(19)
(11)EP 3 244 215 A1

(12)EUROPEAN PATENT APPLICATION
published in accordance with Art. 153(4) EPC

(43)Date of publication:
15.11.2017 Bulletin 2017/46

(21)Application number: 15877224.4

(22)Date of filing:  10.07.2015
(51)Int. Cl.: 
G01Q 30/20  (2010.01)
(86)International application number:
PCT/KZ2015/000010
(87)International publication number:
WO 2016/111608 (14.07.2016 Gazette  2016/28)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA

(30)Priority: 05.01.2015 KZ 20150001

(71)Applicant: Private Institution "Nazarbayev University
Astana 010000 (KZ)

(72)Inventors:
  • ALEKSEEV, Alexandr Mihaylovich
    Astana 010016 (KZ)
  • VOLKOV, Aleksey Dmitriyevich
    Astana 010016 (KZ)
  • SOKOLOV, Dmitry Yuryevich
    Moscow 124489 (KZ)
  • EFIMOV, Anton Evgeniyevich
    Moscow 117342 (RU)

(74)Representative: Koudine, Andreï 
ADELENYS s.a.s. 37, rue d'Amsterdam
75008 Paris
75008 Paris (FR)

  


(54)SCANNING PROBE MICROSCOPE COMBINED WITH A DEVICE FOR MODIFYING THE SURFACE OF AN OBJECT


(57) The scanning probe microscope combined with a device for modifying the surface of an object relates to measuring devices, particularly devices for monitoring objects using probes after nano-cutting and for investigating the structures of macro and micro-carriers under low temperature conditions.
The object of the invention is to expand the functional capabilities of the scanning probe microscope combined with a device for modification of the object surface.
Technical result of the invention is increased image quality.
The essence of the invention is resumed like that: a scanning probe microscope combined with a device for modification of the object surface comprising a foundation 1, onto which a punch module 2 with a punch 3 having a first cutting edge 4 and an adjacent first surface 5, said punch module 2 having a first drive 8 at a first X-axis point and a second drive 9 at a second Y-axis point, also comprising a platform 10 installed on the foundation 1, movable along a third Z-axis point and coupled with a third drive 11 at the third Z-axis point, said point being orthogonal to the plane of XY axes points, also comprising a piezo-scanner 15 movable along the X,Y and Z axes points with a holder 16 with an object carrier 17 containing an object 18, said piezo-scanner 15 fastened to the platform 10, and the punch 3 arranged so as to be able to interact with the object 18, also comprising a probe unit 25 with a probe holder 26 to which a probe 27 is fastened, said probe unit 25 fastened to the platform 10 and movable along the first X-axis point and coupled with a fourth drive 30 at the first X-axis point, while the probe 27 is able to interact with the object 18, said microscope includes a first module for mechanical action 35, fastened to the platform 10 so as to be able to interact with the punch 3. There are following options of arrangement of its components:
• option 1 - the first module for mechanical action is installed so as to be able to interact with the first cutting edge of the punch;
• option 2 - the first module for mechanical action is installed so as to be able to interact with the first surface of the punch;
• option 3 - the first module for mechanical action is installed so as to be able to interact with the first cutting edge and the first surface of the punch;
• option 4 - at least one second module for mechanical action is introduced, said module installed on the platform so as to be able to interact with an object module;
• option 5 - the second module for mechanical action is installed so as to be able to interact with the object;
• option 6 - the second module for mechanical action is installed so as to be able to interact with the object carrier;
• option 7 - the second module for mechanical action is made of flexible material and installed so as to be able to interact with the piezo-scanner;
• option 8 - the first module for mechanical action includes a first heating unit;
• option 9 - the first module for mechanical action includes a first piezo-module;
• option 10 - the first module for mechanical action includes a second cutting edge;
• option 11 - the first module for mechanical action includes a sharpened point;
• option 12 - the first module for mechanical action includes an area having a rough surface;
• option 13 - the second module for mechanical action includes a second heating unit.
• option 14 - the second module for mechanical action includes a second piezo-module.
• option 15 - it is introduced a piezo unit fastened to the probe unit, onto which a probe holder is installed.
• option 16 - the piezo-unit is arranged so as to be able to move along the first X-axis point and the third Z-axis point.
• option 17 - the piezo-unit is arranged so as to be able to move along the first X-axis point and the second Y-axis point.
• option 18 - the piezo-unit is arranged so as to be able to move along the first X-axis point, the second Y-axis point and the third Z-axis point.
• option 19 - the foundation with all components is placed in a cryo chamber.
Such arrangement improves a quality of the image quality and expands the functionality of the device.


