(19)
(11)EP 3 290 699 B1

(12)EUROPEAN PATENT SPECIFICATION

(45)Mention of the grant of the patent:
28.10.2020 Bulletin 2020/44

(21)Application number: 17179904.2

(22)Date of filing:  06.07.2017
(51)Int. Cl.: 
F04B 45/047  (2006.01)
F04B 39/12  (2006.01)
F04B 43/04  (2006.01)
F04D 33/00  (2006.01)

(54)

MINIATURE FLUID CONTROL DEVICE

MINIATURFLUIDSTEUERUNGSVORRICHTUNG

DISPOSITIF MINIATURE DE RÉGULATION DE FLUIDES


(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30)Priority: 05.09.2016 TW 105128585

(43)Date of publication of application:
07.03.2018 Bulletin 2018/10

(73)Proprietor: Microjet Technology Co., Ltd
Hsinchu (TW)

(72)Inventors:
  • Han, Yung-Lung
    Hsinchu (TW)
  • Huang, Chi-Feng
    Hsinchu (TW)
  • Chen, Shih-Chang
    Hsinchu (TW)
  • Liao, Jia-Yu
    Hsinchu (TW)
  • Liao, Hung-Hsin
    Hsinchu (TW)
  • Huang, Che-Wei
    Hsinchu (TW)
  • Chen, Shou-Hung
    Hsinchu (TW)

(74)Representative: 2K Patentanwälte Blasberg Kewitz & Reichel 
Partnerschaft mbB Schumannstrasse 27
60325 Frankfurt am Main
60325 Frankfurt am Main (DE)


(56)References cited: : 
EP-A1- 2 568 175
US-A1- 2016 076 530
CN-U- 205 383 064
  
      
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).


    Description

    FIELD OF THE INVENTION



    [0001] The present invention relates to a miniature fluid control device, and more particularly to a slim and silent miniature fluid control device.

    BACKGROUND OF THE INVENTION



    [0002] With the advancement of science and technology, fluid control devices are widely used in many sectors such as pharmaceutical industries, computer techniques, printing industries or energy industries. Moreover, the fluid control devices are developed toward elaboration and miniaturization. The fluid control devices are important components that are used in for example micro pumps, micro atomizers, printheads or industrial printers for transporting fluid. Therefore, it is important to provide an improved structure of the fluid control device.

    [0003] For example, in the pharmaceutical industries, pneumatic devices or pneumatic machines use motors or pressure valves to transfer gases. However, due to the volume limitations of the motors and the pressure valves, the pneumatic devices or the pneumatic machines are bulky in volume. In other words, the conventional pneumatic device fails to meet the miniaturization requirement and is not portable. Moreover, during operations of the motor or the pressure valve, annoying noise is readily generated. That is, the conventional pneumatic device is neither friendly nor comfortable to the user.

    [0004] FIG. 6 is a schematic cross-sectional view illustrating a conventional miniature fluid control device. As shown in FIG. 6, the conventional miniature fluid control device 1' comprises a gas collecting plate 11', a piezoelectric actuator 12', an adhesive layer 13' and a base 14'. The gas collecting plate 11', the piezoelectric actuator 12', the adhesive layer 13' and the base 14' are stacked on each other sequentially. The base 14' comprises a gas inlet plate 141' and a resonance plate 142'. The gas inlet plate 141' comprises at least one inlet 143', each of which is in communication with a central cavity 145' through a convergence channel 144'. The resonance plate 142' has a central aperture 146' corresponding to the central cavity 145'. The piezoelectric actuator 12' comprises a suspension plate 121', an outer frame 122', at least one bracket 123' and a piezoelectric ceramic plate 124'. A gap h0' is formed between the resonance plate 142' and the outer frame 122' of the piezoelectric actuator 12'. The adhesive layer 13' is filled in the gap h0'. Consequently, a compressible chamber 10' is defined between the resonance plate 142' and the piezoelectric actuator 12'. The gas collecting plate 11' has a first perforation 111'. Moreover, the piezoelectric actuator 12' is covered by the gas collecting plate 11'. As the piezoelectric actuator 12' is actuated by an applied voltage, the suspension plate 121' of the piezoelectric actuator 12' is vibrated along a vertical direction in a reciprocating manner. Consequently, an external fluid is introduced into the inlet 143', guided to the central cavity 145' through the convergence channel 144', and transferred to a compressible chamber 10'. As the volume of the compressible chamber 10' shrinks, the fluid exits through the first perforation 111' of the gas collecting plate 11'. Consequently, a specified pressure is generated. Moreover, the suspension plate 121', the outer frame 122' and the bracket 123' are integrally formed with each other and produced by using a metal plate. An etching process including multiple steps is applied to the metal plate to make the top surface of the outer frame 122' at a level higher than the suspension plate 121'. That is, there is a height difference between the outer frame 122' and the suspension plate 121'. The adhesive layer 13' is made by coating an adhesive on the top surface of the outer frame 122' to fill in the gap h0', therefore forming and maintaining a required depth h' of the compressible chamber 10' between the resonance plate 142' and the suspension plate 121', which can reduce the contact interference of the resonance plate 142' and the suspension plate 121.

    [0005] However, the conventional miniature fluid control device still has some drawbacks. The required depth h' of the compressible chamber 10' consists of two parts: one is the height difference between the outer frame 122' and the suspension plate 121'; and another is the thickness of the adhesive layer 13', which is as tall as the gap h0'. Since the outer frame 122' is made of a metallic material, the outer frame 122' has specific degree of rigidity. Generally, the thickness of the adhesive layer 13' is only half of the height difference between the outer frame 122' and the suspension plate 121', such thickness is insufficient for exerting proper cushion effect to the whole structure of the compressible chamber 10'. Under this circumstance, the rigidity of the overall structure is too strong that the suspension plate 121' is unable to effectively absorb interference vibration energy during the vertical vibration of the piezoelectric actuator 12'. In other words, the conventional miniature fluid control device 1' loses unnecessarily energy and generates undesired noise, and the noise problem may result in the defectiveness of the products.
    US 2016/0076530 A1 discloses a micro-gas pressure driving device 1, 2 including a miniature gas transportation module 1A, 2A, a covering plate 10 and a tube plate 11, 21. The miniature gas transportation module 1A, 2A includes a convergence plate 12, 22, a resonance membrane 13, 23 and a piezoelectric actuator 14, 24. When the piezoelectric actuator 14, 24 is activated to feed a gas into an input tube 11a, 21a of the tube plate 11, 21, the gas is sequentially transferred through a first input chamber 111, a second input chamber 100, an inlet 120, a convergence channel 123 and a central opening 124 of the convergence plate 12, a central aperture 130 of the resonance membrane 13, and transferred downwardly through the piezoelectric actuator 14, 24 and an output chamber 112, and outputted from an output tube 11b, 21b of the tube plate 11, 21. The first input chamber 111 is arranged between the covering plate 10 and the input tube 11a, 21a. The second input chamber 100 is defined between the covering plate 10 and the convergence plate 12, 22. The output chamber 112 is defined between the tube plate 11 and the piezoelectric actuator 14, 24. CN 205383064 U discloses a miniature pneumatic device 1 including a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A includes a gas inlet plate 11, a resonance plate 12, a piezoelectric actuator 13 and a gas collecting plate 16. A first chamber 121 is formed between the resonance plate 12 and the piezoelectric actuator 13. After a gas is fed into the gas inlet plate 11, the gas is transferred to the first chamber 121 through the resonance plate 12 and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device 1B includes a valve plate 17 and a gas outlet plate 18. After the gas is transferred from the miniature fluid control device 1A to the miniature valve device 1B, the valve opening 170 of the valve plate 17 is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

