS2 thin film by an atomic layer deposition method using Mo(CO)6 and dimethyl disulfide according to an exemplary embodiment of the present disclosure.

Fig. 2 shows the Raman spectrum of a MoS2 thin film manufactured according to the present disclosure.

Fig. 3a shows the thickness of a MoS2 thin film manufactured by an atomic layer deposition method using Mo(CO)6 and dimethyl disulfide during 100 cycles as a function of deposition temperature.

Fig. 3b shows the growth rate of a MoO3 thin film manufactured by an atomic layer deposition method using Mo(CO)6 as a Mo precursor and a mixture gas of O3 and H2O as an oxygen precursor as a function of deposition temperature (Diskus, M. et al., J. Mater. Chem. 2011, 21, 705-710).

Fig. 4a shows the thickness of a thin film manufactured by an atomic layer deposition method using Mo(CO)6 and dimethyl disulfide as a function of Mo(CO)6 supply time.

Fig. 4b shows the thickness of a thin film manufactured by an atomic layer deposition method using Mo(CO)6 and dimethyl disulfide as a function of dimethyl disulfide supply time.

Fig. 5 shows the linear increase of the thickness of a thin film manufactured by an atomic layer deposition method using Mo(CO)6 and dimethyl disulfide as a function of cycle number.

Fig. 6 shows the improvement of the crystallinity of a MoS2 thin film grown by an atomic layer deposition method after heat treatment.


[Best Mode]



[0013] The inventors of the present disclosure have researched to find a sulfur precursor capable of providing a MoS2 thin film with a controllable thickness by an atomic layer deposition method, which is neither a solid nor a toxic gas. As a result, they have found out the MoS2 thin film and the method for manufacturing the same according to the present disclosure.

[0014] Specifically, the MoS2 thin film according to the present disclosure is formed from a molybdenum precursor and a sulfur precursor and is grown by an atomic layer deposition method.

[0015] The MoS2 is well known as a layered transition metal sulfide. In the present disclosure, because the MoS2 is grown by an atomic layer deposition method, the thickness of the thin film of the number of the MoS2 atomic layers can be controlled precisely in angstrom scale by controlling the number of deposition cycles. Accordingly, the MoS2 thin film may be formed as a monolayer by an atomic layer deposition method. When the MoS2 monolayer is formed by an atomic layer deposition method rather than by other deposition methods such as chemical vapor deposition, the MoS2 monolayer may be formed more conveniently at lower cost in an industrial process for producing the thin film. In addition, unlike the general chemical vapor deposition method, the MoS2 monolayer can be formed uniformly on a large area by the atomic layer deposition method.

[0016] Specifically, when forming the MoS2 thin film, the sulfur precursor may not be a toxic gas such as H2S. And, specifically, it may not be a solid such as sulfur for more appropriate application to a manufacturing process. That is to say, a sulfur precursor which does not emit a toxic gas and is not a solid may be used without particular limitation. Most specifically, a dialkyl disulfide or a dihalodisulfide which is liquid at room temperature may be used as the sulfur precursor for forming the MoS2 thin film. When a dialkyl disulfide or a dihalodisulfide is used as the sulfur precursor, the MoS2 thin film can be formed through a safe and eco-friendly manufacturing process because no toxic gas is used in the process. In addition, because the liquid precursors are easily evaporated at room temperature as compared to solid sulfur which has a low vapor pressure, superior manufacturing efficiency can be achieved as the damage to the manufacturing equipment can be prevented.

[0017] In general, when a thin film is deposited by an atomic layer deposition method, a temperature range occurs wherein the deposition rate does not change with the deposition temperature. This is called the ALD temperature window. This temperature range usually occurs at 400 ºC or lower although there may be differences depending on the precursors used.

[0018] As a specific example, when a MoS2 thin film is deposited by an atomic layer deposition method using dimethyl disulfide as the sulfur precursor and Mo(CO)6 as a Mo precursor, the ALD temperature window occurs at 100-120 ºC (Fig. 3a).