Description


[0001] The scanning probe microscope combined with a device for modifying the surface of an object relates to measuring devices, particularly devices for monitoring objects using probes after nano-cutting and for investigating the structures of macro and micro-carriers under low temperature conditions.

[0002] A known example of prior art is a scanning probe microscope combined with a device for modifying the surface of an object comprising a foundation, onto which a punch module with a punch having a first cutting edge and an adjacent first surface, said punch module having a first drive at a first X-axis point and a second drive at a second Y-axis point, also comprising a platform installed on the foundation, movable along a third Z-axis point and coupled with a third drive at the third Z-axis point, said point being orthogonal to the plane of XY axes points, also comprising a piezo-scanner movable along the X,Y and Z axes points with a holder with an object carrier containing the object, said piezo-scanner fastened to the platform, and the punch arranged so as to be able to interact with the object, also comprising a probe unit to which a probe is fastened, said probe unit fastened to the patform and movable along the first X-axis point and coupled with the fourth drive at the first X-axis point, while the probe is able to interact with the object (Patent RU2389032. Scanning probe microscope combined with a device for modifying the surface of an object, May 10, 2010).

[0003] The drawback of the above device is that the piezo-scanner with the object is fastened to the platform which is flexibly installed on the foundation, while the probe unit with the probe is also installed on the foundation. Such arrangement creates a long mechanical "loop" between the object and the probe, comprising the piezo-scanner - the platform - the foundation - the probe unit. It increases mechanical noise level and lowers the accuracy of the probe measurement to impact the image quality.

[0004] Another example of prior art is a scanning probe microscope combined with a device for modifying the surface of an object, technical substance of said example being the nearest to the proposed technical solution, said microscope comprising a foundation, onto which a punch module with a punch having a first cutting edge and an adjacent first surface, said punch module having a first drive at a first X-axis point and a second drive at a second Y-axis point, also comprising a platform installed on the foundation, movable along a third Z-axis point and coupled with a third drive at the third Z-axis point, said point being orthogonal to the plane of XY axes points, also comprising a piezo-scanner movable along the X,Y and Z axes points with a holder with an object carrier containing the object, said piezo-scanner fastened to the platform, and the punch arranged so as to be able to interact with the object, also comprising a probe unit with a probe holder to which a probe is fastened, said probe unit fastened to the platform and movable along the third X-axis point and coupled with a fourth drive at the first X-axis point, while the probe is able to interact with the object (Application EP2482080. Scanning probe microscope combined with a device for modification of the object surface. January 31, 2011).

[0005] The above device serves to solve the problem described and reduce the mechanical "loop". The above device is assumed herein as a prototype of the claimed solution. Its principal drawback is a lack of real-time means of control over the punch, the object and the piezo-scanner which reduces the image quality.

[0006] The object of the invention is to expand the functional capabilities of the scanning probe microscope combined with a device for modification of the object surface.

[0007] Technical result of the invention is increased image quality.