    [0006] Therefore, there is a need of providing a miniature fluid control device with small, miniature, silent, portable and comfortable benefits in order to eliminate the above drawbacks.

    SUMMARY OF THE INVENTION



    [0007] An object of the present invention provides a miniature fluid control device for a portable device or wearable device. Moreover, the regions of a metal plate corresponding to a suspension plate, an outer frame and at least one bracket of a piezoelectric actuator are etched at the same etch depth, and thus the integral structure of suspension plate, the outer frame and the at least one bracket is defined. Consequently, a second surface of the suspension plate, a second surface of the outer frame and a second surface of the bracket are coplanar with each other. In comparison with the conventional way using the multiple-step etching process to make the components in different depths, the process of forming the piezoelectric actuator of the present invention is simplified. In accordance with the present invention, an adhesive layer is inserted in the gap between a resonance plate and the outer frame. Since the outer frame after being etched has a rough surface, the adhesion between the adhesive layer and the outer frame is increased. Moreover, since the thickness of the outer frame is less than the conventional one, the thickness of the adhesive layer can be increased, on the premise that a specified depth between the resonance plate and the outer frame should be maintained. The increase of the thickness of the adhesive layer can enhance the coating uniformity of the adhesive layer, reduce the assembling error of the suspension plate in the horizontal direction, and improve the efficiency of utilizing the kinetic energy of the suspension plate in the vertical direction. Moreover, the increase of the thickness of the adhesive layer can assist in absorbing vibration energy and reduce noise. Due to the slim, silent and power-saving benefits, the miniature fluid control device of the present invention is suitably used in the wearable device.

    [0008] Another object of the present invention provides a miniature fluid control device with a piezoelectric actuator. A suspension plate of the piezoelectric actuator is a square plate with a bulge. After the fluid is introduced into an inlet of the gas inlet plate of a base, the fluid is guided to a central cavity through a convergence channel, and then the fluid is transferred to a compressible chamber between the resonance plate and the piezoelectric actuator through the central aperture of the resonance plate. Consequently, a pressure gradient is generated in the compressible chamber to facilitate the fluid to flow at a high speed. In the process, the flowrate of the fluid does not reduce and the pressure does not lose. The fluid is continuously discharged under pressure,

    [0009] In accordance with an aspect of the present invention, there is provided a miniature fluid control device. The miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square plate having a first surface and a second surface, wherein a bulge is formed on the second surface. The outer frame is arranged around the suspension plate and has a first surface and a second surface. The suspension plate and the outer frame are connected with each other through the at least one bracket. The second surface of the outer frame and the second surface of the suspension plate are coplanar with each other. A maximum length of the piezoelectric ceramic plate is not larger than a length of a side of the square shape of the suspension plate. The piezoelectric ceramic plate is attached on the first surface of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body formed with a bottom plate and a sidewall structure extending from the peripheral of the bottom plate. An accommodation space is defined by the bottom plate and the sidewall structure collaboratively. The piezoelectric actuator is disposed within the accommodation space. The base includes a gas inlet plate and a resonance plate. The base is disposed within the accommodation space to seal the piezoelectric actuator. The gas inlet plate comprises at least one inlet, at least one convergence channel in communication with the inlet and a convergence chamber. The resonance plate is fixed on the gas inlet plate and has a central aperture corresponding to the convergence chamber of the gas inlet plate and the bulge of the suspension plate. An adhesive layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance plate. Consequently, a depth of a compressible chamber between the piezoelectric actuator and the resonance plate is maintained.

    [0010] The above contents of the present invention will become more readily apparent to those ordinarily skilled in the art after reviewing the following detailed description and accompanying drawings, in which:

    BRIEF DESCRIPTION OF THE DRAWINGS



    [0011] 

    FIG. 1A is a schematic exploded view illustrating a miniature fluid control device according to an embodiment of the present invention and taken along a first viewpoint;

    FIG. 1B is a schematic perspective view illustrating the assembled structure of the miniature fluid control device of FIG. 1A;

    FIG. 2A is a schematic exploded view illustrating the miniature fluid control device of FIG. 1A and taken along a second viewpoint;

    FIG. 2B is a schematic perspective view illustrating the assembled structure of the miniature fluid control device of FIG. 2A;

    FIG. 3A is a schematic perspective view illustrating the piezoelectric actuator of the miniature fluid control device of FIG. 1A and taken along the front side;

    FIG. 3B is a schematic perspective view illustrating the piezoelectric actuator of the miniature fluid control device of FIG. 1A and taken along the rear side;

    FIG. 3C is a schematic cross-sectional view illustrating the piezoelectric actuator of the miniature fluid control device of FIG. 1A;

    FIGS. 4A to 4E schematically illustrate the actions of the miniature fluid control device of FIG. 1A;

    FIG. 5 is a schematic cross-sectional view illustrating the miniature fluid control device of FIG. 1B; and

    FIG. 6 is a schematic cross-sectional view illustrating a conventional miniature fluid control device.


    DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT



    [0012] The present invention will now be described more specifically with reference to the following embodiments. It is to be noted that the following descriptions of preferred embodiments of this invention are presented herein for purpose of illustration and description only. It is not intended to be exhaustive or to be limited to the precise form disclosed.