[0019] When the deposition temperature during the atomic layer deposition is below 100 ºC, the thickness of the thin film decreases because the precursors are not chemically adsorbed satisfactorily. And, when the deposition temperature during the atomic layer deposition is higher than 120 ºC, the thickness of the thin film increases rapidly due to thermal decomposition of the molybdenum precursor.

[0020] In the present disclosure, the molybdenum precursor is not particularly limited as long as it is one that contains molybdenum and is useable as a precursor. Specifically, it may be one or more selected from a group consisting of Mo(CO)6, MoF6 and MoCl6.

[0021] As described above, the MoS2 thin film according to the present disclosure is formed by an atomic layer deposition method. During the deposition, chemical functional groups containing Mo are formed on the surface of a substrate through chemical adsorption as the molybdenum precursor is deposited. Then, the surface is saturated with chemical functional groups containing sulfur as the sulfur precursor is chemically adsorbed. As the adsorption reactions are repeated, MoS2 is grown by an ALD process.

[0022] The Raman spectrum of the MoS2 thin film obtained using a 532-nm laser has peaks observed at 375-385 cm-1 and 400-410 cm-1, as shown in Fig. 2.

[0023] The MoS2 thin film may be used as a semiconductor active layer thin film of a transistor, as a catalyst for hydrogen evolution reaction, or as an electrode material of a lithium-ion battery.

[0024] The present disclosure also provides a method for manufacturing a MoS2 thin film, including:
  1. 1) a step of forming a chemical functional group layer containing Mo on a substrate by supplying a molybdenum precursor into a reactor in vacuum state;
  2. 2) a step of removing an excess molybdenum precursor that has not formed the chemical functional group layer containing Mo and a byproduct by supplying an inert gas into the reactor after the step 1);
  3. 3) a step of forming a MoS2 atomic layer by chemically adsorbing a sulfur precursor on the chemical functional group layer containing Mo by supplying the sulfur precursor into the reactor; and
  4. 4) a step of removing a sulfur precursor that has not been adsorbed in the step 3) and a byproduct by supplying an inert gas into the reactor after the step 3).


[0025] Specifically, the sulfur precursor in the step 2) may be a dialkyl disulfide or a dihalodisulfide.

[0026] The substrate in the step 1) is not particularly limited as long as it is one that can be used for atomic layer deposition and has thermal stability in the ALD temperature window. Specifically, one or more selected from a group consisting of a wafer such as Si, sapphire, etc., glass, a polymer film, an alumina or silica powder/support, etc. may be used.

[0027] The molybdenum precursor in the step 1) is not particularly limited as long as it is one that contains molybdenum and is useable as a precursor. Specifically, it may be one or more selected from a group consisting of Mo(CO)6, MoF6 and MoCl6.

[0028] The reactor in the step 1) is not particularly limited as long as it is one that can be used for atomic layer deposition.

[0029] When supplying the molybdenum precursor in the step 1), the supply pressure is not particularly limited as long as the chemical functional group layer containing Mo is formed and the MoS2 thin film is formed by the chemical adsorption of the sulfur precursor in the step 3). Specifically, the supply pressure may be 0.1-10 Torr. When the molybdenum precursor has a low vapor pressure, it may be supplied by using an inert gas such as nitrogen as a carrier gas. When the supply pressure of the molybdenum precursor is lower than 0.1 Torr, the chemical functional group layer containing Mo may not be formed sufficiently. And, when the supply pressure of the molybdenum precursor is higher than 10 Torr, it is economically undesirable because excess molybdenum precursor is supplied.