[0008] The stated technical result is achieved by introduction of a first module for mechanical action fastened to the same platform and able to interact with the punch to the scanning probe microscope combined with a device for modification of the object surface comprising a foundation, onto which a punch module with a punch having a first cutting edge and an adjacent first surface, said punch module having a first drive at a first X-axis point and a second drive at a second Y-axis point, also comprising a platform installed on the foundation, movable along a third Z-axis point and coupled with a third drive at the third Z-axis point, said point being orthogonal to the plane of XY axes points, also comprising a piezo-scanner movable along the X,Y and Z axes points with a holder with an object carrier containing the object, said piezo-scanner fastened to the platform, and the punch arranged so as to be able to interact with the object, also comprising a probe unit with a probe holder to which a probe is fastened, said probe unit fastened to the platform and movable along the first X-axis point and coupled with a fourth drive at the first X-axis point, while the probe is able to interact with the object, with the following options of arrangement of the module components:
  • option 1 - the first module for mechanical action is installed so as to be able to interact with the first cutting edge of the punch;
  • option 2 - the first module for mechanical action is installed so as to be able to interact with the first surface of the punch;
  • option 3 - the first module for mechanical action is installed so as to be able to interact with the first cutting edge and the first surface of the punch;
  • option 4 - at least one second module for mechanical action is introduced, said module installed on the platform so as to be able to interact with an object module;
  • option 5 - the second module for mechanical action is installed so as to be able to interact with the object;
  • option 6 - the second module for mechanical action is installed so as to be able to interact with the object carrier;
  • option 7 - the second module for mechanical action is made of flexible material and installed so as to be able to interact with the piezo-scanner;
  • option 8 - the first module for mechanical action includes a first heating unit;
  • option 9 - the first module for mechanical action includes a first piezo-module;
  • option 10 - the first module for mechanical action includes a second cutting edge;
  • option 11 - the first module for mechanical action includes a sharpened point;
  • option 12 - the first module for mechanical action includes an area having a rough surface;
  • option 13 - the second module for mechanical action includes a second heating unit.
  • option 14 - the second module for mechanical action includes a second piezo-module.
  • option 15 - it is introduced a piezo unit fastened to the probe unit, onto which a probe holder is installed.
  • option 16 - the piezo-unit is arranged so as to be able to move along the first X-axis point and the third Z-axis point.
  • option 17 - the piezo-unit is arranged so as to be able to move along the first X-axis point and the second Y-axis point.
  • option 18 - the piezo-unit is arranged so as to be able to move along the first X-axis point, the second Y-axis point and the third Z-axis point.
  • option 19 - the foundation with all components is placed in a cryo chamber.


[0009] The essence of the invention is further illustrated by the following drawings: Figure 1 - a general view of the scanning probe microscope combined with a device for modification of the object surface; Figures 1-5 - options of a first module for mechanical action; Figure 6 - option of a second module for mechanical action; Figure 7 - option of piezo unit operation; Figure 8 - diagram showing the use of the scanning probe microscope combine with a device for modification of the object surface as part of a cryo microtome.