    [0013] The present invention provides a miniature fluid control device. The fluid control device can be used in many sectors such as pharmaceutical industries, energy industries computer techniques or printing industries for transporting fluids.

    [0014] Please refer to FIGS. 1A, 1B, 2A, 2B and 5. FIG. 1A is a schematic exploded view illustrating a miniature fluid control device according to an embodiment of the present invention and taken along a first viewpoint. FIG. 1B is a schematic perspective view illustrating the assembled structure of the miniature fluid control device of FIG. 1A. FIG. 2A is a schematic exploded view illustrating the miniature fluid control device of FIG. 1A and taken along a second viewpoint. FIG. 2B is a schematic perspective view illustrating the assembled structure of the miniature fluid control device of FIG. 2A. FIG. 5 is a schematic cross-sectional view illustrating the miniature fluid control device of FIG. 1B.

    [0015] As shown in FIGS. 1A, 2A and 5, the miniature fluid control device 1 comprises a housing 1a, a piezoelectric actuator 13, a first insulation plate 141, a conducting plate 15 and a second insulation plate 142. The housing 1a comprises a gas collecting plate 16 and a base 10. The base 10 comprises a gas inlet plate 11 and a resonance plate 12. The piezoelectric actuator 13 is aligned with the resonance plate 12. The gas inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the first insulation plate 141, the conducting plate 15, the second insulation plate 142 and the gas collecting plate 16 are stacked on each other sequentially. Moreover, the piezoelectric actuator 13 comprises a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133.

    [0016] As shown in FIG. 1A and FIG. 5, the gas collecting plate 16 is a frame body formed with a bottom plate and a sidewall structure 168 extending from the peripheral of the bottom plate. An accommodation space 16a is defined by the bottom plate and the sidewall structure 168 collaboratively, and the piezoelectric actuator 13 is disposed within the accommodation space 16a.

    [0017] The gas collecting plate 16 comprises a first surface 160 and a second surface 161 (also referred as a fiducial surface). The first surface 160 of the gas collecting plate 16 is concaved to define a gas-collecting chamber 162. The fluid that is transferred by the miniature fluid control device 1 is temporarily accumulated in the gas-collecting chamber 162. The gas collecting plate 16 comprises a first perforation 163 and a second perforation 164. A first end of the first perforation 163 and a first end of the second perforation 164 are in communication with the gas-collecting chamber 162. A second end of the first perforation 163 communicates with a first pressure-releasing chamber 165, and a second end of the second perforation 164 communicates with a first outlet chamber 166, while the first pressure-releasing chamber 165 and the first outlet chamber 166 are formed on the second surface 161 of the gas collecting plate 16. Moreover, a raised structure 167 is disposed in the first outlet chamber 166, while the raised structure 167 includes but is not limited to a cylindrical post.

    [0018] As shown in FIG. 2A, the piezoelectric actuator 13 comprises the suspension plate 130, the outer frame 131, the at least one bracket 132 and the piezoelectric ceramic plate 133. In this embodiment, the suspension plate 130 is a flexible plate having a square shape, and the piezoelectric ceramic plate 133 is a square plate structure. The maximum length of the piezoelectric ceramic plate 133, which is the length of a side of the square shape thereof, is equal to or less than the length of a side of the square shape of the suspension plate 130. Moreover, the piezoelectric ceramic plate 133 is attached on the suspension plate 130. The outer frame 131 is arranged around the suspension plate 130. The profile of the outer frame 131 substantially matches the profile of the suspension plate 130. That is, the outer frame 131 is a square hollow frame. Moreover, the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131 for elastically supporting the suspension plate 130.

    [0019] Please refer to FIGS. 1A and 2A again. The miniature fluid control device 1 further comprises the first insulation plate 141, the conducting plate 15 and the second insulation plate 142. The conducting plate 15 is arranged between the first insulation plate 141 and the second insulation plate 142. For assembling the miniature fluid control device 1, the second insulation plate 142, the conducting plate 15, the first insulation plate 141, the piezoelectric actuator 13 and the base 10 are assembled together and accommodated within the accommodation space 16a of the gas collecting plate 16. The resulting structure of the miniature fluid control device 1 is shown in FIGS. 1B and 2B. Through such configuration, the miniature fluid control device 1 has the miniature profile.

    [0020] Please refer to FIGS. 1A and 2A again. The gas inlet plate 11 of the miniature fluid control device 1 comprises a first surface 11b, a second surface 11a and at least one inlet 110. In this embodiment, the gas inlet plate 11 has four inlets 110. The inlets 110 run through the first surface 11b and the second surface 11a of the gas inlet plate 11. In response to the action of the atmospheric pressure, an external fluid is introduced into the miniature fluid control device 1 through the inlets 110. As shown in FIG. 2A, there are at least one convergence channel 112 formed on the first surface 11b of the gas inlet plate 11, while there are four convergence channels 112 in this embodiment. The at least one convergence channel 112 is in communication with the at least one inlet 110 on the second surface 11a of the gas inlet plate 11. In this embodiment, each of the convergence channels 112 is in communication with the respectively corresponding one of the inlets 110. Moreover, a central cavity 111 is formed on the first surface 11b of the gas inlet plate 11. The central cavity 111 is in communication with the at least one convergence channel 112. Furthermore, the central cavity 111 is formed on the central crossing of the convergence channels 112. After the fluid is introduced into the at least one convergence channel 112 through the at least one inlet 110, the fluid is guided to the central cavity 111. In this embodiment, the at least one inlet 110, the at least one convergence channel 112 and the central cavity 111 of the gas inlet plate 11 are integrally formed. After the gas inlet plate 11 and the resonance plate 12 are assembled, a convergence chamber for temporarily storing the fluid is formed between the central cavity 111 and the resonance plate 12. Preferably but not exclusively, the gas inlet plate 11 is made of stainless steel. The thickness of the gas inlet plate 11 is in the range between 0.4mm and 0.6mm, and preferably 0.5mm. In addition, the depth of the convergence chamber defined by the central cavity 111 is equal to the depth of the at least one convergence channel 112.

    [0021] Preferably but not exclusively, the resonance plate 12 is made of a flexible material. The resonance plate 12 comprises a central aperture 120 corresponding to the central cavity 111 of the gas inlet plate 11. Consequently, the fluid can be transferred through the central aperture 120. Preferably but not exclusively, the resonance plate 12 is made of copper. The thickness of the resonance plate 12 is in the range between 0.03mm and 0.08mm, and preferably 0.05mm.