[0030] The inert gas supplied in the step 2) or in the step 4) is not particularly limited as long as it is an element in the group 18 of the periodic table or a gas that can safely remove the excess molybdenum precursor or sulfur precursor through purging. As specific examples, nitrogen (N2), argon (Ar), etc. can be used. Alternatively, without using an additional purging gas, the step 2) and the step 4) may be replaced by a vacuum purging step of removing the excess precursors and the byproduct in vacuo. In the step 2) or the step 4), the supply pressure of the inert gas is not particularly limited as long as the amount of the inert gas is sufficient to remove the molybdenum precursor that has not formed the chemical functional group layer containing Mo in the step 1) or the sulfur precursor that has not been chemically adsorbed in the step 3). Specifically, it may be supplied at a pressure of 0.5-5 Torr.

[0031] Specifically, the sulfur precursor in the step 3) may be a dialkyl disulfide or a dihalodisulfide. When a dialkyl disulfide or a dihalodisulfide is used as the sulfur precursor, the MoS2 thin film can be manufactured through a safe and eco-friendly manufacturing process.

[0032] The chemical adsorption of the sulfur precursor on the chemical functional group layer containing Mo in the step 3) is accomplished by atomic layer deposition. Specifically, chemical functional groups containing Mo are formed on the surface of the substrate through chemical adsorption as the molybdenum precursor is deposited. Then, the surface is saturated with chemical functional groups containing sulfur as the sulfur precursor is chemically adsorbed. As the adsorption reactions are repeated, MoS2 is grown by an ALD process.

[0033] When supplying the sulfur precursor in the step 3), the supply pressure is not particularly limited as long as chemical adsorption can occur on the chemical functional group layer containing Mo formed in the step 1). Specifically, the supply pressure may be 0.1-10 Torr. When the sulfur precursor has a low vapor pressure, it may be supplied by using an inert gas such as nitrogen as a carrier gas. When the supply pressure of the sulfur precursor is lower than 0.1 Torr, chemical adsorption may not occur sufficiently on the chemical functional group layer containing Mo. And, when the supply pressure of the sulfur precursor is higher than 10 Torr, it is economically undesirable because excess sulfur precursor will remain without being chemically adsorbed.

[0034] Specifically, the formation of the MoS2 thin film according to the present disclosure is accomplished in a temperature range corresponding to the ALD temperature window. At a temperature lower than the temperature range, the growth rate of the thin film is slow because the chemical adsorption of the precursors is insufficient and the thickness decreases. And, at a temperature higher than the temperature range, the thickness of the thin film increases rapidly due to thermal decomposition of the molybdenum precursor.

[0035] In the step 1), the molybdenum precursor should be supplied for a sufficient time such that the surface functional groups are saturated by the chemical adsorption of the molybdenum precursor. In a specific exemplary embodiment, when Mo(CO)6 and dimethyl disulfide are used, the supply time of Mo(CO)6 in the atomic layer deposition may be 3 seconds or longer, as shown in Fig. 4a.

[0036] And, in the step 3), the sulfur precursor should be supplied for a sufficient time such that the functional groups containing molybdenum prepared in the step 2) are saturated by the chemical adsorption of the sulfur precursor. In a specific exemplary embodiment, when Mo(CO)6 and dimethyl disulfide are used, the supply time of dimethyl disulfide in the atomic layer deposition may be 0.5-5 seconds, as shown in Fig. 4b.

[0037] Specifically, in the step 4), the sulfur precursor that has not been adsorbed in the step 3) and the byproduct may be removed by supplying the inert gas.

[0038] The steps 1) through 4) may be repeated. As the steps 1) through 4) are repeated, the thickness of the MoS2 thin film is increased as shown in Fig. 5. Because the thickness of the MoS2 thin film is determined by the repeat number of the steps 1) through 4), the thickness of the MoS2 thin film can be controlled precisely. Accordingly, the thickness of the MoS2 thin film or the number of the MoS2 atomic layers can be controlled precisely in angstrom scale by controlling the number of deposition cycles.

[0039] After repeating the steps 1) through 4), a heat treatment step may be further included to improve the crystallinity of the thin film. Specifically, the heat treatment may be performed at 400-1,000 ºC. When the heat treatment temperature is below 400 ºC, crystallization does not occur. And, when the heat treatment is higher than 1,000 ºC, molybdenum and sulfur may undesirably diffuse to the lower film.

