(19)
(11)EP 3 364 443 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
09.01.2019 Bulletin 2019/02

(43)Date of publication A2:
22.08.2018 Bulletin 2018/34

(21)Application number: 18156559.9

(22)Date of filing:  13.02.2018
(51)Int. Cl.: 
H01J 37/28  (2006.01)
H01J 37/305  (2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD TN

(30)Priority: 16.02.2017 US 201715434132

(71)Applicant: Carl Zeiss Microscopy GmbH
07745 Jena (DE)

(72)Inventors:
  • Bhattiprolu, Sreenivas
    Dublin, CA California 94568 (US)
  • Lechner, Lorenz
    Dublin, CA California 94568 (US)

(74)Representative: Tongbhoyai, Martin 
Freischem & Partner Patentanwälte mbB Salierring 47-53
50677 Köln
50677 Köln (DE)

  


(54)METHOD FOR ANALYZING AN OBJECT AND A CHARGED PARTICLE BEAM DEVICE FOR CARRYING OUT THIS METHOD


(57) The invention relates to a method for analyzing an object using a charged particle beam device generating a beam of charged particles. Moreover, the invention relates to a charged particle beam device for carrying out this method. In particular, the charged particle beam device is an electron beam device and/or an ion beam device. The charged particle beam device is used to generate high resolution 3D data sets by sequentially removing material from the object, exposing surfaces of the object and generating images of the surfaces. When removing material from the object, an opening is generated in the object. The opening comprises sides. Lamellas are generated comprising the sides. Material characteristics of those lamellas are identified. Moreover, filtered data is generated for each pixel of images of the sides of the opening. The method uses the information with respect to the identified material characteristics, the images of the sides and the filtered data of those images to obtain information on the material characteristics for each pixel of each surface generated when sequentially removing material from the object.