    [0022] The schematic cross-sectional view of the miniature fluid control device 1 is shown in FIG. 4A. As shown in FIGS. 4A and 5, there is a gap h between the resonance plate 12 and the outer frame 131 of the piezoelectric actuator 13. An adhesive layer 136, which is preferably but not limited to a conductive adhesive, is inserted in the gap h. Consequently, the depth of the gap h between the resonance plate 12 and the suspension plate 130 can be maintained, and the fluid is guided to flow more quickly. Moreover, due to the depth of the gap h, a compressible chamber 121 is defined between the resonance plate 12 and the suspension plate 130. In consequence of guiding the fluid to enter the compressible chamber 121 via the central aperture 120 of the resonance plate 12, the fluid can flow at a faster speed. In addition, the proper distance between the resonance plate 12 and the suspension plate 130 diminishes the contact interference and largely reduces the generated noise.

    [0023] Please refer to FIGS. 1A and 2A again. The miniature fluid control device 1 further comprises the first insulation plate 141, the conducting plate 15 and the second insulation plate 142. The first insulation plate 141, the conducting plate 15 and the second insulation plate 142 are stacked on each other sequentially, and arranged between the piezoelectric actuator 13 and the gas collecting plate 16. The profiles of the first insulation plate 141, the conducting plate 15 and the second insulation plate 142 substantially match the profile of the outer frame 131 of the piezoelectric actuator 13. The first insulation plate 141 and the second insulation plate 142 are made of an insulating material (e.g. a plastic material) for providing insulating efficacy. The conducting plate 15 is made of an electrically conductive material (e.g. a metallic material) for providing electrically conducting efficacy. Moreover, the conducting plate 15 has a conducting pin 151 so as to be electrically connected with an external circuit (not shown).

    [0024] FIG. 3A is a schematic perspective view illustrating the piezoelectric actuator of the miniature fluid control device of FIG. 1A and taken along the front side. FIG. 3B is a schematic perspective view illustrating the piezoelectric actuator of the miniature fluid control device of FIG. 1A and taken along the rear side. FIG. 3C is a schematic cross-sectional view illustrating the piezoelectric actuator of the miniature fluid control device of FIG. 1A. Referring to FIGS. 3A, 3B and 3C, the piezoelectric actuator 13 is assembled by the suspension plate 130, the outer frame 131, the at least one bracket 132, and the piezoelectric ceramic plate 133. In this embodiment, the suspension plate 130, the at least one bracket 132 and the outer frame 131 are integrally formed and produced by using a metal plate (e.g., a stainless steel plate). That is, the piezoelectric actuator 13 of the miniature fluid control device 1 is made by attaching the piezoelectric ceramic plate 133 to the processed metal plate. The suspension plate 130 comprises a first surface 130b and an opposite second surface 130a. The piezoelectric ceramic plate 133 is attached on the first surface 130b of the suspension plate 130. When a voltage is applied to the piezoelectric ceramic plate 133, the piezoelectric ceramic plate 133 drives the suspension plate 130 to a curvy vibration. As shown in FIG. 3A, the suspension plate 130 comprises a middle portion 130d and a periphery portion 130e. When the piezoelectric ceramic plate 133 is subjected to the curvy vibration, the suspension plate 130 is subjected to the curvy vibration from the middle portion 130d to the periphery portion 130e. The outer frame 131 is arranged around the peripheral of the suspension plate 130. Moreover, a conducting pin 134 protrudes outwardly from the outer frame 131 so as to be electrically connected with an external circuit (not shown).

    [0025] The at least one bracket 132 is arranged between the suspension plate 130 and the outer frame 131 for elastically supporting the suspension plate 130. The two ends of the bracket 132 are connected with the outer frame 131 and the suspension plate 130 respectively. Moreover, at least one vacant space 135 is formed between the bracket 132, the suspension plate 130 and the outer frame 131 for allowing the fluid to go through. The types of the suspension plate 130 and the outer frame 131 and the type and the number of the at least one bracket 132 may be varied according to the practical requirements.

    [0026] As shown in FIGS. 3A and 3C, the second surface 130a of the suspension plate 130 is coplanar with a second surface 131a of the outer frame 131 and a second surface 132a of the bracket 132. The suspension plate 130 has a square shape. The length of a side of the square shape of the suspension plate 130 is in the range between 7.5mm and 12mm, and preferably in the range between 7.5mm and 8.5mm. The thickness of the suspension plate 130 is in the range between 0.1mm and 0.4mm, and preferably 0.27mm. The thickness of the outer frame 131 is also in the range between 0.1mm and 0.4mm, and preferably 0.27mm. A maximum length of the piezoelectric ceramic plate 133 is equal to or less than the length of a side of the square shape of the suspension plate 130. In this embodiment, the piezoelectric ceramic plate 133 is also a square plate structure corresponding to the suspension plate 130, so its maximum length is the length of a side of the square shape thereof. The thickness of the piezoelectric ceramic plate 133 is in the range between 0.05mm and 0.3mm, and preferably 0.10mm.

    [0027] As mentioned above, the suspension plate 130 of the piezoelectric actuator 13 of the present invention is a square suspension plate. In comparison with the circular suspension plate of the conventional piezoelectric actuator, the square suspension plate is more power-saving. The comparison between the consumed power and the operating frequency for the suspension plates of different types and sizes is shown in Table 1.
    Table 1:
    Type and size of suspension plateOperating frequencyConsumed power
    Square (side length: 10mm) 18kHz 1.1W
    Circular (diameter: 10mm) 28kHz 1.5W
    Square (side length: 9mm) 22kHz 1.3W
    Circular (diameter: 9mm) 34kHz 2W
    Square (side length: 8mm) 27kHz 1.5W
    Circular (diameter: 8mm) 42kHz 2.5W


    [0028] From the results of Table 1, it is found that the piezoelectric actuator with the square suspension plate (8mm∼10mm) is more power-saving than the piezoelectric actuator with the circular suspension plate (8mm∼10mm). That is, the piezoelectric actuator with the square suspension plate consumes less power. Generally, the consumed power of the capacitive load at the resonance frequency is positively related to the resonance frequency. Since the resonance frequency of the square suspension plate is obviously lower than that of the circular square suspension plate, the consumed power of the square suspension plate is fewer. Due to the slim, silent and power-saving benefits, the miniature fluid control device 1 of the present invention is suitably used in the wearable device.