[0040] The Raman spectrum of the MoS2 thin film manufactured according to the present disclosure has peaks observed at 375-385 cm-1 and 400-410 cm-1.

[0041] The manufactured MoS2 thin film may be utilized as a semiconductor active layer thin film of a transistor, as a catalyst for hydrogen evolution reaction, or as an electrode material of a lithium-ion battery.

[0042] Because the MoS2 thin film is formed by an atomic layer deposition method in the method for preparing a MoS2 thin film according to the present disclosure, the MoS2 thin film may be formed as a monolayer. If MoS2 is formed as a monolayer by atomic layer deposition, the number of the layers can be controlled precisely by controlling the number of cycles. Accordingly, uniform monolayer MoS2 can be provided on a large area regardless of the size of the substrate.

[0043] As described above, when a MoS2 thin film is prepared by the method for manufacturing a MoS2 thin film according to the present disclosure, the MoS2 thin film may be provided by a safe and eco-friendly atomic layer deposition method and its thickness and the number of atomic layers may be controlled precisely by controlling the number of cycles.

[Mode for Invention]



[0044] Hereinafter, the present disclosure will be described in detail through examples. However, the following examples are for illustrative purposes only and it will be apparent to those of ordinary skill in the art that the scope of the present disclosure is not limited by the examples.

Example



[0045] Molybdenum hexacarbonyl (Mo(CO)6, Aldrich) was prepared as a molybdenum precursor for atomic layer deposition. And, dimethyl disulfide (CH3S2CH3, Aldrich) was prepared as a sulfur precursor. High-purity nitrogen (N2, 99.999%) was prepared as a purging gas. And, a SiO2 (300 nm)/Si wafer was prepared as a substrate.

[0046] The molybdenum hexacarbonyl (Mo(CO)6) was supplied into a reactor containing the Si wafer in vacuum state using high-purity nitrogen as a carrier gas. The pressure inside the reactor was maintained at about 1.43 Torr. The molybdenum precursor supply time was 1 second, 2 seconds, 3 seconds, 4 seconds and 5 seconds, respectively. The high-purity nitrogen (N2) was supplied at a pressure of 1.75 Torr as a purging gas to remove excess molybdenum hexacarbonyl (Mo(CO)6) and a byproduct. After the purging process using nitrogen, the dimethyl disulfide was supplied into the reactor at a pressure of 1.1 Torr. The sulfur precursor supply time was 0.5 second, 1 second, 1.5 seconds and 2 seconds, respectively. Then, the excess sulfur precursor remaining unreacted was removed by supplying the high-purity nitrogen at a pressure of 1.75 Torr. During these processes, the temperature inside the reactor was maintained constant at 60, 80, 90, 95, 100, 110, 120 and 140 ºC, respectively.

[0047] This procedure is schematically shown in Fig. 1. A MoS2 thin film was manufactured by repeating this procedure. The thickness of the thin films manufactured by performing 100 cycles at different deposition temperatures is shown in Fig. 3a.

[0048] The sample grown through this procedure was put in a chamber equipped with a lamp heater and heat-treated at 485 ºC for 2 hours.

Comparative Example



[0049] A MoO3 thin film was manufactured in the same manner as in Example, except that ozone (O3) was used instead of the sulfur precursor.

Test Example


<Test Example 1: Measurement of Raman spectrum>



[0050] The Raman spectrum of the MoS2 thin film manufactured in Example was measured using a 532-nm laser. The result is shown in Fig. 2.

[0051] As can be seen from Fig. 2, the in-plane vibration and out-of-plane vibration peaks of MoS2 were observed at 381.14 cm-1 and 406.96 cm-1, respectively. Through this, it was confirmed that the MoS2 thin film manufactured in Example corresponds to MoS2 (2H phase).