[0010] A scanning probe microscope combined with a device for modification of the object surface comprises a foundation 1, see Figure 1, onto which a punch module 2 with a punch 3 is fastened. The punch 3 comprises a first cutting edge 4 and an adjacent first surface 5 and a second surface 6. The punch module 2 comprises a first drive 8 at a first X-axis point and a second drive 9 at a second Y-axis point. The scanning probe microscope combined with the device for modification of the object surface also comprises a platform 10 installed on the foundation 1, movable along a third Z-axis point and coupled with a third drive 11, said third drive comprising a first push rod 12, at the third Z-axis point orthogonal to the plane of the XY axes points. The platform 10 is fastened to the foundation 1 by a hinge 13 and has a sampling unit 14. The scanning probe microscope combined with a device for modification of the object surface also comprises a piezo scanner 15, movable along the X, Y and Z axes points and having a holder 16 with an object carrier 17 containing an object 18 comprising a surface 19. Said piezo scanner is fastened to the platform 10 using an adapter 21, while the punch 3 is installed so as to be able to interact with the object 18. Components 15, 16, 17, 18, 21 are the module of the object 22. The object 18 can be fastened to the object carrier 17 using glue, for example, epoxy resin. The object carrier 17 can be fastened to the object holder 16 using a magnet. For this purpose, the holder 16 can be manufactured, for instance, from the samarium-cobalt alloy. An alternative is to include an insert made of the above alloy (not shown). The object carrier 17 can be made from nickel. The scanning probe microscope combined with the device for modification of the object surface also comprises a probe unit 25 with a probe holder 26 inside which a probe 27 is mounted, said probe unit 25 is installed on the platform 10, movable along the first X axis point and coupled with a fourth drive 30 at the first X-axis point via the second push rod 31, while the probe 27 is able to interact with the object 18. A quartz crystal resonator is generally used as the probe 27. The fourth drive 30 can be installed on the platform 10 and must ensure that the probe unit 25 is movable in two opposite directions along the X axis point thanks to the second push rod 31 being located in a first groove 32. An option of the invention involves the fourth drive 30 fastened to the foundation 1 and operationally coupled with the probe unit 25. This can be done by moving the platform along the Z axis and inserting and removing the second push rod 31 from the first groove (not shown). A first module for mechanical action 35 is introduced to the scanning probe microscope combined with the device for modification of the object surface as an independent feature, said module fastened to the platform 10 and able to interact with the punch 3.

[0011] Components 1, 2, 3, 10, 11, 12, 13 are standard components a micro cryotome described in /1,2,3,4/. Components 15, 16, 17, 18, 21, 22, 25, 26, 27, 30, 31, 32 are standard components of any scanning probe microscope and are described in /1,2/. The scanning probe microscope combined with a device for modification of the object surface operates as follows. The object carrier 17 containing the object 18 is fastened to the holder 16. The probe holder 26 containing the probe 27 is fastened to the probe unit 25. The platform 10 is lowered to the punch 3 using the third drive 11, and the object 18 is cut to form the surface 19 and the fragmented object 20. Following that, the platform 10 is raised to the topmost position using the drive 11. The probe 27 approaches the surface 19 of the object 18 using the fourth drive 30. Then the surface 19 is scanned relative to the probe 27 and the topography of the surface 19 is measured using a piezo-scanner 15. The components can be arranged as follows.

Option 1 - the module for mechanical action 35 is installed so as to be able to interact with the first cutting edge 4 of the punch 3. This option is executable where the first cutting edge 4 and the first module for mechanical action 35 are positioned in the same plane by moving the platform 10 along the Z axis point using the third drive 11. Then the first cutting edge 4 and the first module for mechanical action 35 are brought together using the first drive 8. When they interact, the cutting edge 4 can be modified to improve its quality and, consequently, to improve the quality of the section and the resulting image.

Option 2 - the module for mechanical action 35 is installed so as to be able to interact with the first surface 5 of the punch 3. This option is executable where the first cutting edge 4 and the first module for mechanical action 35 are positioned in the different planes by moving the platform 10 along the Z axis point using the third drive 11. Then the first surface 5 and the first module for mechanical action 35 are brought together using the first drive 8. When they interact, the first surface 5 can be modified to improve its quality and, consequently, to improve the quality of the section and the resulting image.

Option 3 - the module for mechanical action 35 is installed so as to be able to interact with the first cutting edge 4 and the first surface 5 of the punch 3. This option is executable where, for example, after the first surface 5 and the first module for mechanical action 35 are brought together, the platform 10 is moved along the Z axis point together with the punch 3 along the X axis point to carry out operational interaction of the first module for mechanical action 35 and the first cutting edge 4. This makes it easier to modify the cutting edge 4 and the first surface 5 of the punch at the same time.