    [0029] As mentioned above, the suspension plate 130, the outer frame 131 and the at least one bracket 132 are integrally formed with each other. Moreover, the suspension plate 130, the outer frame 131 and the at least one bracket 132 can be produced by one of the following means including but not limited to a conventional machining process, a photolithography and etching process, a laser machining process, an electroforming process, an electric discharge machining process and so on. In this embodiment, the certain regions of a metal plate respectively corresponding to the suspension plate 130, the outer frame 131 and the at least one bracket 132 are etched at the same etch depth, such that the integral structure of suspension plate 130, the outer frame 131 and the at least one bracket 132 is defined. Consequently, the second surface 130a of the suspension plate 130, the second surface 131a of the outer frame 131 and the second surface 132a of the bracket 132 are coplanar with each other. As previously described in FIG. 6, the conventional piezoelectric actuator needs to be etched in multiple steps in order to make different depths for forming the outer frame and the suspension plate. In accordance with the present invention, the adhesive layer 136 is inserted in the gap between the resonance plate 12 and the outer frame 131. Since the outer frame 131 after being etched has a rough surface, the adhesion between the adhesive layer 136 and the outer frame 131 is increased. Moreover, since the thickness of the outer frame 131 lesser than the outer frame of the conventional piezoelectric actuator, the thickness of the adhesive layer 136 in the gap h can be increased. The increase of the thickness of the adhesive layer 136 enhances the coating uniformity of the adhesive layer 136, reduces the assembling error of the suspension plate 130 in the horizontal direction, and improves the efficiency of utilizing the kinetic energy of the suspension plate 130 in the vertical direction. Moreover, the increase of the thickness of the adhesive layer 136 can assist in absorbing vibration energy and reduce noise.

    [0030] As shown in FIG. 3C, the suspension plate 130 is a stepped structure. That is, the suspension plate 130 comprises a bulge 130c. The bulge 130c is formed on the middle portion 130d of the second surface 130a of the suspension plate 130. For example, the bulge 130c is a circular convex structure. The thickness of the bulge 130c is in the range between 0.02mm and 0.08mm, and preferably 0.03mm. Preferably but not exclusively, the diameter of the bulge 130c is 4.4mm.

    [0031] FIGS. 4A to 4E schematically illustrate the actions of the miniature fluid control device of FIG. 1A. Please refer to FIGS. 1A, 4A to 4E and 5. The base 10, the gas inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the first insulation plate 141, the conducting plate 15, the second insulation plate 142 and the gas collecting plate 16 are assembled. The convergence chamber 111 is formed between the central aperture 120 of the resonance plate 12 and the first surface 11b of the gas inlet plate 11. Moreover, the compressible chamber 121 is formed between the resonance plate 12 and the suspension plate 130 for temporarily storing the fluid. The compressible chamber 121 is in communication with the convergence chamber 111 through the central aperture 120 of the resonance plate 12. As the piezoelectric actuator 13 is actuated by an applied voltage, the suspension plate 130 of the piezoelectric actuator 13 is vibrated along a vertical direction in a reciprocating manner. The actions of the miniature fluid control device 1 will be described as follows.

    [0032] Please refer to FIG. 4B. The suspension plate 130 of the piezoelectric actuator 13 vibrates along the vertical direction in the reciprocating manner. When the piezoelectric actuator 13 vibrates downwardly, the fluid is fed into the inlets 110 of the gas inlet plate 11. Then, the fluid flows to the central cavity 111 of the gas inlet plate 11 through the convergence channels 112. Since the resonance plate 12 is light and thin, the resonance plate 12 is pushed by the entering fluid. Under this circumstance, the resonance plate 12 vibrates along the vertical direction in the reciprocating manner because of the resonance of the suspension plate 130. That is, a movable part 12a of the resonance plate 12 corresponding to the central cavity 111 of the gas inlet plate 11 is subjected to the curvy deformation.

    [0033] Please refer to FIG. 4C. As the suspension plate 130 vibrates along the vertical direction in the reciprocating manner, the movable part 12a of the resonance plate 12 vibrates downwardly and is very close to the bulge 130c of the suspension plate 130. Consequently, the fluid is introduced into the compressible chamber 121. The region of the resonance plate 12 excluding the movable part 12a is also referred as a fixed part 12b. Meanwhile, the gap between the suspension plate 130 and the fixed part 12b of the resonance plate 12 stands still. Consequently, the flowrate of the fluid does not reduce and the pressure does not lose, and the volume of the compressible chamber 121 can be compressed effectively.

    [0034] As shown in FIG. 4D, the piezoelectric actuator 13 vibrates upwardly in response to the applied voltage. Under this circumstance, the fluid is pushed toward peripheral regions of the compressible chamber 121. Consequently, the fluid is transferred downwardly through the vacant space 135 of the piezoelectric actuator 13 at a higher exiting pressure.

    [0035] As shown in FIG. 4E, the movable part 12a of the resonance plate 12 moves upwardly because the bulge 130c of the suspension plate 130 of the piezoelectric actuator 13 vibrates upwardly. Meanwhile, the volume of the convergence chamber 111 reduces.

    [0036] The suspension plate 130 of the piezoelectric actuator 13 vibrates along the vertical direction in the reciprocating manner. Consequently, the steps of FIGS. 4B to 4E are repeatedly done. Since the suspension plate 130 of the piezoelectric actuator 13 has the bulge 130c, the efficiency of transferring the fluid is enhanced. It is noted that the profile, number and position of the bulge 130c may be varied according to the practical requirements.

    [0037] From the above descriptions, there is the gap h between the resonance plate 12 and the outer frame 131 of the piezoelectric actuator 13. Moreover, an adhesive layer 136 such as a conductive adhesive is inserted in the gap h. Consequently, a specified depth between the resonance plate 12 and the bulge 130c of the suspension plate 130 of the piezoelectric actuator 13 is maintained. Since the second surface 131a of the outer frame 131 and the second surface 130a of the suspension plate 130 are coplanar with each other, the thickness of the adhesive layer 136 in the gap h is increased in comparison with the conventional design. The thickness of the adhesive layer 136 is in the range between 50µm and 60µm, and preferably 55µm. Since the thickness of the adhesive layer 136 is increased, the depth of the gap h can be maintained and the fluid can be flow through the compressible chamber 121 more quickly. Moreover, the buffering action of the adhesive layer 136 can assist in absorbing and abbreviating the vibration of the piezoelectric actuator 13 and reduce noise. Moreover, the proper distance between the resonance plate 12 and the suspension plate 130 can diminish the contact interference and largely reduce the generated noise.