<Test Example 2: Comparison of effect of deposition temperature>



[0052] The thickness of the thin films of Example and Comparative Example manufactured at different deposition temperatures of 50-150 ºC was observed. The result is shown in Figs. 3a and 3b.

[0053] As can be seen from the figures, the MoS2 thin films of Example (Fig. 3a) showed an ALD temperature window of 100-120 ºC where the thickness of the thin film is maintained constant without significant change despite the change in temperature. In contrast, the MoO3 thin films of Comparative Example (Fig. 3b) showed a different ALD temperature window of 157-172 ºC. That is to say, it was also found out that the ALD temperature window is formed at a higher temperature range in Comparative Example than in Example.

[0054] In addition, a result of monitoring the change in film thickness as a function of the supply time of the molybdenum precursor and the sulfur precursor during 100 cycles is shown in Figs. 4a and 4b. For the molybdenum precursor which forms a Mo layer (Fig. 4a), the film thickness increased consistently until 3 seconds and then remained constant without significant change thereafter. In contrast, for the sulfur precursor (Fig. 4b), which is liquid at room temperature but has good volatility, it was saturated through chemical adsorption in very short supply time.

[0055] The thickness of the MoS2 thin film of Example can be controlled in atomic layer scale because it is formed through repeated cycles. As seen from Fig. 5, the thickness increases linearly with the cycle number and, therefore, a thin film with desired thickness can be manufactured as desired. That is to say, the thickness of the MoS2 thin film of Example can be controlled by controlling the cycle number during the manufacturing process.

<Test Example 3: Comparison of effect of heat treatment



[0056] It was investigated whether the crystallinity of the MoS2 thin film of Example can be improved through heat treatment. The manufactured sample was put in a chamber equipped with a lamp heater and heat-treated at 485 ºC for 2 hours. The result is shown in Fig. 6.

[0057] As can be seen from Fig. 6, the MoS2 (002) peak appeared prominently after the heat treatment. The peak was not observed before the heat treatment because of poor crystallinity. Accordingly, it is desired that heat treatment be conducted. Specifically, the heat treatment may be conducted at 400-1,000 ºC.

[0058] Those skilled in the art will appreciate that the conceptions and specific embodiments disclosed in the foregoing description may be readily utilized as a basis for modifying or designing other embodiments for carrying out the same purposes of the present disclosure. Those skilled in the art will also appreciate that such equivalent embodiments do not depart from the scope of the disclosure as set forth in the appended claims.


Claims

1. A method for manufacturing a MoS2 thin film, comprising:

1) forming a chemical functional group layer comprising Mo on a substrate by supplying a molybdenum precursor into a reactor in vacuum state;

2) removing an excess molybdenum precursor that has not formed the chemical functional group layer comprising Mo and a byproduct by supplying an inert gas into the reactor after 1);

3) forming a MoS2 atomic layer by chemically adsorbing a sulfur precursor on the chemical functional group layer comprising Mo by supplying the sulfur precursor into the reactor; and

4) removing a sulfur precursor that has not been adsorbed in 3) and a byproduct by supplying an inert gas into the reactor after 3),

wherein the molybdenum precursor is Mo(CO)6 and the sulfur precursor is dimethyl disulfide and wherein the ALD temperature window of the atomic layer deposition in 3) is 100-120 °C.
 
2. The method for manufacturing a MoS2 thin film according to claim 1, wherein, in 1), the molybdenum precursor is supplied at a pressure of 0.1-10 Torr.
 
3. The method for manufacturing a MoS2 thin film according to claim 1, wherein, in 3), the sulfur precursor is supplied at a pressure of 0.1-10 Torr.
 
4. The method for manufacturing a MoS2 thin film according to claim 1, which further comprises heat treatment at 400-1,000 °C after repeating 1) through 4).
 