Option 4 - at least one second module for mechanical action 37 is introduced and installed on the platform 10 so as to be able to interact with the object module 22. The first option involves fastening of the second module for mechanical action 37 between the piezo-scanner 15 and the punch 3 (bottom position). The second option involves fastening of the second module for mechanical action 37 at the opposite side of the piezo-scanner 15 relative to the punch 3 using an adapter (topmost position). Both the first and the second positional options can be utilized at the same time.

Option 5 - the second module for mechanical action 37 is installed so as to be able to interact with the object 18 by moving the same along the Z axis point and the X axis point. A possibility of interaction of the second module for mechanical action 37 with the object 18 in the second positional option allows to support the object 18 during cutting to improve the quality of the cut and the result image quality.

Option 6 - the second module for mechanical action 37 is installed so as to be able to interact with the object carrier 17 by moving the same along the Z axis point and the X axis point. The fact that the module for mechanical action 37 is installed so as to be able to interact with the object carrier 17 allows moving the same along the surface of the holder 16 to make it easier to find a required area on the surface 19 of the object 18. This solution also serves to make the device more reliable for the purpose of the second positional option of the second module for mechanical action 37 by ensuring that the piezo-scanner 15 remains intact during cutting of the object 18.

Option 7 - the second module for mechanical action 37 is made of elastic material and installed so as to be able to interact with the piezo-scanner 15 by moving the same along the Z axis point and the X axis point. Viton can be utilized as such elastic material. This solution makes it possible to adjust the quality factor of the piezo scanner 15 during scanning to improve the image quality.

Option 8 - the first module for mechanical action 35 includes a first heating unit 40, see Figure 2. An Atos microheater [5] or a Peltier element [6] can be used as such heater. This solution makes it possible to remove frost and moisture from the punch in the event of contact between the first module for mechanical action 35 and the punch 3 to improve the quality of the cut and the resulting image quality.

Option 9 - the first module for mechanical action 35 includes a first piezomodule 45. A piezoelectric plate connected to the alternating voltage supply can be used as such piezomodule. This solution makes it possible to remove eventual contaminations from the punch 3 in the event of contact between the first module for mechanical action 35 and the punch 3 to improve the quality of the cut and the resulting image quality.

Option 10 - the first module for mechanical action 35 includes a second cutting edge 50, see Figure 3. This solution makes it possible to separate the fragments of the sample 20 that may have stuck to the first surface 5 using the second cutting edge 50, and to facilitate removal of the same from the surface 5 to improve the quality of the cut and the resulting image quality.

Option 11 - the first module for mechanical action 35 includes a sharpened point 55, see Figure 4. This solution makes it possible to catch the fragments 20 that may have stuck to the first surface 5 and remove them to improve the quality of the cut and the resulting image quality. If the sharpened point 55 is made of a springy organic material, for example, polystyrene, and has a diameter of 0.1-0.3 mm, contaminations can be removed directly from the first cutting edge 4 with no risk of damaging it.

Option 12 - the first module for mechanical action 35 includes the area 57 , see Figure 5, having a rough surface. This solution makes it possible to catch the fragments 20 that may have stuck to the first surface 5 and remove them (move them away) to improve the quality of the cut and the resulting image quality. If such area 57 is made of Viton, contaminations can be removed directly from the first cutting edge 4 with no risk of damaging it.

Option 13 - the second module for mechanical action 37 includes a second heating unit 60, see Figure 6. This solution makes it possible to remove frost and moisture from the object in the event of contact between the second module for mechanical action 37 and the object 18 to improve the quality of the cut and the resulting image quality. For this purpose, the base plate 61 is moved along the X axis along the surface 62 of the sampler 63. This can be performed manually in the locking screw grooves (not shown). Following that, the piezo-scanner touches the contact element 64 of the second module for mechanical action 37 and the object 18 by inclining it along the Z axis point. Another option involves contact between the contact element 64 of the second module for mechanical action 37 and the object 18 using a moving device 65 which can either be a pneumatic drive or a piezo drive. The second positional option shown in the Figure 1 (topmost position) of the second module for mechanical action 37 is not shown in the Figure 6. This option functions in the similar way.