    [0038] The performance data of the miniature fluid control device with different thicknesses of adhesive layers are listed in Table 2.
    Table 2:
    Adhesive thickness 40µm 45µm 50µm 55µm 60µm 65µm 70µm
    Frequency 28 kHz 28 kHz 28 kHz 28 kHz 28 kHz 28 kHz 28 kHz
    Maximum output pressure 50mm Hg 150mm Hg 275mm Hg 350mm Hg 290mm Hg 265mm Hg 145mm Hg
    Defect rate 12/25= 48% 9/25= 36% 3/25= 12% 1/25= 4% 2/25= 8% 10/25= 40% 10/25= 40%


    [0039] It is found that the performance of the miniature fluid control device 1 is highly influenced by the thickness of the adhesive layer 136. If the thickness of the adhesive layer 136 is too large, although the depth of the gap h can be larger, the expansion of the compressible chamber 121 deteriorates its compressible efficacy and thus reduces the performance of the miniature fluid control device 1. If the thickness of the adhesive layer 136 is too small, the depth of the gap h is insufficient that the bulge 130c and the resonance plate 12 may collide with each other. Such collision reduces the performance and generates noise, while the noise problem may result in the defectiveness of the product. The results of the above table are obtained by testing 25 samples of the miniature fluid control device with specified thicknesses of adhesive layers 136. The optimized thickness of the adhesive layer 136 is in the range between 50µm and 60µm. In this thickness range, the performance is largely increased, and the defect rate is reduced. More preferably, the optimum thickness of the adhesive layer 136 is 55µm because the performance is the best and the defect rate is the minimum under this size of the adhesive layer 136.

    [0040] In some embodiments, the vibration frequency of the resonance plate 12 in the vertical direction is identical to the vibration frequency of the piezoelectric actuator 13. That is, the resonance plate 12 and the piezoelectric actuator 13 vibrate simultaneously, moving upwardly or downwardly at the same time. It is noted that the actions of the resonance plate 12 and the piezoelectric actuator 13 may be varied according to the practical requirements.

    [0041] From the above descriptions, the present invention provides the miniature fluid control device. The miniature fluid control device comprises the housing and the piezoelectric actuator. The housing comprises the gas collecting plate and the base. The suspension plate of the piezoelectric actuator is a square plate with the bulge. After the fluid is introduced into the inlet of the gas inlet plate of the base, the fluid is guided to the central cavity through the convergence channel, and then the fluid is transferred to the compressible chamber between the resonance plate and the piezoelectric actuator through the central aperture of the resonance plate. Consequently, a pressure gradient is generated in the compressible chamber to facilitate the fluid to flow at a high speed. Since the flowrate is not reduced and no pressure loss is generated, the volume of the compressible chamber can be compressed more effectively.

    [0042] Moreover, the regions of a metal plate corresponding to the suspension plate, the outer frame and the at least one bracket are etched at the same etch depth, and thus the integral structure of suspension plate, the outer frame and the at least one bracket is defined. Consequently, the second surface of the suspension plate, the second surface of the outer frame and the second surface of the bracket are coplanar with each other. In comparison with the conventional technology of using the multiple-step etching process for components in different depths, the process of forming the piezoelectric actuator of the present invention is simplified. In accordance with the present invention, the adhesive layer is inserted in the gap between the resonance plate and the outer frame. Since the outer frame after being etched has a rough surface, the adhesion between the adhesive layer and the outer frame is increased. Moreover, since the thickness of the outer frame is decreased when compared with the outer frame of the conventional piezoelectric actuator, the thickness of the adhesive layer in the gap can be increased. The increase of the thickness of the adhesive layer means that the coating uniformity of the adhesive layer is enhanced. Consequently, the assembling error of the suspension plate in the horizontal direction is decreased, and the kinetic energy of the suspension plate in the vertical direction is effectively utilized. Moreover, the increase of the thickness of the adhesive layer can assist in absorbing vibration energy and reduce noise. Due to the slim, silent and power-saving benefits, the miniature fluid control device of the present invention is suitably used in the wearable device. In other words, the miniature fluid control device of the present invention has significant industrial values.

    [0043] While the invention has been described in terms of what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention needs not be limited to the disclosed embodiments. On the contrary, it is intended to cover various modifications and similar arrangements included within the scope of the appended claims which are to be accorded with the broadest interpretation so as to encompass all such modifications and similar structures.


    Claims

    1. A miniature fluid control device (1), comprising:

    a piezoelectric actuator (13) comprising a suspension plate (130), an outer frame (131), at least one bracket (132) and a piezoelectric ceramic plate (133), wherein the suspension plate (130) has a square shape, a first surface (130b) and an opposing second surface (130a), a bulge (130c) is formed on the second surface (130a) of the suspension plate (130), the outer frame (131) is arranged around the suspension plate (130) and has a first surface (131b) and an opposing second surface (131a), and the suspension plate (130) and the outer frame (131) are connected with each other through the at least one bracket (132), wherein the second surface (131a) of the outer frame (131) and the second surface (130a) of the suspension plate (130) are coplanar with each other, a maximum length of the piezoelectric ceramic plate (133) is equal to or less than a length of a side of the square shape of the suspension plate (130), and the piezoelectric ceramic plate (133) is attached on the first surface (130b) of the suspension plate (130); and

    a housing (1a) comprising a gas collecting plate (16) and a base (10), wherein the gas collecting plate (16) is a frame body having a bottom plate and a sidewall structure (168) extending from the peripheral of the bottom plate to form an accommodation space (16a), and the piezoelectric actuator (13) is disposed within the accommodation space (16a), wherein the base (10) comprises a gas inlet plate (11) and a resonance plate (12), and the base (10) is disposed within the accommodation space (16a) to seal the piezoelectric actuator (13), wherein the gas inlet plate (11) comprises at least one inlet (110), at least one convergence channel (112) in communication with the at least one inlet (110) and a convergence chamber (111), wherein the resonance plate (12) is fixed on the gas inlet plate (11) and has a central aperture (120) corresponding to the convergence chamber (111) of the gas inlet plate (11) and the bulge (130c) of the suspension plate (130),

    wherein an adhesive layer (136) is arranged between the second surface (131a) of the outer frame (131) of the piezoelectric actuator (13) and the resonance plate (12), and a thickness of the adhesive layer (136) is in a range between 50µm and 60µm, so that a depth of a compressible chamber (121) between the piezoelectric actuator (13) and the resonance plate (12) is maintained.