Ansprüche

1. Verfahren zur Herstellung eines MoS2-Dünnfilms, umfassend:

1) Bilden einer Schicht chemisch funktioneller Gruppe, umfassend Mo auf einem Substrat, durch Zuführen eines Molybdänvorläufers in einen Reaktor im Vakuumzustand;

2) Entfernen eines überschüssigen Molybdän vorläufers, der die Schicht chemisch funktioneller Gruppe, umfassend Mo und ein Nebenprodukt, durch Zuführen eines Inertgases in den Reaktor nach 1) nicht gebildet hat;

3) Bilden einer MoS2-Atomschicht durch chemisches Adsorbieren eines Schwefelvorläufers auf der Schicht chemisch funktioneller Gruppe, umfassend Mo, durch Zuführen des Schwefelvorläufers in den Reaktor; und

4) Entfernen eines Schwefelvorläufers, der in 3) nicht adsorbiert wurde, und eines Nebenprodukts durch Zuführen eines Inertgases in den Reaktor nach 3),

wobei der Molybdänvorläufer Mo(CO)6 ist und der Schwefelvorläufer Dimethyldisulfid ist und wobei das ALD (engl. atomic layer deposition) - Temperaturfenster der Atomschichtabscheidung in 3) 100-120° ist.
 
2. Verfahren zur Herstellung eines MoS2-Dünnfilms nach Anspruch 1, wobei in 1) der Molybdänvorläufer bei einem Druck von 0,1-10 Torr zugeführt wird.
 
3. Verfahren zur Herstellung eines MoS2-Dünnfilms nach Anspruch 1, wobei in 3) der Schwefelvorläufer bei einem Druck von 0,1-10 Torr zugeführt wird.
 
4. Verfahren zur Herstellung eines MoS2-Dünnfilms nach Anspruch 1, das ferner Wärmebehandlung bei 400-1.000°C nach Wiederholen von 1) bis 4) umfasst.
 


Revendications

1. Procédé de fabrication d'un film mince de disulfure de molybdène MoS2, comportant les étapes suivantes :

1) former, sur un substrat, une couche à groupes fonctionnels chimiques qui comprend du molybdène, en envoyant un précurseur de molybdène dans un réacteur sous vide ;

2) éliminer l'excès de précurseur de molybdène, qui n'a pas servi à former la couche à groupes fonctionnels chimiques qui comprend du molybdène, et tout sous-produit, en faisant passer dans le réacteur, après l'étape (1), un gaz inerte ;

3) former une couche atomique de MoS2, en envoyant dans le réacteur un précurseur de soufre, lequel précurseur de soufre s'adsorbe chimiquement sur la couche à groupes fonctionnels chimiques qui comprend du molybdène,

4) et éliminer le précurseur de soufre qui ne s'est pas adsorbé dans l'étape (3) et tout sous-produit, en faisant passer dans le réacteur, après l'étape (3), un gaz inerte ;

dans lequel le précurseur de molybdène est le molybdène-hexacarbonyle Mo(CO)6 et le précurseur de soufre est le disulfure de diméthyle, et l'intervalle de température, lors du dépôt de couche atomique dans l'étape (3), est celui qui va de 100 à 120 °C.
 
2. Procédé, conforme à la revendication 1, de fabrication d'un film mince de disulfure de molybdène MoS2, dans lequel, dans l'étape (1), le précurseur de molybdène est introduit sous une pression de 0,1 à 10 torrs.
 
3. Procédé, conforme à la revendication 1, de fabrication d'un film mince de disulfure de molybdène MoS2, dans lequel, dans l'étape (3), le précurseur de soufre est introduit sous une pression de 0,1 à 10 torrs.
 
4. Procédé, conforme à la revendication 1, de fabrication d'un film mince de disulfure de molybdène MoS2, qui comporte en outre un traitement thermique mené à une température de 400 à 1000 °C, après répétition(s) des étapes (1) à (4).
 




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Cited references

REFERENCES CITED IN THE DESCRIPTION



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Non-patent literature cited in the description