Option 14 - the second module for mechanical action 37 includes a second piezomodule 66 which can take the form of a piezoelectric plate connected to an alternating voltage supply. This solution makes it possible to remove eventual contaminations from the object in the event of contact between the second module for mechanical action 37 and the object 18 to improve the quality of the cut and the resulting image quality.

Option 15 - wherein the device comprises a piezo unit 67, see Figure 7, fastened to the probe unit 25, onto which the probe holder 26 is installed. The piezo unit 67 can be made of a piezo tube and installed on the probe unit 25, with the symmetry axis O-O1 located along the Z axis point. The Figure 7 shows an alternative view of the push rod 31 and a second groove 70 as compared to the Figure 1. The option shown in the Figure 7 have a slight advantage over the option shown in the Figure 1 due to the fact that the second groove 70 will attract less (than the first groove 32) contaminations from the above to make the contacts between the probe and the sample 18 more accurate.

Option 16 (option one) - wherein the piezo unit 67 is arranged so as to be able to move along the first X-axis point and the third Z-axis point (option one). This solution makes it possible to dedicate a motion area 68 along the Z axis point on the probe unit 25, while the probe holder 26 will be installed in the motion area 69 along the X axis point.

Option 17 (option two) - wherein the piezo-unit 67 is arranged so as to be able to move along the second Y-axis point and the third Z-axis point (option two). This solution makes it possible to dedicate a motion area 68 along the Z axis point on the probe unit 25, while the probe holder 26 will be installed in the motion area 70 along the Y axis point.

Option 18 (option three) - wherein the piezo-unit 67 is arranged so as to be able to move along the first X-axis point, the second Y-axis point and the third Z-axis point (option three). This solution makes it possible to dedicate a motion area 68 along the Z axis on the probe unit 25, while the probe holder 26 will be installed in the motion area 71 along the X, Y axes points. This solution of the piezo unit 67 is structurally similar to the piezo-scanner 45. Multiple options of piezo unit 67 are described in detail in /7/. Such arrangements make it possible to scan both the first surface 5 with fragments 20 and the surface 19 to expand the functionality of the invention. Option one may be supplemented with moving the punch along the Y axis point using the second drive 9 to examine the first cutting edge 4 and the first surface 5 more carefully, remove contaminations in due time and improve image quality. The option two allows to examine fragments 20 in more detail, for example, thickness, which is an important parameter for setting the cut thickness. The option three combines both previous options. It should be noted that if the piezo unit 67 takes the form of a piezo tube with its longitudinal axis O-O1 located along the Z axis point, it facilitates examination of the first surface 5 inclined against the Z axis point. This effect is attributable to the fact that piezo tubes generally have a much lower range of axial movement (Z) as compared to the orthogonal plane movements (X, Y).

Some of the options involve placing the scanning probe microscope combined with the device for modification of the object surface inside a cryo chamber 75, see Figure 8. Components 2, 11, 15, 26, 37, 65 are connected to the control unit 76. This makes it possible to cut "soft" objects.


References



[0012] 
  1. 1. Patent RU2389032. Scanning probe microscope combined with a device for modification of the object surface, May 10, 2010.
  2. 2. Application EP2482080. Scanning probe microscope combined with a device for modification of the object surface. January 31, 2011.
  3. 3. Patent US5299481. Carrier arm seal for a microtome of ultramicrotome. April 05, 1994.
  4. 4. Patent US2009183613. Micromanipulator for a cryomicrotome. July 23,23.
  5. 5. http://atos.ru.
  6. 6. http://russian.alibaba.com
  7. 7. Patent RU2248628. Multifunctional piezo-scanner and method of scanning in probe microscopy, March 20, 2005.