     
    2. The miniature fluid control device (1) according to claim 1, wherein the thickness of the adhesive layer (136) is 55µm.
     
    3. The miniature fluid control device (1) according to claim 1, wherein a thickness of the suspension plate (130) is in a range between 0.1mm and 0.4mm.
     
    4. The miniature fluid control device (1) according to claim 1, wherein a thickness of the outer frame (131) is in a range between 0.1mm and 0.4mm.
     
    5. The miniature fluid control device (1) according to claim 1, wherein a thickness of the bulge (130c) is in a range between 0.02mm and 0.08mm.
     
    6. The miniature fluid control device (1) according to claim 1, wherein the bulge (130c) on the suspension plate (130) is a circular convex structure, and a diameter of the bulge (130c) is 4.4mm.
     
    7. The miniature fluid control device (1) according to claim 1, wherein a thickness of the piezoelectric ceramic plate (133) is in a range between 0.05mm and 0.3mm.
     
    8. The miniature fluid control device (1) according to claim 7, wherein the thickness of the piezoelectric ceramic plate (133) is 0.10mm.
     
    9. The miniature fluid control device (1) according to claim 1, wherein a length of the suspension plate (130) is in a range between 7.5mm and 12mm, and a thickness of the suspension plate (130) is in a range between 0.1mm and 0.4mm.
     
    10. The miniature fluid control device (1) according to claim 9, wherein the length of the suspension plate (130) is in a range between 7.5mm and 8.5mm, and the thickness of the suspension plate (130) is 0.27mm.
     
    11. The miniature fluid control device (1) according to claim 1, wherein the suspension plate (130), the outer frame (131) and the at least one bracket (132) are integrally formed with each other.
     
    12. The miniature fluid control device (1) according to claim 11, wherein the regions of a metal plate corresponding to the suspension plate (130), the outer frame (131) and the at least one bracket (132) are etched at the same etch depth, so that the second surface (131a) of the outer frame (131) and the second surface (130a) of the suspension plate (130) are coplanar with each other.
     


    Ansprüche

    1. Eine Miniaturfluidsteuervorrichtung (1), bestehend aus:

    einen piezoelektrischen Aktor (13), der eine Aufhängungsplatte (130), einen äußeren Rahmen (131), mindestens eine Klammer (132) und eine piezoelektrische Keramikplatte (133) umfasst, wobei die Aufhängungsplatte (130) eine quadratische Form, eine erste Oberfläche (130b) und eine gegenüberliegende zweite Oberfläche (130a) aufweist, ein Wulst (130c) auf der zweiten Oberfläche (130a) der Aufhängungsplatte (130) ausgebildet ist, der äußere Rahmen (131) um die Aufhängungsplatte (130) herum angeordnet ist und eine erste Oberfläche (131b) und eine gegenüberliegende zweite Oberfläche (131a) aufweist, und die Aufhängungsplatte (130) und der äußere Rahmen (131) durch den mindestens einen Bügel (132) miteinander verbunden sind, wobei die zweite Oberfläche (131a) des äußeren Rahmens (131) und die zweite Oberfläche (130a) der Aufhängungsplatte (130) komplanar zueinander sind, eine maximale Länge der piezoelektrischen Keramikplatte (133) gleich oder kleiner ist als eine Länge einer Seite der quadratischen Form der Aufhängungsplatte (130), und die piezoelektrische Keramikplatte (133) auf der ersten Oberfläche (130b) der Aufhängungsplatte (130) befestigt ist; und

    ein Gehäuse (1a), das eine Gassammelplatte (16) und eine Basis (10) umfasst, wobei die Gassammelplatte (16) ein Rahmenkörper mit einer Bodenplatte und einer Seitenwandstruktur (168) ist, die sich von der Peripherie der Bodenplatte erstreckt, um einen Aufnahmeraum (16a) zu bilden, und der piezoelektrische Aktor (13) innerhalb des Aufnahmeraums (16a) angeordnet ist, wobei die Basis (10) eine Gaseinlassplatte (11) und eine Resonanzplatte (12) umfasst und die Basis (10) innerhalb des Aufnahmeraums (16a) angeordnet ist, um den piezoelektrischen Aktor (13) abzudichten, wobei die Gaseinlassplatte (11) mindestens einen Einlass (110) umfasst, mindestens einen Konvergenzkanal (112), der mit dem mindestens einen Einlass (110) und einer Konvergenzkammer (111) in Verbindung steht, wobei die Resonanzplatte (12) an der Gaseinlassplatte (11) befestigt ist und eine zentrale Öffnung (120) aufweist, die der Konvergenzkammer (111) der Gaseinlassplatte (11) und der Ausbuchtung (130c) der Aufhängungsplatte (130) entspricht, wobei eine Klebstoffschicht (136) zwischen der zweiten Oberfläche (131a) des äußeren Rahmens (131) des piezoelektrischen Aktors (13) und der Resonanzplatte (12) angeordnet ist, und eine Dicke der Klebstoffschicht (136) in einem Bereich zwischen 50µm und 60µm liegt, so dass eine Tiefe einer kompressiblen Kammer (121) zwischen dem piezoelektrischen Aktor (13) und der Resonanzplatte (12) aufrechterhalten wird.


     
    2. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, wobei die Dicke der Klebstoffschicht (136) µ55 m beträgt.
     
    3. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, wobei die Dicke der Aufhängungsplatte (130) in einem Bereich zwischen 0,1 mm und 0,4 mm liegt.
     
    4. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, wobei die Dicke des äußeren Rahmens (131) in einem Bereich zwischen 0,1 mm und 0,4 mm liegt.
     
    5. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, wobei die Dicke der Ausbuchtung (130c) in einem Bereich zwischen 0,02 mm und 0,08 mm liegt.
     
    6. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, wobei die Ausbuchtung (130c) auf der Aufhängungsplatte (130) eine kreisförmige konvexe Struktur ist und der Durchmesser der Ausbuchtung (130c) 4,4 mm beträgt.
     
    7. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, wobei die Dicke der piezoelektrischen Keramikplatte (133) in einem Bereich zwischen 0,05 mm und 0,3 mm liegt.
     
    8. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 7, wobei die Dicke der piezoelektrischen Keramikplatte (133) 0,10 mm beträgt.
     
    9. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, wobei eine Länge der Aufhängungsplatte (130) in einem Bereich zwischen 7,5 mm und 12 mm liegt und eine Dicke der Aufhängungsplatte (130) in einem Bereich zwischen 0,1 mm und 0,4 mm liegt.
     
    10. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 9, wobei die Länge der Aufhängungsplatte (130) in einem Bereich zwischen 7,5 mm und 8,5 mm liegt und die Dicke der Aufhängungsplatte (130) 0,27 mm beträgt.
     
    11. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 1, bei der die Aufhängungsplatte (130), der Außenrahmen (131) und die mindestens eine Halterung (132) vollständig miteinander ausgebildet sind.
     
    12. Die Miniaturfluidsteuervorrichtung (1) nach Anspruch 11, bei der die Bereiche einer Metallplatte, die der Aufhängungsplatte (130), dem äußeren Rahmen (131) und dem mindestens einen Bügel (132) entsprechen, in der gleichen Ätztiefe geätzt sind, so dass die zweite Oberfläche (131a) des äußeren Rahmens (131) und die zweite Oberfläche (130a) der Aufhängungsplatte (130) komplanar zueinander sind.
     


    Revendications

    1. Un dispositif miniature de régulation de fluide (1), comprenant:

    un actionneur piézoélectrique (13) comprenant une plaque de suspension (130), un cadre extérieur (131), au moins un support (132) et une plaque céramique piézoélectrique (133), dans lequel la plaque de suspension (130) a une forme carrée, une première surface (130b) et une deuxième surface opposée (130a), un renflement (130c) étant formé sur la deuxième surface (130a) de la plaque de suspension (130), le cadre extérieur (131) étant disposé autour de la plaque de suspension (130) et a une première surface (131b) et une deuxième surface opposée (131a), et la plaque de suspension (130) et le cadre extérieur (131) sont reliés l'un à l'autre par le biais du ou des support(s) (132), dans lequel la deuxième surface (131a) du cadre extérieur (131) et la deuxième surface (130a) de la plaque de suspension (130) sont coplanaires l'une avec l'autre, une longueur maximale de la plaque céramique piézoélectrique (133) étant égale ou inférieure à une longueur d'un côté de la forme carrée de la plaque de suspension (130), et la plaque céramique piézoélectrique (133) est fixée sur la première surface (130b) de la plaque de suspension (130); et

    un boîtier (1a) comprenant une plaque collectrice de gaz (16) et une base (10), dans lequel la plaque collectrice de gaz (16) est un corps de cadre ayant une plaque inférieure et une structure de paroi latérale (168) s'étendant à partir de la périphérie de la plaque inférieure pour former un espace de logement (16a), et l'actionneur piézoélectrique (13) étant disposé à l'intérieur de l'espace de logement (16a), dans lequel la base (10) comprend une plaque d'entrée de gaz (11) et une plaque de résonance (12), et la base (10) est disposée à l'intérieur de l'espace de logement (16a) pour sceller l'actionneur piézoélectrique (13), dans lequel la plaque d'entrée de gaz (11) comprend au moins une entrée (110), au moins un canal de convergence (112) dans communication avec la ou les entrée(s) (110) et une chambre de convergence (111), dans lequel la plaque de résonance (12) est fixée sur la plaque d'entrée de gaz (11) et a une ouverture centrale (120) correspondant à la chambre de convergence (111) de la plaque d'entrée de gaz (11) et du renflement (130c) de la plaque de suspension (130),

    dans lequel une couche adhésive (136) est disposée entre la seconde surface (131a) du cadre extérieur (131) de l'actionneur piézoélectrique (13) et la plaque de résonance (12), et une épaisseur de la couche adhésive (136) est dans une plange entre 50µm et 60µm, de sorte qu'est maintenu une profondeur d'une chambre compressible (121) entre l'actionneur piézoélectrique (13) et la plaque de résonance (12).


     
    2. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel l'épaisseur de la couche adhésive (136) est de 55 µm.
     
    3. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel une épaisseur de la plaque de suspension (130) est dans une plage comprise entre 0,1 mm et 0,4 mm.
     
    4. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel une épaisseur du cadre extérieur (131) est dans une plage comprise entre 0,1 mm et 0,4 mm.
     
    5. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel une épaisseur du renflement (130c) est dans une plage comprise entre 0,02 mm et 0,08 mm.
     
    6. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel le renflement (130c) sur la plaque de suspension (130) est une structure circulaire convexe, et un diamètre du renflement (130c) est de 4,4 mm.
     
    7. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel une épaisseur de la plaque céramique piézoélectrique (133) est dans une plage comprise entre 0,05 mm et 0,3 mm.
     
    8. Le dispositif miniature de régulation de fluide (1) selon la revendication 7, dans lequel l'épaisseur de la plaque céramique piézoélectrique (133) est de 0,10 mm.
     
    9. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel une longueur de la plaque de suspension (130) est dans une plage comprise entre 7,5 mm et 12 mm, et une épaisseur de la plaque de suspension (130) est dans une plage comprise entre 0,1 mm et 0,4 mm.
     
    10. Le dispositif miniature de régulation de fluide (1) selon la revendication 9, dans lequel la longueur de la plaque de suspension (130) est dans une plage comprise entre 7,5 mm et 8,5 mm, et l'épaisseur de la plaque de suspension (130) est de 0,27 mm.
     
    11. Le dispositif miniature de régulation de fluide (1) selon la revendication 1, dans lequel la plaque de suspension (130), le cadre extérieur (131) et le ou les support(s) (132) sont formés d'un seul tenant l'un avec l'autre.
     
    12. Le dispositif miniature de régulation de fluide (1) selon la revendication 11, dans lequel les régions d'une plaque métallique correspondant à la plaque de suspension (130), au cadre extérieur (131) et au(x) support(s) (132) sont gravées à la même profondeur de gravure, de sorte que la deuxième surface (131a) du cadre extérieur (131) et la deuxième surface (130a) de la plaque de suspension (130) sont coplanaires l'une avec l'autre.
     




    Drawing

































    REFERENCES CITED IN THE DESCRIPTION



    This list of references cited by the applicant is for the reader's convenience only. It does not form part of the European patent document. Even though great care has been taken in compiling the references, errors or omissions cannot be excluded and the EPO disclaims all liability in this regard.

    Patent documents cited in the description