Claims

1. Scanning probe microscope combined with a device for modification of the object surface comprising a foundation (1), onto which a punch module (2) with a punch (3) having a first cutting edge (4) and an adjacent first surface (5), said punch module (2) having a first drive (8) at a first X-axis point and a second drive (9) at a second Y-axis point, also comprising a platform (10) installed on the foundation (1), movable along a third Z-axis point and coupled with a third drive (11) at the third Z-axis point, said point being orthogonal to the plane of XY axes points, also comprising a piezo-scanner (15) movable along the X,Y and Z axes points with a holder (16) with an object carrier (17) containing an object (18), said piezo-scanner (15) fastened to the platform (10), and the punch (3) arranged so as to be able to interact with the object (18), also comprising a probe unit (25) with a probe holder (26) to which a probe (27) is fastened, said probe unit (25) fastened to the platform (10) and movable along the first X-axis point and coupled with a fourth drive (30) at the first X-axis point, while the probe (27) is able to interact with the object (18), characterized in that it includes a first module for mechanical action (35), fastened to the platform (10) so as to be able to interact with the punch (3).
 
2. The device according to claim 1, characterized in that the first module for mechanical action (35) is installed so as to be able to interact with the first cutting edge (4) of the punch (3).
 
3. The device according to claim 1, characterized in that the first module for mechanical action (35) is installed so as to be able to interact with the first surface (5) of the punch (3).
 
4. The device according to claim 1, characterized in that the first module for mechanical action (35) is installed so as to be able to interact with the first cutting edge (4) and the first surface (5) of the punch (3).
 
5. The device according to claim 1, characterized in that it includes at least one second module for mechanical action (37), fastened to the platform (10) so as to be able to interact with an object module (22).
 
6. The device according to claim 5, characterized in that the second module for mechanical action (37) is installed so as to be able to interact with the object (18).
 
7. The device according to claim 5, characterized in that the second module for mechanical action (37) is installed so as to be able to interact with the object carrier (17).
 
8. The device according to claim 5, characterized in that the second module for mechanical action (37) is made of elastic material and installed so as to be able to interact with the piezo-scanner (15).
 
9. The device according to claim 1, characterized in that the first module for mechanical action (35) includes a first heating unit (40).
 
10. The device according to claim 1, characterized in that the first module for mechanical action (35) includes a first piezo unit (45).
 
11. The device according to claim 1, characterized in that the first module for mechanical action (35) includes a second cutting edge (50).
 
12. The device according to claim 1, characterized in that the first module for mechanical action (35) includes a sharpened point (55).
 
13. The device according to claim 1, characterized in that the first module for mechanical action (35) includes an area (57) having a rough surface.
 
14. The device according to claim 5, characterized in that the second module for mechanical action (37) includes a second heating unit (60).
 
15. The device according to claim 5, characterized in that the second module for mechanical action (37) includes a second piezo unit (62).
 
16. The device according to claim 1, characterized in that it includes a piezo unit (67), fastened to the probe unit (25) onto which the probe holder is installed (26).
 
17. The device according to claim 16, characterized in that the piezo unit (67) is arranged so as to be able to move along the first X-axis point and the third Z-axis point.
 
18. The device according to claim 16, characterized in that the piezo unit (67) is arranged so as to be able to move along the first X-axis point and the second Y-axis point.
 
19. The device according to claim 16, characterized in that the piezo unit (67) is arranged so as to be able to move along the first X-axis point, the second Y-axis point and the third Z-axis point.
 
20. The device according to claim 1, characterized in that the foundation (1) with all components is placed inside a cryo chamber (75).
 




Drawing
















REFERENCES CITED IN THE DESCRIPTION



This list of references cited by the applicant is for the reader's convenience only. It does not form part of the European patent document. Even though great care has been taken in compiling the references, errors or omissions cannot be excluded and the EPO disclaims all liability in this regard.

Patent documents cited in the description